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Journal: Proceedings, 2018
Volume: 2
Number: 896
Article:
Modelling Fluid Damping of Non-Conventional Vibration Modes in MEMS Resonators
Authors:
by
Daniel Platz, Georg Pfusterschmied and Ulrich Schmid
Link:
https://www.mdpi.com/2504-3900/2/13/896
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