High-Performance MEMS Sensors
A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Electronic Sensors".
Deadline for manuscript submissions: closed (30 March 2023) | Viewed by 2073
Special Issue Editor
Special Issue Information
Dear Colleagues,
The importance of MEMS technology is continuously increasing as they become more widespread in a broad variety of applications ranging from low-power devices for IoT and battery-powered applications to high-end devices for precise navigation and positioning, Industry 4.0, enhanced virtual reality components and smartphones.
MEMS technology is receiving substantial industrial attention. The concept of integrating sensors, actuators, electrical (and electronic) and mechanical devices into a single chip is considered as a basis for breakthrough technologies.
The aim of the Special Issue is to introduce the state-of-the-art technologies in the field of sensors, mechatronics, MEMS devices and microsystems in order to further summarize and improve on the methodologies concerning microsystems and MEMS devices. Topics of interest include but are not limited to the following:
- MEMS and energy harvesters
- MEMS low-power sensing techniques, circuits, and devices
- Accelerometers
- MEMS gyroscopes
- Advanced packaging
- Sensor characterization techniques
- Sensor error modeling and online calibration
Prof. Dr. Lufeng Che
Guest Editor
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