Micropumps: Design, Fabrication and Applications

Dear Colleagues,

Within MEMS research, the micropump is regarded as a "long runner". Research concerning micropumps started in the mid-1970s. Since then, micropumps have always been the focus of development, with respect to their principal functions, designs and fabrications, and applications.

Consequently, we find a multitude of both mechanical and non-mechanical micropumps today. The first - and earliest - class mostly uses the principle of valve-based membrane pumps, which have different actuation concepts, valve types, and pumping concepts. In contrast, non-mechanical micropumps use a variety of direct actuation mechanisms (e.g., electrohydrodynamic, magnetohydrodynamic or electrophoretic principles). The design and fabrication of micropumps has gone through a spectrum of technologies and materials. The spectrum of fabrication materials and associated fabrication processes is extremely broad and includes silicon, glass, polymers, and metals. Similarly, the potential applications of micropumps have multiplied; applications range from systems for precision drug delivery and chemical analysis to high-power throughput devices.

This Special Issue assumes the challenge of giving an actual overview concerning the aforementioned huge diversity of principles, technologies, and applications. With the long history of micropump research in mind, we welcome contributions that describe the actual research and development regarding micropumps or micropump sub-components, which have distinctive features compared to the state-of-the-art. Novel and innovative fabrication processes and technologies should not be presented as stand-alone concepts but in conjunction with an actual micropump design. Applications of micropumps that demonstrate the advantages of miniaturization or the benefits of specific micro- and nanotechnologies and micropump designs (for a particular application scenario) are welcome. In summation, we expect a highly focused Special Issue that confirms the importance of micropump research for MEMS design, microfabrication, and application.

Prof. Dr. Peter Woias
Guest Editor

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