Advances in Optical MEMS and Laser Technologies

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".

Deadline for manuscript submissions: closed (29 February 2024) | Viewed by 1520

Special Issue Editor


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Guest Editor
Head of Group Optical Systems, Business Unit MEMS Applications, Fraunhofer Institute for Silicon Technology ISIT, Fraunhoferstraße 1, 25524 Itzehoe, Germany
Interests: photonics

Special Issue Information

Dear Colleagues,

Modern Si-Technology delivers compact, highly integrated and energy-efficient solutions for research and industrial applications. Optical components, in the other hand, is one of the central research activities nowadays, driven by strong developments in areas such as consumer, automotive, as well as precise metrology, high secure communication and quantum technology. Si based, miniaturized optical systems combines the above mentioned strengths of high integration level, energy efficiency, compactness and high precision. Continues material development and manufactory progress for Si-technology and optical components even make this topic fusion growingly interesting and highly performant.

In this Special Issue, we’d like to encourage authors to present their current result on designs, modelling, analysis, characterization, fabrication and applications for optical MEMS. The potential topics include, but are not limited to MEMS optical systems, integrated light source, wave guide, laser projection, LIDAR sensor system or quantum technology etc.  

Dr. Shanshan Gu-Stoppel
Guest Editor

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Keywords

  • optoelectronics,
  • micromirrors MOEM
  • MEMS
  • LIDAR
  • FBG sensors
  • integrated light source
  • wave guide

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Published Papers (1 paper)

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Research

12 pages, 4079 KiB  
Article
Water-Immersible MEMS Mirror with a Large Optical Aperture
by Yi Yang, Yichen Liu, Yongquan Su, Yang Wang, Yonggui Zhang, Hao Chen, Lihao Wang and Zhenyu Wu
Micromachines 2024, 15(2), 235; https://doi.org/10.3390/mi15020235 - 2 Feb 2024
Cited by 1 | Viewed by 1225
Abstract
This paper presents a two-axis AlScN-based water-immersible MEMS mirror fabricated in an 8-inch MEMS process. Compared with other studies, this device has a larger optical aperture 10 mm in diameter. The resonant frequencies of the device are 1011 Hz in air and 342 [...] Read more.
This paper presents a two-axis AlScN-based water-immersible MEMS mirror fabricated in an 8-inch MEMS process. Compared with other studies, this device has a larger optical aperture 10 mm in diameter. The resonant frequencies of the device are 1011 Hz in air and 342 Hz in water. The scanning angle reaches ±5° and ±2° at resonant frequencies in air and water, respectively. The cavitation phenomenon is observed when the device is operating in water, which leads the device to electrical failure. To address this issue, a device with reduced resonant frequencies—246 Hz and 152 Hz in air and water—is characterized, through which the bubbles can be effectively prohibited. This MEMS mirror could potentially be used in ultrasound and photoacoustic microscopy applications. Full article
(This article belongs to the Special Issue Advances in Optical MEMS and Laser Technologies)
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