Resonant Microsensors
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".
Deadline for manuscript submissions: closed (1 September 2020) | Viewed by 2885
Special Issue Editor
Special Issue Information
Dear Colleagues,
The measurement of minute changes in mass or properties of gases and liquids is best approached by making use of electromechanical resonances. The classical example is the piezoelectric quartz microbalance to weigh thin films. Applications in liquids range from condition monitoring for engine oils to highly specific biosensors. With the rise of MEMS technology, the principle of resonant sensors was realized in a wide variety of devices, such as microcantilevers or miniaturized tuning fork resonators. In addition to piezoelectricity, actuation and readout is realized using capacitive, electrodynamic, electro- and magnetostrictive, thermal, and optical transduction mechanisms. The interaction with a surrounding fluid often requires concise analysis of pressure and shear-wave acoustics. Nonlinear effects are regularly observed at higher vibration amplitudes due to deviations from Hooke’s law for spring structures or fluid streaming effects. While the field of applications continuously expands, modeling using analytical and numerical models becomes increasingly important.
The Special Issue on Resonant Microsensors addresses recent advances in the field focusing on fabrication, analysis, and application. A topical workshop will be organized in May 2020 at JKU Linz, Austria. You are welcome to preregister by email to [email protected] to stay informed about the upcoming activities. Participants are invited to submit a contribution to the MDPI Micromachines Special Issue on Resonant Microsensors by September 1st, 2020.
Dr. Erwin K. Reichel
Guest Editor
Manuscript Submission Information
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Keywords
- resonant sensors
- microcantilever
- QCM
- acoustic fluid interaction
- electromechanical transduction
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