Proceedings, Volume 2, Issue 13

This work investigates different geometries for fully screen-printed self-actuated self-readout microcantilevers made using a sacrificial layer process. The microcantilevers are made of PZT sandwiched between two gold electrodes. Q-factors as high as...

As an example of the applicable process chain, a concave grating (1175 grooves/mm) with an active area of approx. 24 mm to 24 mm has been replicated by means of electroplating and further by injection moulding with polycarbonate, resulting in a surfa...

To realize an actual in-situ Laser-Induced Incandescence (LII) sensor system for measurements in an exhaust pipe of a combustion engine, suitable components for such an application were chosen, integrated in a first prototype and tested. Key componen...

Different published colorimetric sensors were investigated with the ultimate goal to develop a colorimetric sensor for a closed livestock farm, applicable in a rough environment. The methods were investigated to improve the lack of sensitivity, rough...

In this work we present the experimental characterization of a vertical-cavity enhanced resonant detector (VERD) optimized for detection in the mid-infrared. We demonstrate that the VERD shows a 7.1 times higher absorption and responsivity at 4.26 µm...

Monitoring of specific biomarker is critical for determining progression of a disease or efficacy of a treatment. Currently, the standard for assessing amount of specific biomarkers is the enzyme linked immunosorbent assay (ELISA), which measures qua...

The damage caused by localized heavy rains has been increasing in recent years, but it is difficult to find ways to protect people and property through existing rainfall measuring devices. This study applied energy harvesting technology through water...

Metal oxide (MOx) gas sensor signals are mainly governed by adsorption and desorption processes of oxygen and its reaction with surrounding gas molecules. Different target gases exhibit different reaction rates leading to characteristic sensor respon...

A silicon photonic microresonator comprising two curved vertical grating couplers and a single suspended Si nanowaveguide (NWG) is developed to investigate the giant enhanced Brillouin scattering in subwavelength NWGs caused by photon-phonon interact...

Integrated microfluidic technologies have demonstrated significant benefits for a range of
applications [...]

UV-light emitting diodes (395–278 nm) were used to investigate the gas sensing attributes of planar and nanostructured ZnO/AlN thin films on Si substrate towards NO₂ at room temperature. A significant increased sensitivity ((Rg − Ra)/Ra = 65.3 ppm NO...

In this study, we focused on direct and quantitative monitoring of sap dynamics in plant stems, and proposed the microscale xylem sap flow sensor. This sensor facilitates the simultaneous measurement of flow velocity and direction by combining the pr...

We present novel microelectromechanical chemical sensors for the detection of volatile organic compounds based on electrostatically actuated, nanometer-thin, freestanding membranes of organically cross-linked gold nanoparticles. The sensors employ qu...

A miniaturized coplanar waveguide (CPW) on a Y-cut LiNbO3 substrate operating in Radio Frequency region (RF) is proposed for studying of magnetostrictive multi-layered structure. The structure is composed of a 14 × [TbCo₂ (3.7 nm)/FeCo (4 nm)] nanost...

In this contribution we present an optical oxygen sensor that can easily be integrated into continuous flow reactors. The sensors are pressure resistant to up to 8 bars and are able to continuously measure oxygen for several hours in organic solvents...

This study reports on a novel bi-stable actuator with an integrated aluminum nitride (AlN) piezoelectric layer sandwiched between two electrodes. To achieve bistability, the membranes must exceed a characteristic compressive stress value, also called...

Smart bearings incorporating self-powered sensors and wireless data communications with intelligence in monitoring bearing conditions can help to detect early faults in aero-engine bearings. This paper presents the challenges in design and developmen...

The time-efficient and accurate implementation of physics-based fluidic damping effects is still one of the biggest challenges in the simulation of complex MEMS devices. Two modelling approaches utilizing the CRAIG/BAMPTON component mode synthesis me...

Solar cells are one common choice to power energy-autonomous wireless sensor nodes (WSNs). There are different approaches to improve their service and reliability via solar energy prediction algorithms, to allow the WSN to “know” about th...

A new method for the site-selective synthesis of nanowires has been developed to enable the material growth with specific morphology and different compositions on one single chip. Based on a modification of the chemical vapor deposition method, the g...

WO₃ is a commonly used material for gas sensing. Although a great deal of research has been done on how to tune sensors based on WO₃, no clear consensus exists on what characteristics are inherent to the metal oxide: This work looks at six different...

Direct Laser Interference Patterning (DLIP) technique has been used to generate a line pattern on the surface of WO₃ thin films, due to the interference of two coherent laser beams, modifying its surface morphology and physical properties. Gas sensin...

In this paper we present a results of fabrication of 3D printed micropot with integrated cantilever-like force sensor. Different thickness cantilevers was used. Presented micropot was use for characterization of grow Lepidium sativium.

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Co-resonantly coupled cantilever sensors have recently been introduced as a very promising concept to strongly increase the sensitivity of dynamic-mode cantilever MEMS sensors (several orders of magnitude experimentally demonstrated) while maintainin...

Recent developments in multispectral cameras have demonstrated how compact and low-cost spectral sensors can be made by monolithically integrating filters on top of commercially available image sensors. In this paper, the fabrication of a RGB + NIR v...

Mobile measurement of particle number concentration (PN) in the exhaust of motor vehicles has recently become an integral part of emission legislation. Charge-based sensing techniques for the examination of PN, like Diffusion Charging (DC), represent...

In this work for the first time MEMS-type deformation microcytometer and a new methodology for the determination of cell deformability is proposed. Novel chip design and methodology allow real-time observation of the cell deformation occurring during...

Achieving a stable, long-term connection with millions of neurons within living organisms remains one of the dreams of neuroscience. Silicon shank based probes lead the field in terms of pure channel count. On the other hand, polymer neural probes of...

In this paper we report on the development tungsten oxide based chemiresistive sensors for the monitoring of oxygen at low temperatures (T ≤ 400 °C) in dry and humid air. The sensors were deposited onto alumina substrate by a combination of spin coat...

In this paper, the deterioration of statistical fault classification of a hydraulic system and an electromechanical cylinder EMC due to reduced sampling rates of sensor nets is shown. As a result, two types of faults can be distinguished: On the one...

An olfactory display is necessary for effective multimodal information communication. The relatively large size of current olfactory displays does not support integration with other information devices. Thus, in this study, a heat-driven-type microel...

We present a feasibility study on non‐invasive flow rate measurements in heating, ventilation, and air conditioning (HVAC) systems utilizing thermal transduction instead of commonly used ultrasonic techniques. The investigated thermal flow transducti...

We demonstrate a compact electromagnetic power sensor based on force effects of electromagnetic radiation onto a highly reflective mirror surface. Unlike the conventional power measurement approach, the photons are not absorbed and can be further use...

The online control of natural gas quality is important for customers, because for them the important value is calorific value of consumed gas, but not its volume. The application of thermoconductometric sensor gives simple possibility to fabricate im...

The investigation of wear resistant thin film sensor systems for the detection of temperature and melt distributions on the surface of an injection mold for the optimization of natural fibre reinforced plastic production is the theme of this paper.

In this paper we present a printed, fast, high-sensitive and cheap wireless incontinence sensor [...]

This paper reports a piezoresistive silicon microcantilever-based gravimetric humidity sensor, where a ZnO nanofilm (200 nm) and ZnO nanorods (NRs) with different lengths (1.5 µm and 6 µm) modified with chitosan self-assembled monolayers...

A novel porphyrin ligand, Zn(II)TPP-BPI-crown (ZnPC), functionalized with two dibenzo-crown-ether moieties was synthesized and tested as cation-sensitive ionophore. Fluorescence studies on ligand sensitivity towards a number of different metal cation...

In this paper we present a 3D printed flow meter based on venturri effect. Dimensions of the microchannels are 800 µm for wider and 400 µm for thinker channel. Application of different type of sensors was investigated: differential, absolute and digi...

The effect of water wave impacts and breakdown on the output performance of Water-Dielectric Single Electrode Mode Triboelectric Nanogenerators (WDSE-TENG) has been evaluated. When water contacts a TENG consisting of a hydrophobic dielectric layer, t...

In this research, we present the development of 3D printed, highly stretchable and sensitive strain sensors using Graphene based composites. Graphene, a 2D material with unique electrical and piezoresistive properties, has already been used to create...

Polymer nanocomposite (PNC) inks containing polyvinylpyrrolidone with a molecular weight of 40 kDa (PVP40) and a high structure carbon black (CB) were formulated for gas sensing applications. The formulation was optimized for inkjet printing by using...

The influence of various gas compositions on surface adsorbate species and electrical conductivity of indium tin oxide (ITO) powders and thick films was studied. By combining results of temperature dependent desorption (TPD) with electrical conductiv...

A novel in-plane sensitive Hall arrangement consisting of two identical n-Si three-contact (3C) elements and realized in a common technological process, is presented. In the solution, the minimization of the offset and its temperature drift is achiev...

The functional principle of an optical gradient magnetic field sensor consisting of two independent laterally oscillating masses on a single chip is reported. These oscillations are caused by the Lorentz forces resulting from an alternating current t...

Monitoring of circulating N-terminal proBNP (NT-proBNP) biomarkers is crucial for the diagnosis of people suffering from heart failure (HF). In this work, we describe a novel ultra-sensitive NT-proBNP immunosensor for NT-proBNP detection in artificia...

We prepared platinum nanoparticle ink usable for the fabrication of MEMS microheaters

of high-temperature gas sensors and thermoresistors operating up to 450 °C and present some

preliminary results on the application of the ink in sensor microheate...

For distributed sensing, local power sources are of interest. [...]

The detailed experimental investigation of the performance of a commercially available smart humidity sensor used for the measurement of relative humidity at elevated pressures (0.1–2 MPa) is reported. A dedicated set-up was developed for generating...