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Journal: Proceedings, 2017
Volume: 1
Number: 561
Article:
Piezoelectrically Driven and Sensed Micromirrors with Extremely Large Scan Angles and Precise Closed-Loop Control
Authors:
by
Shanshan Gu-Stoppel, Thorsten Giese, Hans-Joachim Quenzer, Ulrich Hofmann and Wolfgang Benecke
Link:
https://www.mdpi.com/2504-3900/1/4/561
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