Advanced Micro-Nano Optical Sensors Based on MOEMS Technologies
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".
Deadline for manuscript submissions: 30 September 2026 | Viewed by 1753
Special Issue Editors
Interests: nanophotonics; optical sensing; MOEMS sensors
Interests: optoelectronic information physics; test and measurement technology and instruments; optoelectronic technology and instruments; optical engineering
Special Issue Information
Dear Colleagues,
The recent interest in developing micro-opto-electro-mechanical systems (MOEMS) has drawn great research attention to miniaturized optical sensors, which have been widely used in fields ranging from consumer electronics and aerospace to optical communications. Advances in these fields in recent years are now yielding advanced micro-nano optical sensors with higher performance (e.g., lower power consumption, higher sensitivity, higher integration associated with both the integrated electrical circuits and the photonic circuits). This Special Issue, entitled “Advanced Micro-Nano Optical Sensors and MOEMS Technologies”, aims to provide an overview of the progress achieved in recent years. The Special Issue will explore not only advances in technological pathways but will also include system-level solutions (e.g., design, fabrication, integration and applications) for advanced micro-nano optical sensors based on MOEMS technologies.
In this Special Issue, original research articles and reviews are welcomed. Research areas may include (but are not limited to) the following:
- Displacement sensors;
- Accelerometers;
- Gyroscopes;
- Pressure sensors;
- Spectrometers;
- Biosensors;
- Gas sensors.
Additionally, studies on relative MOEMS techniques that involve the fabrication and application of these advanced micro-nano optical sensors are also welcome.
Dr. Chenguang Xin
Prof. Dr. Zhibin Wang
Prof. Dr. Mengwei Li
Guest Editors
Manuscript Submission Information
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Keywords
- displacement sensors
- accelerometers
- gyroscopes
- pressure sensors
- spectrometers
- biosensors
- gas sensors
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