MEMS Accelerometers: Design, Applications and Characterization, 2nd Edition

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".

Deadline for manuscript submissions: closed (31 August 2024) | Viewed by 10427

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Guest Editor
INRiM—Applied Metrology and Engineering Division, National Institute of Metrological Research, Str. delle Cacce 91, 10135 Turin, Italy
Interests: MEMS accelerometers; design; vibration; calibration; characterization; metrology; sensor networks
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Special Issue Information

Dear Colleagues,

In the last decade, the advent of MEMS technology has led to the possibility of using these types of low-cost and low-power-consuming sensors in many fields of engineering and measurement science. In the particular case of vibration and dynamic motion control, MEMS accelerometers have opened the way to an unprecedented number of applications in many industrial processes, such as smart manufacturing, Industry 4.0, and the IoT, as well as in many other currently widespread applications, such as environmental, seismic, and infrastructure surveys, navigation and positioning systems, remote surgery and diagnoses, health feedback surveys, and environmental/natural hazards. MEMS accelerometers can also be designed with ad hoc characteristics, depending on the application, and allow the study of large-scale physical phenomena through their aggregation in sensor networks. Overall, data quality is of paramount importance in all of these applications. Thus, data characterization and calibration is also fundamental to obtain reliable and, in some cases, traceable measurements.

This Special Issue aims to bring together contributions that can highlight the potential of analogue and digital MEMS accelerometers in measuring science and in improving measurement reliability in applied sciences and engineering.

This invitation for contributions is addressed to manuscripts in the form of research articles, review articles, and case study investigations that combine theoretical research and experimental applications related to the design, modeling, fabrication, calibration, characterization, and use of MEMS accelerometers. Moreover, submissions on real-life applications and simulations of MEMS accelerometer-based sensor networks in different environments are also welcome.

Dr. Andrea Prato
Guest Editor

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Keywords

  • MEMS accelerometers
  • vibration measurements
  • sensor networks
  • design of MEMS accelerometers
  • MEMS accelerometer calibration and characterization
  • MEMS accelerometer-based applications and case studies

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Published Papers (2 papers)

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Research

7 pages, 633 KiB  
Communication
Improved Analysis for Intrinsic Properties of Triaxial Accelerometers to Reduce Calibration Uncertainty
by Jon Geist, Hany Metry, Aldo Adrian Garcia Gonzalez, Arturo Ruiz Rueda, Giancarlo Barbosa Micheli, Ronaldo da Silva Dias and Michael Gaitan
Micromachines 2024, 15(12), 1494; https://doi.org/10.3390/mi15121494 - 14 Dec 2024
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Abstract
We describe a modification of a previously described measurement–analysis protocol to determine the intrinsic properties of triaxial accelerometers by using a measurement protocol based on angular stepwise rotation in the Earth’s gravitational field. This study was conducted with MEMS triaxial accelerometers that were [...] Read more.
We describe a modification of a previously described measurement–analysis protocol to determine the intrinsic properties of triaxial accelerometers by using a measurement protocol based on angular stepwise rotation in the Earth’s gravitational field. This study was conducted with MEMS triaxial accelerometers that were co-integrated in four consumer-grade wireless microsensors. The measurements were carried out on low-cost rotation tables in different laboratories in different countries to simulate the reproducibility environment encountered in inter-comparisons of calibration capabilities. We used a previously described calibration–uncertainty metric to independently characterize the overall uncertainty of the calibration and analysis process. The intrinsic property analysis suggested, and the uncertainty metric confirmed, an unacceptably large error in one combination of microsystem and low-cost rotation table. A simple modification of the analysis protocol provided a substantial improvement in the reproducibility of the protocol with all combinations of microsystem and rotation table. Later, measurements with a high-performance triaxial accelerometer using a significantly more expensive rotation table carried out at one location further validated the usefulness of this modification. The results reported here also demonstrate the existence of unidentified defects in one microsystem and one low-cost rotation table that interact with each other in ways not currently understood to produce anomalously large errors with the old protocol but not with the new protocol. Full article
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17 pages, 5535 KiB  
Article
Responsiveness and Precision of Digital IMUs under Linear and Curvilinear Motion Conditions for Local Navigation and Positioning in Advanced Smart Mobility
by Luciano Chiominto, Emanuela Natale, Giulio D’Emilia, Sante Alessandro Grieco, Andrea Prato, Alessio Facello and Alessandro Schiavi
Micromachines 2024, 15(6), 727; https://doi.org/10.3390/mi15060727 - 30 May 2024
Cited by 2 | Viewed by 3383
Abstract
Sensors based on MEMS technology, in particular Inertial Measurement Units (IMUs), when installed on vehicles, provide a real-time full estimation of vehicles’ state vector (e.g., position, velocity, yaw angle, angular rate, acceleration), which is required for the planning and control of cars’ trajectories, [...] Read more.
Sensors based on MEMS technology, in particular Inertial Measurement Units (IMUs), when installed on vehicles, provide a real-time full estimation of vehicles’ state vector (e.g., position, velocity, yaw angle, angular rate, acceleration), which is required for the planning and control of cars’ trajectories, as well as managing the in-car local navigation and positioning tasks. Moreover, data provided by the IMUs, integrated with the data of multiple inputs from other sensing systems (such as Lidar, cameras, and GPS) within the vehicle, and with the surrounding information exchanged in real time (vehicle to vehicle, vehicle to infrastructure, or vehicle to other entities), can be exploited to actualize the full implementation of “smart mobility” on a large scale. On the other hand, “smart mobility” (which is expected to improve road safety, reduce traffic congestion and environmental burden, and enhance the sustainability of mobility as a whole), to be safe and functional on a large scale, should be supported by highly accurate and trustworthy technologies based on precise and reliable sensors and systems. It is known that the accuracy and precision of data supplied by appropriately in-lab-calibrated IMUs (with respect to the primary or secondary standard in order to provide traceability to the International System of Units) allow guaranteeing high quality, reliable information managed by processing systems, since they are reproducible, repeatable, and traceable. In this work, the effective responsiveness and the related precision of digital IMUs, under sinusoidal linear and curvilinear motion conditions at 5 Hz, 10 Hz, and 20 Hz, are investigated on the basis of metrological approaches in laboratory standard conditions only. As a first step, in-lab calibrations allow one to reduce the variables of uncontrolled boundary conditions (e.g., occurring in vehicles in on-site tests) in order to identify the IMUs’ sensitivity in a stable and reproducible environment. For this purpose, a new calibration system, based on an oscillating rotating table was developed to reproduce the dynamic conditions of use in the field, and the results are compared with calibration data obtained on linear calibration benches. Full article
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