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Microsystem and Nanosystem Research for Sensors, Actuators and Energy Conversion...
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Microsystem and Nanosystem Research for Sensors, Actuators and Energy Conversion Devices

A topical collection in Micro (ISSN 2673-8023). This collection belongs to the section "Microscale Engineering".

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Editors

Prof. Dr. Vittorio Ferrari

E-Mail Website
Collection Editor
Department of Information Engineering (DII), University of Brescia, Via Branze 38, I-25123 Brescia, Italy
Interests: piezoelectric sensors and transducers; resonant and acoustic-wave sensors; energy harvesting for sensors; sensor interface electronics; MEMS and microsensors for physical quantities
Special Issues, Collections and Topics in MDPI journals
Dr. Marco Baù

E-Mail Website
Collection Editor
Department of Information Engineering (DII), University of Brescia, Via Branze 38, 25123 Brescia, Italy
Interests: interface electronic circuits for sensors; contactless interrogation techniques for resonant and capacitive sensors; MEMS sensors; energy harvesting for autonomous sensors and microsystems; acoustic-wave sensors; electro-mechanical modeling and FEM simulations; low-noise circuits for sensors and detectors
Special Issues, Collections and Topics in MDPI journals
Dr. Dario Zappa

E-Mail Website
Collection Editor
Sensor Lab, Department of Information Engineering (DII), University of Brescia, Via Valotti 9, 25133 Brescia, Italy
Interests: metal oxides; nanowires; chemical sensors; heterostructures; artificial olfaction; material characterization; material synthesis
Special Issues, Collections and Topics in MDPI journals

Topical Collection Information

Dear Colleagues,

The world of micro- and nanosystems is continuously evolving and the number of available applications is exponentially growing. Progresses in nanostructured innovative materials and fabrication techniques, combined with the miniaturization processes of microdevices, have led to new micro-electromechanical systems (MEMS) and nano-electromechanical systems (NEMS). The advanced development, and often the combination, of nano- and microsystems is resulting in new devices, such as physical, chemical, biological or optical sensors; miniaturized actuators; and micro-instruments. Additionally, applications in energy-related and conversion devices (e.g., batteries, fuel cells, solar cells, energy harvesters) based on thermo-/piezo-/pyro-/triboelectric materials, are emerging. New challenges and opportunities for applications are now at the outset in both traditional and more recent research fields, such as physics, electronics, chemistry biology, biomedical sciences, and microfluidics, to name a few. This rapidly evolving scenario is in turn pushing advances in the field of electronic circuits, techniques and systems for signal conditioning/processing and power management, and in the development of analytical and simulation models.

In this context, we invite researchers and scientists to submit contributions on scientific and technical aspects of micro- and nanosystems for sensors, actuators and energy-conversion devices. Both review articles and original research articles are welcome.

The covered topics include, but are not limited to, the following:

  • Fabrication techniques and processes;
  • Sensors, actuators, and transducers at the micro- and nanoscale;
  • Electronic circuits and techniques for micro- and nanosystems;
  • Energy conversion devices and energy harvesters;
  • Micro- and nanoinstruments and metrology;
  • Novel material trends for micro- and nanosystems;
  • Analytical and simulation modeling techniques;
  • Innovative applications.

Prof. Dr. Vittorio Ferrari
Dr. Marco Baù
Dr. Dario Zappa
Collection Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the collection website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micro is an international peer-reviewed open access quarterly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 1000 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • physical, chemical, biological, optical sensors
  • miniaturized actuators and micro-instruments
  • energy-conversion devices
  • energy harvesting
  • mems nems
  • fabrication techniques
  • simulation techniques
  • modeling techniques
  • electronic circuits and techniques

Published Papers (13 papers)

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2024

Jump to: 2023, 2022

13 pages, 3591 KiB  
Article
Evaluation of the Influence of Lorentz Forces on the Natural Frequencies of a Dual-Microcantilever Sensor for Ultralow Mass Detection
by Luca Banchelli, Georgi Todorov, Vladimir Stavrov, Borislav Ganev and Todor Todorov
Micro 2024, 4(4), 572-584; https://doi.org/10.3390/micro4040035 - 12 Oct 2024
Viewed by 1002
Abstract
In this paper, the impact of Lorentz forces and temperature on the natural frequencies of a piezoresistive sensor composed of two microcantilevers with integrated U-shaped thin-film aluminum heaters are investigated. Two types of experiments were performed. In the first, the sensor was placed [...] Read more.
In this paper, the impact of Lorentz forces and temperature on the natural frequencies of a piezoresistive sensor composed of two microcantilevers with integrated U-shaped thin-film aluminum heaters are investigated. Two types of experiments were performed. In the first, the sensor was placed in a magnetic field so that the current flowing in the heater, in addition to raising the temperature, produced Lorentz forces, inducing normal stresses in the plane of one of the microcantilevers. In the second, which were conducted without magnetic fields, only the temperature variation of the natural frequency was left. In processing of the results, the thermal variations were subtracted from the variations due to both Lorentz forces and temperature in the natural frequency, resulting in the influence of the Lorentz forces only. Theoretical relations for the Lorentz frequency offsets were derived. An indirect method of estimating the natural frequency of one of the cantilevers, through a particular cusp point in the amplitude–frequency response of the sensor, was used in the investigations. The findings show that for thin microcantilevers with silicon masses on the order of 4 × 10−7 g and currents of 25 µA, thermal eigenfrequency variations are dominant. The results may have applications in the design of similar microsensors with vibrational action. Full article
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16 pages, 4273 KiB  
Article
The Design, Simulation, and Parametric Optimization of an RF MEMS Variable Capacitor with an S-Shaped Beam
by Shakila Shaheen, Tughrul Arslan and Peter Lomax
Micro 2024, 4(3), 474-489; https://doi.org/10.3390/micro4030030 - 14 Aug 2024
Viewed by 4286
Abstract
This study presents the design and simulation of an RF MEMS variable capacitor with a high tuning ratio and high linearity factor of capacitance–voltage response. An electrostatic torsion actuator with planar and non-planar structures is presented to obtain the high tuning ratio by [...] Read more.
This study presents the design and simulation of an RF MEMS variable capacitor with a high tuning ratio and high linearity factor of capacitance–voltage response. An electrostatic torsion actuator with planar and non-planar structures is presented to obtain the high tuning ratio by avoiding the occurrence of pull-in point. In the proposed design, the capacitor plate is connected to the electrostatic actuators by using the s-shaped beam. The proposed design shows a 138% tuning ratio with the planar structure of the actuator and 167% tuning ratio by implementing the non-planar structure. A linearity factor of 99% is attained by adjusting the rates at which the capacitor plate rises as the actuation voltage increases and the rate at which the capacitance decreases as the plate rises. Parametric optimization of the design is performed by utilizing the finite element method (FEM) analysis and high-frequency structural simulator (HFSS) analysis to obtain an optimized high-tuning ratio RF MEMS varactor at low actuation voltage. S-parameters of the design are presented on HFSS, with a 50 ohm coplanar waveguide (CPW) serving as the transmission line. The proposed RF MEMS varactor can be utilized in tunable RF devices. Full article
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14 pages, 5726 KiB  
Article
Coupled Mode Design of Low-Loss Electromechanical Phase Shifters
by Nathnael S. Abebe, Sunil Pai, Rebecca L. Hwang, Payton Broaddus, Yu Miao and Olav Solgaard
Micro 2024, 4(2), 334-347; https://doi.org/10.3390/micro4020021 - 6 May 2024
Cited by 1 | Viewed by 4041
Abstract
Micro-electromechanical systems (MEMS) have the potential to provide low-power phase shifting in silicon photonics, but techniques for designing low-loss devices are necessary for adoption of the technology. Based on coupled mode theory (CMT), we derive analytical expressions relating the loss and, in particular, [...] Read more.
Micro-electromechanical systems (MEMS) have the potential to provide low-power phase shifting in silicon photonics, but techniques for designing low-loss devices are necessary for adoption of the technology. Based on coupled mode theory (CMT), we derive analytical expressions relating the loss and, in particular, the phase-dependent loss, to the geometry of the MEMS phase shifters. The analytical model explains the loss mechanisms of MEMS phase shifters and enables simple optimization procedures. Based on that insight, we propose phase shifter geometries that minimize coupling power out of the waveguide. Minimization of the loss is based on mode orthogonality of a waveguide and phase shifter modes. We numerically model such geometries for a silicon nitride MEMS phase shifter over a silicon nitride waveguide, predicting less than −1.08 dB loss over a 2π range and −0.026 dB loss when optimized for a π range. We demonstrate this design framework with a custom silicon nitride process and achieve −0.48 dB insertion loss and less than 0.05 dB transmission variation over a π phase shift. Our work demonstrates the strength of the coupled mode approach for the design and optimization of MEMS phase shifters. Full article
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15 pages, 10680 KiB  
Article
Characterization of Thin AlN/Ag/AlN-Reflector Stacks on Glass Substrates for MEMS Applications
by Christian Behl, Regine Behlert, Jan Seiler, Christian Helke, Alexey Shaporin and Karla Hiller
Micro 2024, 4(1), 142-156; https://doi.org/10.3390/micro4010010 - 29 Feb 2024
Cited by 2 | Viewed by 1131
Abstract
Thin metal layers such as silver (Ag) are being utilized for various optical and plasmonic applications as well as for electrical purposes, e.g., as transparent electrodes in display devices or solar cells. This paper focuses on optical MEMS applications such as the Fabry–Pérot [...] Read more.
Thin metal layers such as silver (Ag) are being utilized for various optical and plasmonic applications as well as for electrical purposes, e.g., as transparent electrodes in display devices or solar cells. This paper focuses on optical MEMS applications such as the Fabry–Pérot interferometer (FPI). Within such filters, reflector materials such as distributed Bragg reflectors (DBRs) or subwavelength gratings (SWGs) have been widely used so far, whereas metallic thin films (MTFs) were limited in application due to their comparatively higher absorption. In this paper, thin sputtered Ag layers with thicknesses of 20, 40 and 60 nm on glass substrates have been investigated, and it is shown that the absorption is very low in the visible spectral range (VIS) and increases only in near-infrared (NIR) with increasing wavelength. Thus, we consider Ag-thin layers to be an interesting reflector material at least for the VIS range, which can be easily fabricated and integrated. However, Ag is not inert and stable when exposed to the atmosphere. Hence, it needs a passivation material. For this purpose, AlN has been chosen in this contribution, which can be deposited by sputtering as well. In this contribution, we have chosen thin AlN layers for this purpose, which can also be deposited by sputtering. Thus, various AlN/Ag/AlN-reflector stacks were created and patterned by lift-off technology preferably. The fabricated reflectors were characterized with respect to adhesion, stress, cohesion, homogeneity, and most importantly, their optical properties. It was found that the thickness of the AlN can be used to adjust the reflectance–transmittance ratio in the VIS range, and influences the adsorption in the NIR range as well. Based on the measured values of the reflectors with 40 nm Ag, an exemplary transmission filter characteristics has been predicted for a wavelength range from 400 to 800 nm. Both the maximum transmittance and the full width at half maximum (FWHM) can be tuned by variation of the AlN thickness from 20 to 60 nm. Full article
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12 pages, 3216 KiB  
Article
Toward Remote Detection of Chemical Warfare Simulants Using a Miniature Potentiostat
by Amer Dawoud, Rashid Mia, Jesy Alka Motchaalangaram, Wujian Miao and Karl Wallace
Micro 2024, 4(1), 49-60; https://doi.org/10.3390/micro4010004 - 22 Jan 2024
Cited by 1 | Viewed by 2093
Abstract
A miniaturized electrochemical sensor was developed for the remote detection of chemical warfare agent (CWA) simulants. To facilitate drone-based remote sensing, this present study focuses on advancing the miniaturized and compact electrochemical sensor for monitoring two CWA simulants, diisopropyl fluorophosphate (DFP) and O,S-diethylmethylphosphonothioate [...] Read more.
A miniaturized electrochemical sensor was developed for the remote detection of chemical warfare agent (CWA) simulants. To facilitate drone-based remote sensing, this present study focuses on advancing the miniaturized and compact electrochemical sensor for monitoring two CWA simulants, diisopropyl fluorophosphate (DFP) and O,S-diethylmethylphosphonothioate (O,S-DEMPT). The differential pulse voltammetry (DPV) signal was processed, and the DPV signature features were extracted on the basis of the redox properties associated with the absence and the presence of DFP and O,S-DEMPT. Upon the addition of 0.10 equivalence of DFP or O,S-DEMPT, a shift in potential (E) of ~0.13 V was recorded. The limit of detection (LOD) was calculated to be 0.25 µM (0.046 ppm) and 0.10 µM (0.017 ppm) for DFP and O,S-DEMPT, respectively. These results were validated using a portable Palmsens Emstat HR potentiostat, which corroborated the results obtained using a lab benchtop potentiostat. Additionally, Boolean logic (“AND” operation) was implemented for future drone technology deployment. This advancement enables the fabrication of a networked device capable of autonomously executing tasks without constant oversight. Full article
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2023

Jump to: 2024, 2022

13 pages, 3230 KiB  
Article
Design Guideline for a Cantilever-Type MEMS Switch with High Contact Force
by Ilia V. Uvarov and Igor A. Belozerov
Micro 2024, 4(1), 1-13; https://doi.org/10.3390/micro4010001 - 20 Dec 2023
Viewed by 3218
Abstract
Micromechanical switches are of significant interest for advanced radio frequency and microwave systems, but their practical implementation is limited by low reliability. Electrodes of a microscopic size develop weak contact force that leads to high and unstable contact resistance. The force is typically [...] Read more.
Micromechanical switches are of significant interest for advanced radio frequency and microwave systems, but their practical implementation is limited by low reliability. Electrodes of a microscopic size develop weak contact force that leads to high and unstable contact resistance. The force is typically increased by using a sophisticated switch design with extended lateral dimensions, although a simple and compact cantilever is more preferable. The paper describes for the first time a comprehensive approach to enhance the force of an electrostatically actuated switch. The strategy is applied to a miniature device based on a 50 µm long cantilever. The contact force is increased from 10 to 112 µN, making the switch strong enough to achieve low and stable contact resistance. The restoring force is also enhanced in order to ensure reliable de-actuation. The growth of forces is accompanied by a reduction in the pull-in voltage. Connecting several cantilevers in parallel and manipulating the number and position of contact bumps additionally improves the force and mechanical stability of the switch. An optimal design contains a triple cantilever with two bumps. It provides 50% higher force per contact compared to the single-cantilever switch at the same pull-in voltage and keeps the advantages of a miniature device. The proposed design strategy may be used for building reliable MEMS switches. Full article
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11 pages, 3667 KiB  
Communication
Enhancing Linearity in Parallel-Plate MEMS Varactors through Repulsive Actuation
by Roufaida Bensalem, Mohannad Y. Elsayed, Hani H. Tawfik, Frederic Nabki and Mourad N. El-Gamal
Micro 2023, 3(4), 811-821; https://doi.org/10.3390/micro3040057 - 26 Oct 2023
Cited by 2 | Viewed by 1508
Abstract
This paper presents a new MEMS varactor that uses repulsive actuation to achieve an ultra-linear capacitance-to-voltage response. The approach proposed involves actuating the moveable electrode away from the fixed electrode, instead of the conventional closing-the-gap direction. This increasing-gap movement reduces the capacitance as [...] Read more.
This paper presents a new MEMS varactor that uses repulsive actuation to achieve an ultra-linear capacitance-to-voltage response. The approach proposed involves actuating the moveable electrode away from the fixed electrode, instead of the conventional closing-the-gap direction. This increasing-gap movement reduces the capacitance as the actuation voltage increases. The MEMS variable capacitor is fabricated using PolyMUMPs technology and exhibits an excellent linearity factor of 99.7% in capacitance-to-voltage response, and a capacitance tuning ratio of 11× was achieved. The proposed strategy will enable the development of high-performance MEMS-based tunable devices for various applications. Full article
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15 pages, 2417 KiB  
Article
Advanced Technologies in the Fabrication of a Micro-Optical Light Splitter
by Giovanna Stella, Lorena Saitta, Alfredo Edoardo Ongaro, Gianluca Cicala, Maïwenn Kersaudy-Kerhoas and Maide Bucolo
Micro 2023, 3(1), 338-352; https://doi.org/10.3390/micro3010023 - 10 Mar 2023
Cited by 5 | Viewed by 2300
Abstract
In microfluidics, it is important to confine and transport light as close as possible to the sample by guiding it into a small volume of the microfluidic channel, acquiring the emitted/transmitted radiation. A challenge in this context is the miniaturization of the optical [...] Read more.
In microfluidics, it is important to confine and transport light as close as possible to the sample by guiding it into a small volume of the microfluidic channel, acquiring the emitted/transmitted radiation. A challenge in this context is the miniaturization of the optical components and their integration into the microfluidic device. Among all of the optical components, a particular role is played by the beam splitter, an important optical device capable of splitting light into several paths. In this paper, a micro-splitter is designed and realized by exploiting low-cost technologies. The micro-splitter consists of a micro-mirror in-between two micro-waveguides. This component was fabricated in different materials: poly-dimethyl-siloxane (PDMS), poly(methyl methacrylate) (PMMA), and VeroClear RGD810. A 3D printing master–slave fabrication protocol was used with PDMS, a direct 3D printing approach with VeroClear, and a laser cutting procedure with PMMA. The experimental results obtained show the high potential of the proposed fabrication protocols, based on low-cost technologies, for the realization of micro-optical components, which could also be easily integrated with microfluidics systems. Full article
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16 pages, 4053 KiB  
Article
Capacitive-Type Pressure Sensor for Classification of the Activities of Daily Living
by Ji Su Park, Sang-Mo Koo and Choong Hyun Kim
Micro 2023, 3(1), 35-50; https://doi.org/10.3390/micro3010004 - 9 Jan 2023
Cited by 1 | Viewed by 2196
Abstract
In order to operate a gait rehabilitation device, it is necessary to accurately classify the states appearing in activities of daily living (ADLs). In the case of force sensing resistors (FSRs), which are often used as pressure sensors in gait analysis, it is [...] Read more.
In order to operate a gait rehabilitation device, it is necessary to accurately classify the states appearing in activities of daily living (ADLs). In the case of force sensing resistors (FSRs), which are often used as pressure sensors in gait analysis, it is desirable to replace them with other sensors because of their low durability. In the present study, capacitive-type pressure sensors, as an alternative to FSRs, were developed, and their performance was evaluated. In addition, the timed up and go test was performed to measure the ground reaction force in healthy individuals, and a machine learning technique was applied to the calculated biosignal parameters for the classification of five types of ADLs. The performance evaluation results showed that a sensor with thermoplastic polyurethane (substrate and dielectric layer material) and multiwall carbon nanotubes (conductive layer) has sufficient sensitivity and durability for use as a gait analysis pressure sensor. Moreover, when an overlapping filter was applied to the four-layer long short-term memory (LSTM) or the five-layer LSTM model developed for motion classification, the precision was greater or equal to 95%, and unstable errors did not occur. Therefore, when the pressure sensor and ADLs classification algorithm developed in this study are applied, it is expected that motion classification can be completed within a time range that does not affect the control of the gait rehabilitation device. Full article
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2022

Jump to: 2024, 2023

20 pages, 3915 KiB  
Review
Resurgence of Electron Quantum Tunneling Sensors
by Aishwaryadev Banerjee and Carlos H. Mastrangelo
Micro 2022, 2(4), 679-698; https://doi.org/10.3390/micro2040046 - 13 Dec 2022
Cited by 3 | Viewed by 5797
Abstract
Quantum tunneling sensors are typically ultra-sensitive devices that have been specifically designed to convert a stimulus into an electronic signal using the wondrous principles of quantum mechanical tunneling. In the early 1990s, William Kaiser developed one of the first micromachined quantum tunneling sensors [...] Read more.
Quantum tunneling sensors are typically ultra-sensitive devices that have been specifically designed to convert a stimulus into an electronic signal using the wondrous principles of quantum mechanical tunneling. In the early 1990s, William Kaiser developed one of the first micromachined quantum tunneling sensors as part of his work with the NASA Jet Propulsion Laboratory. Since then, there have been scattered attempts at utilizing this phenomenon for the development of a variety of physical and chemical sensors. Although these devices demonstrate unique characteristics, such as high sensitivity, the principle of quantum tunneling often acts as a double-edged sword and is responsible for certain drawbacks of this sensor family. In this review, we briefly explain the underlying working principles of quantum tunneling and how they are used to design miniaturized quantum tunneling sensors. We then proceed to describe an overview of the various attempts at developing such sensors. Next, we discuss their current necessity and recent resurgence. Finally, we describe various advantages and shortcomings of these sensors and end this review with an insight into the potential of this technology and prospects. Full article
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11 pages, 3281 KiB  
Article
Identification of MEMS Geometric Uncertainties through Homogenization
by David Faraci, Valentina Zega, Alessandro Nastro and Claudia Comi
Micro 2022, 2(4), 564-574; https://doi.org/10.3390/micro2040037 - 23 Sep 2022
Cited by 2 | Viewed by 2441
Abstract
Fabrication imperfections strongly influence the functioning of Micro-Electro-Mechanical Systems (MEMS) if not taken into account during the design process. They must be indeed identified or precisely predicted to guarantee a proper compensation during the calibration phase or directly in operation. In this work, [...] Read more.
Fabrication imperfections strongly influence the functioning of Micro-Electro-Mechanical Systems (MEMS) if not taken into account during the design process. They must be indeed identified or precisely predicted to guarantee a proper compensation during the calibration phase or directly in operation. In this work, we propose an efficient approach for the identification of geometric uncertainties of MEMS, exploiting the asymptotic homogenization technique. In particular, the proposed strategy is experimentally validated on a MEMS filter, a device constituted by a complex periodic geometry, which would require high computational costs if simulated through full-order models. The complex periodic structure is replaced by an equivalent homogeneous medium, allowing a fast optimization procedure to identify imperfections by comparing a simplified analytical model with the experimental data available for the MEMS filter. The actual over-etch, obtained after the release phase, and the electrode offset of a fabricated MEMS filter are effectively identified through the proposed strategy. Full article
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11 pages, 3236 KiB  
Article
Experimental Characterization of Water Condensation Processes on Self-Assembled Monolayers Using a Quartz Crystal Microbalance with Energy Dissipation Monitoring
by Subin Song, Glenn Villena Latag, Evan Angelo Quimada Mondarte, Ryongsok Chang and Tomohiro Hayashi
Micro 2022, 2(3), 513-523; https://doi.org/10.3390/micro2030033 - 29 Aug 2022
Cited by 7 | Viewed by 2891
Abstract
Water condensation on solid surfaces is a universal phenomenon that plays an essential role in many interfacial phenomena, such as friction, corrosion, adsorption, etc. Thus far, the initial states of water condensation on surfaces with varying chemical properties have yet to be fully [...] Read more.
Water condensation on solid surfaces is a universal phenomenon that plays an essential role in many interfacial phenomena, such as friction, corrosion, adsorption, etc. Thus far, the initial states of water condensation on surfaces with varying chemical properties have yet to be fully explained at the nanoscale. In this study, we performed a real-time characterization of water condensation on self-assembled monolayers (SAMs) with different functional groups using quartz crystal microbalance with energy dissipation monitoring (QCM-D). We found that the kinetics of water condensatison is critically dependent on the head group chemistries. We discovered that the condensed water’s viscoelasticity cannot be predicted from macroscopic water contact angles, but they were shown to be consistent with the predictions of molecular simulations instead. In addition, we also found a highly viscous interfacial water layer on hydrophilic protein-resistant SAMs. In contrast, the interfacial water layer/droplet on either hydrophilic protein-adsorbing or hydrophobic SAMs exhibited lower viscosity. Combining our and previous findings, we discuss the influence of interfacial hydration on the viscoelasticity of condensed water. Full article
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21 pages, 1063 KiB  
Article
Efficient and Accurate Modeling of the Surface Deflection of Thin Layers on Composite Substrates with Applications to Piezoelectric Parameter Measurements
by Thomas Voglhuber-Brunnmaier, Roman Beigelbeck, Ulrich Schmid, Thilo Sauter, Tiangui You, Xin Ou and Bernhard Jakoby
Micro 2022, 2(3), 369-389; https://doi.org/10.3390/micro2030025 - 29 Jun 2022
Viewed by 2279
Abstract
The electrical and mechanical response of multilayered structures involving a piezoelectric layer and bull’s eye shaped electrodes is investigated. A boundary element method is employed based on spectral domain Green’s functions. With this method, the electric field distribution is determined first, and the [...] Read more.
The electrical and mechanical response of multilayered structures involving a piezoelectric layer and bull’s eye shaped electrodes is investigated. A boundary element method is employed based on spectral domain Green’s functions. With this method, the electric field distribution is determined first, and the local mechanical displacement in a second step. As will be shown, this allows us to exploit cylindrical symmetry for the electric surface charge distribution, but not for the vertical surface displacements. The effect of substrate bending due to in plane-stress, introduced by the piezoelectric constant d31, and the benefits of using bull’s eye electrode geometries with thick metallic backplates intended to reduce this effect are studied. A rigorous analysis and a largely simplified, but accurate approximation are compared. The application of this technique is demonstrated on a practical example for highly efficient and accurate determination of selected piezoelectric coefficients from surface topography measurements on such structures. Full article
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