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Photonics
Special Issues
Micro-Nano Optics and High-End Measurement Instruments
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Micro-Nano Optics and High-End Measurement Instruments

A special issue of Photonics (ISSN 2304-6732).

Deadline for manuscript submissions: closed (30 September 2022) | Viewed by 15531

Special Issue Editors

Prof. Dr. Zhengang Lu

E-Mail Website
Guest Editor
School of Instrumentation Science and Engineering, Harbin Institute of Technology, Harbin 150080, China
Interests: diffraction optics; optical measurement; laser interferometer; transparent conductive films; metasurfaces; graphene; physical optics; EMI shielding of optical materials
Special Issues, Collections and Topics in MDPI journals
Prof. Dr. Pengcheng Hu

E-Mail Website
Guest Editor
School of Instrumentation Science and Engineering, Harbin Institute of Technology, Harbin 150080, China
Interests: laser interferometry; ultra-precision laser measurement; optoelectronic instruments
Special Issues, Collections and Topics in MDPI journals
Prof. Dr. Shuming Yang

E-Mail Website
Guest Editor
School of Mechanical Engineering, Xi'an Jiaotong University, Xi’an, China
Interests: micro-nano mechanical electronic systems (MEMS/NEMS) and measurement; micro-nano electronic devices and integrated systems; optical testing technology and instruments; micro-nano mechanical electronic systems (MEMS/NEMS) and processing; ultra-precision machining and testing technology; intelligent photoelectric detection technology
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

As one of the hotspots in the field of photonics, micro–nano-optics has attracted increasing attention.

Micro–nano optics generally refers to the introduction of micro- and nano-optical structures into related materials to create new optical functional devices. The structure design and fabrication is a key issue in the development of micro–nano-optics. Its main advantage is that it can realize many new functions on the basis of local electromagnetic interaction of micro- and nano-optical structures. Micro–nano-optics is an important development direction of the new optoelectronic industry. It has played a significant role in many fields, such as optical communication, optical interconnection, optical storage, semiconductor devices, and so on.

The idea of micro–nano-optics is also used in other electromagnetic bands. Many structured components have also been developed in terahertz and microwave bands, and many micro–nano devices can realize different functions in multiple electromagnetic bands. Metamaterials, metasurfaces, and nano-photonic devices are typical representatives in this field.

The manufacturing and characterization of micro–nano-optical devices need the support of high-end measuring instruments. The development of micro–nano-optical devices also provides key components for high-end measuring instruments. Micro–nano-optics and high-end measuring instruments are deeply integrated.

This Special Issue aims to present original state-of-the-art research articles focused on the design, manufacture, and application of micro–nano-optical devices, as well as the development and application of high-end measurement instruments related to micro–nano manufacturing. Researchers are invited to submit their contributions to this Special Issue. Topics include but are not limited to:

  • Nanotechnology and nanostructures in optics
  • Metamaterials in optics or microwave
  • Nanophotonics
  • Micro- and nano-measurement technology
  • Laser measurement technology and instruments
  • Modern optical technology and instruments for precision and ultraprecision measurement
  • 3D nanostructure measurement

Prof. Dr. Zhengang Lu
Prof. Dr. Pengcheng Hu
Prof. Dr. Shuming Yang
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Photonics is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2400 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • nanotechnology and nanostructures in optics
  • metamaterials in optics or microwave
  • micro- and nano-measurement technology
  • laser measurement
  • ultraprecision measurement
  • 3D nanostructure measurement

Published Papers (8 papers)

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Research

14 pages, 8342 KiB  
Article
Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements
by Di Chang, Ziqi Yin, Yunke Sun, Pengcheng Hu, Jiubin Tan and Zhigang Fan
Photonics 2022, 9(11), 830; https://doi.org/10.3390/photonics9110830 - 5 Nov 2022
Cited by 2 | Viewed by 1689
Abstract
Grating interferometers that measure in-plane and out-of-plane displacements are not only effective two-degree-of-freedom (DOF) sensors, but are also basic units of six-DOF measurement systems. Besides resolution and accuracy, periodic nonlinear errors, misalignment tolerance, and size of reading heads are more crucial than ever. [...] Read more.
Grating interferometers that measure in-plane and out-of-plane displacements are not only effective two-degree-of-freedom (DOF) sensors, but are also basic units of six-DOF measurement systems. Besides resolution and accuracy, periodic nonlinear errors, misalignment tolerance, and size of reading heads are more crucial than ever. In this work, a spatially separated heterodyne grating interferometer that measures in- and out-of-plane displacements is proposed. A prototype with 3 mm diameter beams with a size of 69 mm × 51 mm × 41 mm was built and tested. The experiment results show that the 30 s stability is 2.5 nm; the periodic nonlinear errors of the two measuring directions are less than the resolutions (0.25 nm for in-plane motions and 0.15 nm for out-of-plane motions). Double-diffracted configuration ensures that the misalignment tolerances are three axes larger than ±2 mrad. Full article
(This article belongs to the Special Issue Micro-Nano Optics and High-End Measurement Instruments)
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9 pages, 3590 KiB  
Communication
Surface Depth-Mapping of Material via the Transport-of-Intensity Equation
by Nikita Stsepuro, Michael Kovalev, George Krasin, Ivan Podlesnykh, Yulia Gulina and Sergey Kudryashov
Photonics 2022, 9(11), 815; https://doi.org/10.3390/photonics9110815 - 28 Oct 2022
Cited by 2 | Viewed by 1427
Abstract
We present a new approach for a surface characterization based on the TIE method combined with the SEM. Experimental verification is carried out on the example of characterization of a crater on the surface of monocrystalline silicon (111). The approach is universal and [...] Read more.
We present a new approach for a surface characterization based on the TIE method combined with the SEM. Experimental verification is carried out on the example of characterization of a crater on the surface of monocrystalline silicon (111). The approach is universal and can be used for any opaque object. It improves the robustness and stability of the quantitative phase retrieval process and has two important features. Firstly, it allows one to quantitatively retrieve the phase in a region of arbitrarily chosen dimensions. Secondly, phase retrieval process does not require the choice of boundary conditions. Full article
(This article belongs to the Special Issue Micro-Nano Optics and High-End Measurement Instruments)
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11 pages, 4997 KiB  
Article
Sensing Performance of Triple-Band Terahertz Metamaterial Absorber Based on Snowflake-Shaped Resonators
by Limin Ma, Yuhuang Liu, Yongkai Zhu and Wenhua Gu
Photonics 2022, 9(10), 777; https://doi.org/10.3390/photonics9100777 - 19 Oct 2022
Cited by 5 | Viewed by 1854
Abstract
Terahertz metamaterial absorbers are important functional devices for liquid analyte detection. In contrast to general metamaterial absorbers with single-layer metasurfaces that possess only one resonant mode, a triple-band terahertz metamaterial absorber formed by a single layer of symmetrically arrayed snowflake-shaped resonators was proposed [...] Read more.
Terahertz metamaterial absorbers are important functional devices for liquid analyte detection. In contrast to general metamaterial absorbers with single-layer metasurfaces that possess only one resonant mode, a triple-band terahertz metamaterial absorber formed by a single layer of symmetrically arrayed snowflake-shaped resonators was proposed in this study. The simulation results showed that the absorption of the metamaterial absorber reached 97.43% at 0.550 THz, 79.22% at 1.249 THz, and 99.02% at 1.867 THz with narrow resonant peaks. The resonant frequencies were sensitive to the refractive index of the surrounding medium at a fixed analyte thickness, which would play an important role in the performance of the sensor for detecting changes in the surrounding refractive index. The maximum value of the refractive index sensitivity was 137.70 GHz/RIU, 306.25 GHz/RIU, and 473.86 GHz/RIU, with a figure of merit (FoM) of 3.14, 2.33, and 6.46, respectively, for refractive index values ranging from 1.0 to 2.2 under three resonant modes. It is worth noting that most of the liquid samples showed a refractive index ranging from 1.0 to 2.0. Furthermore, the identification of peanut oil, carbon disulfide, and turpentine was considered to verify that the proposed terahertz sensor could be used for high-sensitivity liquid detection and has broad development prospects in the field of detecting and sensing. Full article
(This article belongs to the Special Issue Micro-Nano Optics and High-End Measurement Instruments)
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12 pages, 5130 KiB  
Article
Acquisition and Assessment of Gear Holistic Deviations Based on Laser Measurement
by Zhaoyao Shi, Yanqiang Sun, Xiaoyi Wang, Baoya Zhao and Huixu Song
Photonics 2022, 9(10), 735; https://doi.org/10.3390/photonics9100735 - 8 Oct 2022
Cited by 4 | Viewed by 1659
Abstract
Line laser measurement technology is effective for obtaining the 3D point clouds of complex surfaces. Thus, a 3D gear measurement model is established in this study. All the point clouds of gear surfaces are rapidly obtained using a line laser sensor, and the [...] Read more.
Line laser measurement technology is effective for obtaining the 3D point clouds of complex surfaces. Thus, a 3D gear measurement model is established in this study. All the point clouds of gear surfaces are rapidly obtained using a line laser sensor, and the holistic deviations of gear surfaces are acquired by calculating the normal errors of the gear surface. These informative and complete data include traditional gear error items and considerable valuable information that is not deconstructed. To exploit the acquired gear holistic deviations, the structured 3D model is constructed to express tooth surface errors. In this model, the control method of the statistical process is used to define highly representative assessment indicators, and a new gear accuracy assessment system is developed by selecting reasonable indicators. The measurement practice shows that this method exploits the complete information of the gear surface, including all the current accuracy assessment indicators, which can be used to expand the new assessment indicators. This method can be used to characterize the 3D topological tooth surface completely and comprehensively and realize the deep mining and extended applications of the 3D full information of gear surfaces. Full article
(This article belongs to the Special Issue Micro-Nano Optics and High-End Measurement Instruments)
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11 pages, 4845 KiB  
Article
SHG in Micron-Scale Layers of Glasses: Electron Beam Irradiation vs. Thermal Poling
by Ilya Reshetov, Vladimir Kaasik, Gennadiy Kan, Sergey Shestakov, Sergey Scherbak, Valentina Zhurikhina and Andrey Lipovskii
Photonics 2022, 9(10), 733; https://doi.org/10.3390/photonics9100733 - 7 Oct 2022
Cited by 4 | Viewed by 1453
Abstract
In this work, we studied the introduction of second-order optical nonlinearity (SON) into subsurface layer soda-lime and alkali-free flint glasses using two different techniques: electron beam irradiation and thermal poling in an open anode configuration. The experiments showed that thermally poled soda-lime glass [...] Read more.
In this work, we studied the introduction of second-order optical nonlinearity (SON) into subsurface layer soda-lime and alkali-free flint glasses using two different techniques: electron beam irradiation and thermal poling in an open anode configuration. The experiments showed that thermally poled soda-lime glass and e-beam poled flint glass demonstrated noticeable second-harmonic generation (SHG) with their second-harmonic (SH) signals being close in magnitude. The performed estimates showed that the coincidence in the SH signal intensity in these two glasses cannot be explained in the frames of the model that relates the second-order nonlinear susceptibility with the third-order susceptibility and the “frozen” electric field in glasses (EFISH model). This supposes another mechanism of SON in thermally poled soda-lime glass. We believe that this mechanism is the dipole orientation of entities injected into the soda-lime glass during thermal poling in an open anode configuration. Full article
(This article belongs to the Special Issue Micro-Nano Optics and High-End Measurement Instruments)
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12 pages, 3117 KiB  
Article
Equivalent Measurement and Real-Time Compensation of Error Caused by Intensity Change in Deep Sub-Nanometer Displacement Measuring Interferometry
by Jianing Wang, Yunke Sun, Xu Xing, Pengcheng Hu, Di Chang and Jiubin Tan
Photonics 2022, 9(10), 714; https://doi.org/10.3390/photonics9100714 - 30 Sep 2022
Cited by 1 | Viewed by 1334
Abstract
Heterodyne interferometry is playing an increasingly important role in the field of high-end equipment manufacturing. In photolithography, the precision requirement of displacement metrology is increasing to a deep sub-nanometer scale with the decrease in the critical dimension of chips. The error caused by [...] Read more.
Heterodyne interferometry is playing an increasingly important role in the field of high-end equipment manufacturing. In photolithography, the precision requirement of displacement metrology is increasing to a deep sub-nanometer scale with the decrease in the critical dimension of chips. The error caused by light intensity changes was investigated, and its principle was found to be related to the time difference in photoelectric conversion. On the basis of the analysis of dynamic characteristics of interference light intensity changes in a heterodyne Michaelson interferometer, the influencing factors, and the features of the measurement error, equivalent measurement and real-time compensation methods were investigated and proposed. Experiments revealed that the error was 220 pm using the method of best-gain detection, while it was 4.8 nm using the method of auto-gain detection over a wide dynamic range when the light intensity was reduced by 30%. However, the proposed compensation method successfully reduced the error to less than 40 pm. Therefore, the real-time compensation method based on equivalent measurement can maintain the signal-to-noise ratio while improving the precision of photoelectric conversion, removing the error caused by intensity changes, and helping heterodyne interferometry achieve deep sub-nanometer precision. Full article
(This article belongs to the Special Issue Micro-Nano Optics and High-End Measurement Instruments)
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15 pages, 3031 KiB  
Article
FDTD-Based Study on Equivalent Medium Approximation Model of Surface Roughness for Thin Films Characterization Using Spectroscopic Ellipsometry
by Wanpei Yu, Changcai Cui, Huihui Li, Subiao Bian and Xi Chen
Photonics 2022, 9(9), 621; https://doi.org/10.3390/photonics9090621 - 30 Aug 2022
Cited by 4 | Viewed by 2169
Abstract
Spectroscopic ellipsometry (SE) is an effective method to measure the optical constants of thin film materials which is very sensitive to the surface topography of thin films. When performing ellipsometric measurements of the optical constants of solid materials with rough surfaces, the equivalent [...] Read more.
Spectroscopic ellipsometry (SE) is an effective method to measure the optical constants of thin film materials which is very sensitive to the surface topography of thin films. When performing ellipsometric measurements of the optical constants of solid materials with rough surfaces, the equivalent medium approximation (EMA) model is often used to characterize the surface topography. The EMA model is determined by two parameters of equivalent thickness dEMA and the void volume fraction f. In most applications, the void volume fraction parameter f is always set to an empirical 50% without any instructions, and then the thickness parameter dEMA is determined by fitting. In order to improve the accuracy of the fitting results, it is necessary to validate the construction law of the EMA model in the ellipsometry analysis considering characteristic parameters of the actual surface topography. In this paper, the influence of the surface topographical parameters on EMA model is analyzed. The method of FDTD (finite difference time domain) is employed to simulate the SiO2 films with different topographical parameters and EMA model are carried out on these samples. The analysis results show that the EMA model constructed with dEMA = σ + 0.80 h (σ: the root mean square height, h: the average height) can better fit the SE parameters. The proposed method can facilitate a better understanding and utilization of the EMA model in SE application. Full article
(This article belongs to the Special Issue Micro-Nano Optics and High-End Measurement Instruments)
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9 pages, 2762 KiB  
Article
Optimization of VGG16 Algorithm Pattern Recognition for Signals of Michelson–Sagnac Interference Vibration Sensing System
by Jing Cheng, Qiuheng Song, Hekuo Peng, Jingwei Huang, Hongyan Wu and Bo Jia
Photonics 2022, 9(8), 535; https://doi.org/10.3390/photonics9080535 - 30 Jul 2022
Cited by 8 | Viewed by 2305
Abstract
Signal recognition accuracy and recognition time are the two most important parameters of pattern recognition in a fiber optic vibration sensing system. To obtain high recognition accuracy and short recognition time, this paper optimized the VGG16 algorithm and carried out VGG16-1D and VGG16-2D [...] Read more.
Signal recognition accuracy and recognition time are the two most important parameters of pattern recognition in a fiber optic vibration sensing system. To obtain high recognition accuracy and short recognition time, this paper optimized the VGG16 algorithm and carried out VGG16-1D and VGG16-2D recognition on big data signals generated by a Michelson–Sagnac interferometric vibration sensor system. The results indicate that VGG16-1D has a higher accuracy of 98.44% and a shorter recognition time of 0.03 s. The proposed method is a more accurate and faster pattern recognition method for big data signals from optical fiber vibration sensing systems, which is helpful in promoting further applications of optical fiber sensing systems. Full article
(This article belongs to the Special Issue Micro-Nano Optics and High-End Measurement Instruments)
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