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Synthesis and Characterization of the Growth of Epitaxial Films

A special issue of Materials (ISSN 1996-1944). This special issue belongs to the section "Thin Films and Interfaces".

Deadline for manuscript submissions: closed (20 November 2022) | Viewed by 5043

Special Issue Editor


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Centre Interdisciplinaire de Nanoscience de Marseille, Marseille (CINaM-CNRS), Aix-Marseille Université, Marseille, France
Interests: MBE; surfaces and interfaces; epitaxial growth; spintronics

Special Issue Information

The “Synthesis and Characterization of the Growth of Epitaxial Films” is a hot topic covering a wide range of scientific and engineering fields in an equally wide range of industrial sectors such as microelectronics, optics, defense, spatial, jewelry and so on. Epitaxial growth is a bridge between crystal growth and device manufacturing, bringing a very high added value to the final products. Thus, it is an ecosystem covering both experimental and theoretical scientific research as well as engineering and technical developments.

The intended physical, chemical, thermal, mechanical, etc., properties of the synthesized objects come from the control of growth processes. Novel synthesis techniques have been developed, such as 3D printing epitaxy, and have evolved alongside well-established ones, for which developments are also taking place, such as MBE and its atomic sublimation or valved sources, CVD and its variants, PLD, sol-gel, etc. The characterization of the properties is carried out by volume (bulk) or surface analytical techniques, which have also benefited from significant advances: auger microprobes, spin detectors, nanoindentation, Raman spectroscopy, etc.

This Special Issue will address advances in the synthesis and characterization of epitaxial films growth with focuses on:

  • the interplay between the growth of the films and their properties;
  • novel film growth and characterization techniques;
  • new materials epitaxially grown as thin films.

Keywords

  • thin films
  • homoepitaxy
  • heteroepitaxy
  • growth methods and techniques
  • characterization methods and techniques
  • properties of thin films
  • surface and interface engineering

Published Papers (1 paper)

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Research

11 pages, 6065 KiB  
Article
Process Steps for High Quality Si-Based Epitaxial Growth at Low Temperature via RPCVD
by Jongwan Jung, Baegmo Son, Byungmin Kam, Yong Sang Joh, Woonyoung Jeong, Seongjae Cho, Won-Jun Lee and Sangjoon Park
Materials 2021, 14(13), 3733; https://doi.org/10.3390/ma14133733 - 3 Jul 2021
Cited by 2 | Viewed by 4247
Abstract
The key process steps for growing high-quality Si-based epitaxial films via reduced pressure chemical vapor deposition (RPCVD) are investigated herein. The quality of the epitaxial films is largely affected by the following steps in the epitaxy process: ex-situ cleaning, in-situ bake, and loading [...] Read more.
The key process steps for growing high-quality Si-based epitaxial films via reduced pressure chemical vapor deposition (RPCVD) are investigated herein. The quality of the epitaxial films is largely affected by the following steps in the epitaxy process: ex-situ cleaning, in-situ bake, and loading conditions such as the temperature and gaseous environment. With respect to ex-situ cleaning, dry cleaning is found to be more effective than wet cleaning in 1:200 dilute hydrofluoric acid (DHF), while wet cleaning in 1:30 DHF is the least effective. However, the best results of all are obtained via a combination of wet and dry cleaning. With respect to in-situ hydrogen bake in the presence of H2 gas, the level of impurities is gradually decreased as the temperature increases from 700 °C to a maximum of 850 °C, at which no peaks of O and F are observed. Further, the addition of a hydrogen chloride (HCl) bake step after the H2 bake results in effective in-situ bake even at temperatures as low as 700 °C. In addition, the effects of temperature and environment (vacuum or gas) at the time of loading the wafers into the process chamber are compared. Better quality epitaxial films are obtained when the samples are loaded into the process chamber at low temperature in a gaseous environment. These results indicate that the epitaxial conditions must be carefully tuned and controlled in order to achieve high-quality epitaxial growth. Full article
(This article belongs to the Special Issue Synthesis and Characterization of the Growth of Epitaxial Films)
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