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Journal: ProceedingsVolume: 1Number: 290
Article: Fabrication of ZnO Nanorods on MEMS Piezoresistive Silicon Microcantilevers for Environmental Monitoring
- Authors:
- Jiushuai Xu 1,2,*,
- Maik Bertke 1,2 and
- Erwin Peiner 1,2
- et al.
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