MEMS Nano/Micro Fabrication, 2nd Edition
A special issue of Micromachines (ISSN 2072-666X).
Deadline for manuscript submissions: 31 March 2025 | Viewed by 686
Special Issue Editor
Interests: nano/microfabrication; two-phase heat transfer; bubble visualization; nuclear engineering; thermal hydraulics
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
In order to use nano/microstructures in industrial applications, nano/microfabrication has been extensively studied over the past decade. Microscale structures are mainly manufactured using photolithography-based microelectromechanical systems (MEMSs). In contrast, nanoscale structures are fabricated using two different approaches: top-down methods (wet/dry etching, etc.) and bottom-up methods (vapor–liquid–solid (VLS), template-assisted electrodeposition, etc.). Nano/microstructures are produced using these methods for various engineering applications. For example, they can be used for drag reduction, anti-biofouling, anti-corrosion, anti-fogging, anti-frosting, and anti-icing through the control of the hydrophilicity of the surface in material engineering. Some of their other applications include high-performance sensors in electronic engineering (e.g., gas sensors and biosensors), owing to their large surface area and high sensitivity. Similarly, in mechanical engineering, they can be adopted for device cooling applications (e.g., for enhanced cooling surfaces in computer chips, data centers, and nuclear fuel core cooling) due to their large surface area. This Special Issue will cover topics ranging from nano/microfabrication methods to their engineering applications and seeks to showcase research papers, communications, and review articles that focus on (1) novel nano/microfabrication methods and (2) new developments applying nano/microstructures in various engineering fields (e.g., mechanics, materials, and electronics).
We look forward to receiving your submissions.
Dr. Donghwi Lee
Guest Editor
Manuscript Submission Information
Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.
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Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.
Keywords
- nano/microfabrication
- microelectromechanical systems (MEMS)
- sensor and actuator
- surface wettability
- single-phase heat transfer
- two-phase heat transfer
- device cooling
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Related Special Issue
- MEMS Nano/Microfabrication in Micromachines (7 articles)
