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Journal: Optics, 2021
Volume: 2
Number: 11
Article:
Design of Refractive/Diffractive Hybrid Projection Lens for DMD-Based Maskless Lithography
Authors:
by
Zhuohui Xu, Jinyun Zhou, Bo Wang and Ziming Meng
Link:
https://www.mdpi.com/2673-3269/2/2/11
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