Shi, Y.; Huang, Q.; Qi, R.; Shen, Z.; Zhang, Z.; Wang, Z.
Theoretical and Experimental Study of Particle Distribution from Magnetron Sputtering with Masks for Accurate Thickness Profile Control. Coatings 2020, 10, 357.
https://doi.org/10.3390/coatings10040357
AMA Style
Shi Y, Huang Q, Qi R, Shen Z, Zhang Z, Wang Z.
Theoretical and Experimental Study of Particle Distribution from Magnetron Sputtering with Masks for Accurate Thickness Profile Control. Coatings. 2020; 10(4):357.
https://doi.org/10.3390/coatings10040357
Chicago/Turabian Style
Shi, Yingna, Qiushi Huang, Runze Qi, Zhengxiang Shen, Zhong Zhang, and Zhanshan Wang.
2020. "Theoretical and Experimental Study of Particle Distribution from Magnetron Sputtering with Masks for Accurate Thickness Profile Control" Coatings 10, no. 4: 357.
https://doi.org/10.3390/coatings10040357
APA Style
Shi, Y., Huang, Q., Qi, R., Shen, Z., Zhang, Z., & Wang, Z.
(2020). Theoretical and Experimental Study of Particle Distribution from Magnetron Sputtering with Masks for Accurate Thickness Profile Control. Coatings, 10(4), 357.
https://doi.org/10.3390/coatings10040357