Preparation of ZnO Piezoelectric Thin-Film Material for Ultrasonic Transducers Applied in Bolt Stress Measurement
Abstract
:1. Introduction
2. Experimental Section
2.1. Thin-Film Deposition
2.2. Characterization
3. Results and Discussion
3.1. The Effect of Sputtering Powers on ZnO Piezoelectric Thin Films
3.1.1. Thin Films’ Structure and Micromorphology
3.1.2. Ultrasonic Signal Performance
3.2. The Effect of Target Substrate Distances on ZnO Piezoelectric Thin Films
3.2.1. Thin Films’ Structure and Micromorphology
3.2.2. Ultrasonic Signal Performance
4. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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Experimental Parameters | Conditions |
---|---|
Temperature/°C | 200 |
Sputtering power/W | 100, 200, 400, , 800, 900 |
↓ | |
Target substrate distance/mm | 60, 80, 100 |
Sputtering pressure/Pa | 2.5 |
Argon oxygen ratio | 1:1 |
Sputtering time/h | 4 |
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Zhang, Y.; Jiang, Y.; Ma, C.; Zhang, J.; Yang, B. Preparation of ZnO Piezoelectric Thin-Film Material for Ultrasonic Transducers Applied in Bolt Stress Measurement. Coatings 2023, 13, 1538. https://doi.org/10.3390/coatings13091538
Zhang Y, Jiang Y, Ma C, Zhang J, Yang B. Preparation of ZnO Piezoelectric Thin-Film Material for Ultrasonic Transducers Applied in Bolt Stress Measurement. Coatings. 2023; 13(9):1538. https://doi.org/10.3390/coatings13091538
Chicago/Turabian StyleZhang, Yuxia, Yanghui Jiang, Chi Ma, Jun Zhang, and Bing Yang. 2023. "Preparation of ZnO Piezoelectric Thin-Film Material for Ultrasonic Transducers Applied in Bolt Stress Measurement" Coatings 13, no. 9: 1538. https://doi.org/10.3390/coatings13091538