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Keywords = AlGaAs

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21 pages, 1435 KB  
Article
Electromagnetically Induced Transparency in a GaAs Coupled Quantum Dot-Ring
by R. V. H. Hahn, A. S. Giraldo-Neira, J. A. Vinasco, J. A. Gil-Corrales, A. L. Morales and C. A. Duque
Nanomaterials 2025, 15(18), 1455; https://doi.org/10.3390/nano15181455 - 22 Sep 2025
Viewed by 300
Abstract
In this work, the ground and low-lying excited states in a GaAs coupled quantum dot-ring embedded in an AlGaAs cylindrical matrix are computed under the assumption of a finite confinement potential and an axisymmetric model by means of the finite element method and [...] Read more.
In this work, the ground and low-lying excited states in a GaAs coupled quantum dot-ring embedded in an AlGaAs cylindrical matrix are computed under the assumption of a finite confinement potential and an axisymmetric model by means of the finite element method and the effective mass approximation. The electron energy levels are studied as functions of the intensity of externally applied electric and magnetic fields. Electromagnetically induced transparency in the ladder configuration and linear optical absorption coefficient are calculated thereupon. Our results suggest that magnetic fields are more suitable than electric fields for controlling the optical properties of this nanostructure. Also, we found that the system’s response, however, exhibits a striking asymmetry: while the electromagnetically induced transparency is unexpectedly quenched under positive electric fields due to vanishing dipole transition matrix elements, this limitation is completely overcome by a magnetic field. Its application not only restores optical transparency across the full range of electric field values but also drives substantially larger energy level shifts and clear Aharonov–Bohm oscillations, making it a far more robust tool for controlling the optical properties of confined electrons in dot-ring coupled heterostructures. Full article
(This article belongs to the Section Nanoelectronics, Nanosensors and Devices)
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10 pages, 875 KB  
Article
Optimising (Al,Ga) (As,Bi) Quantum Well Laser Structures for Reflectance Mode Pulse Oximetry
by Aivaras Špokas, Andrea Zelioli, Andrius Bičiūnas, Bronislovas Čechavičius, Justinas Glemža, Sandra Pralgauskaitė, Mindaugas Kamarauskas, Virginijus Bukauskas, Janis Spigulis, Yi-Jen Chiu, Jonas Matukas and Renata Butkutė
Micromachines 2025, 16(5), 506; https://doi.org/10.3390/mi16050506 - 26 Apr 2025
Viewed by 678
Abstract
We explore quantum well laser diodes for applications in pulse oximetry based on two material systems, namely, classical AlGaAs and a rather exotic GaAsBi, with lasing at around 800 nm and 1100 nm, respectively. These spectral regions and material families were selected due [...] Read more.
We explore quantum well laser diodes for applications in pulse oximetry based on two material systems, namely, classical AlGaAs and a rather exotic GaAsBi, with lasing at around 800 nm and 1100 nm, respectively. These spectral regions and material families were selected due to their closely matched effective penetration depths into soft tissue. An improved design of the band structure of device active areas was tested on both material systems, yielding enhancement of the two main parameters, namely, output power and threshold current. A maximum emission power of the AlGaAs laser diode was registered at 4.9 mW (I = 60 mA, λ = 801 nm). For the GaAsBi-based devices, the target emission of 1106 nm was measured in pulsed mode with a peak output power of 9.4 mW (I = 3 A). The most optimized structure was based on three GaAsBi quantum wells surrounded by parabolically graded AlGaAs barriers. This structure was capable of 130 mW peak power (I = 2 A, λ = 1025 nm) along with a more than tenfold decrease in threshold current to 250 mA compared to a classical rectangular quantum well active region. Full article
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19 pages, 1403 KB  
Review
Nonlinear Dielectric Metasurfaces for Terahertz Applications
by Forouzan Habibighahfarokhi, Olga Sergaeva, Luca Carletti, Paolo Franceschini, Andrea Tognazzi, Andrea Locatelli, Unai Arregui Leon, Giuseppe Della Valle, Costantino De Angelis and Davide Rocco
Photonics 2025, 12(4), 370; https://doi.org/10.3390/photonics12040370 - 12 Apr 2025
Cited by 1 | Viewed by 1513
Abstract
The terahertz (THz) region of the electromagnetic spectrum, spanning from 0.1 to 30 THz, represents a prospering area in photonics, with transformative applications in imaging, communications, and material analysis. However, the development of efficient and compact THz sources has long been hampered by [...] Read more.
The terahertz (THz) region of the electromagnetic spectrum, spanning from 0.1 to 30 THz, represents a prospering area in photonics, with transformative applications in imaging, communications, and material analysis. However, the development of efficient and compact THz sources has long been hampered by intrinsic material limitations, inefficient conversion processes, and complex phase-matching requirements. Recent breakthroughs in nonlinear optical mechanisms, resonant metasurface engineering, and advances in the fabrication processes for materials such as lithium niobate (LN) and aluminum gallium arsenide (AlGaAs) have paved the way for innovative THz generation techniques. This review article explores the latest theoretical advances, together with key experimental results and outlines perspectives for future developments. Full article
(This article belongs to the Special Issue Photonics Metamaterials: Processing and Applications)
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21 pages, 7139 KB  
Article
Investigation of Short Channel Effects in Al0.30Ga0.60As Channel-Based Junctionless Cylindrical Gate-All-Around FET for Low Power Applications
by Pooja Srivastava, Aditi Upadhyaya, Shekhar Yadav, Chandra Mohan Singh Negi and Arvind Kumar Singh
J. Low Power Electron. Appl. 2025, 15(1), 12; https://doi.org/10.3390/jlpea15010012 - 21 Feb 2025
Cited by 1 | Viewed by 861
Abstract
In this work, a cylindrical gate-all-around junctionless field effect transistor (JLFET) was investigated. Junctions and doping concentration gradients are unavailable in JLFET. According to the results, the suggested device has a novel architecture that significantly enhances transistor performance while exhibiting a decreased vulnerability [...] Read more.
In this work, a cylindrical gate-all-around junctionless field effect transistor (JLFET) was investigated. Junctions and doping concentration gradients are unavailable in JLFET. According to the results, the suggested device has a novel architecture that significantly enhances transistor performance while exhibiting a decreased vulnerability to short-channel effects (SCEs). The Atlas 3D device simulator has been used to analyze the proposed JLFET’s performance, especially for low-power applications for different channel lengths ranging from 10 nm to 60 nm with Al0.30Ga0.60As as III-V materials. The comparative simulated study has been based on various performance parameters, including subthreshold slope (SS), drain-induced barrier lowering (DIBL), transconductance, threshold voltage, and ION to IOFF ratio. The results of the simulations demonstrated that the III-V JLFET exhibited a favorable SS and decreased DIBL compared to other circuit topologies. In the suggested study, gallium arsenide (GaAs) and its compound materials have demonstrated a strong correlation between the SS and DIBL values. The SS is approximately 63 mV/dec, extremely near the ideal 60 mV/dec value. Gallium arsenide (GaAs) and aluminum gallium arsenide (AlGaAs) exhibit DIBL of approximately 30 mV/V and an SS value of around 64 mV/dec. Full article
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12 pages, 3710 KB  
Article
Design and Performance of an InAs Quantum Dot Scintillator with Integrated Photodetector
by Tushar Mahajan, Allan Minns, Vadim Tokranov, Michael Yakimov, Michael Hedges, Pavel Murat and Serge Oktyabrsky
Sensors 2024, 24(22), 7178; https://doi.org/10.3390/s24227178 - 8 Nov 2024
Viewed by 1520
Abstract
A new scintillation material composed of InAs quantum dots (QDs) hosted within a GaAs matrix was developed, and its performance with different types of radiation is evaluated. A methodology for designing an integrated photodetector (PD) with a low defect density and that is [...] Read more.
A new scintillation material composed of InAs quantum dots (QDs) hosted within a GaAs matrix was developed, and its performance with different types of radiation is evaluated. A methodology for designing an integrated photodetector (PD) with a low defect density and that is optically matched to the QD’s emission spectrum is introduced, utilizing an engineered epitaxial InAlGaAs metamorphic buffer layer. The photoluminescence (PL) collection efficiency of the integrated PD is examined using two-dimensional scanning laser excitation. The detector response to 5.5 MeV α-particles and 122 keV photons is presented. Yields of 13 electrons/keV for α-particles and 30–60 electrons/keV for photons were observed. The energy resolution of 12% observed with α-particles was mainly limited by noise- and geometry-related optical losses. The radiation hardness of an InAs QDs hosted within GaAs and a wider band gap AlGaAs ternary alloy was studied under a 1 MeV proton implantation up to a 1014 cm−2 dose. The integrated PL responses were compared to evaluate PL quenching due to non-radiative defects. The QDs embedded in the AlGaAs demonstrated improved radiation hardness compared to QDs in the GaAs matrix and in the InGaAs quantum wells. Full article
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13 pages, 7639 KB  
Article
Plasmon Resonance in a System of Bi Nanoparticles Embedded into (Al,Ga)As Matrix
by Vitalii I. Ushanov, Sergey V. Eremeev, Vyacheslav M. Silkin and Vladimir V. Chaldyshev
Nanomaterials 2024, 14(1), 109; https://doi.org/10.3390/nano14010109 - 2 Jan 2024
Cited by 2 | Viewed by 2003
Abstract
We reveal the feasibility of the localized surface plasmon resonance in a system of Bi nanoparticles embedded into an AlxGa1xAs semiconductor matrix. With an ab initio determined dielectric function for bismuth and well-known dielectric properties of Al [...] Read more.
We reveal the feasibility of the localized surface plasmon resonance in a system of Bi nanoparticles embedded into an AlxGa1xAs semiconductor matrix. With an ab initio determined dielectric function for bismuth and well-known dielectric properties of AlxGa1xAs solid solution, we performed calculations of the optical extinction spectra for such metamaterial using Mie’s theory. The calculations demonstrate a strong band of the optical extinction using the localized surface plasmons near a photon energy of 2.5 eV. For the semiconducting matrices with a high aluminum content x>0.7, the extinction by plasmonic nanoparticles plays the dominant role in the optical properties of the medium near the resonance photon energy. Full article
(This article belongs to the Section Nanophotonics Materials and Devices)
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11 pages, 491 KB  
Article
Temperature-Enhanced Exciton Emission from GaAs Cone–Shell Quantum Dots
by Christian Heyn, Leonardo Ranasinghe, Kristian Deneke, Ahmed Alshaikh and Robert H. Blick
Nanomaterials 2023, 13(24), 3121; https://doi.org/10.3390/nano13243121 - 12 Dec 2023
Cited by 2 | Viewed by 1592
Abstract
The temperature-dependent intensities of the exciton (X) and biexciton (XX) peaks from single GaAs cone–shell quantum dots (QDs) are studied with micro photoluminescence (PL) at varied excitation power and QD size. The QDs are fabricated by filling self-assembled nanoholes, which are drilled in [...] Read more.
The temperature-dependent intensities of the exciton (X) and biexciton (XX) peaks from single GaAs cone–shell quantum dots (QDs) are studied with micro photoluminescence (PL) at varied excitation power and QD size. The QDs are fabricated by filling self-assembled nanoholes, which are drilled in an AlGaAs barrier by local droplet etching (LDE) during molecular beam epitaxy (MBE). This method allows the fabrication of strain-free QDs with sizes precisely controlled by the amount of material deposited for hole filling. Starting from the base temperature T = 3.2 K of the cryostat, single-dot PL measurements demonstrate a strong enhancement of the exciton emission up to a factor of five with increasing T. Both the maximum exciton intensity and the temperature Tx,max of the maximum intensity depend on excitation power and dot size. At an elevated excitation power, Tx,max becomes larger than 30 K. This allows an operation using an inexpensive and compact Stirling cryocooler. Above Tx,max, the exciton intensity decreases strongly until it disappears. The experimental data are quantitatively reproduced by a model which considers the competing processes of exciton generation, annihilation, and recombination. Exciton generation in the QDs is achieved by the sum of direct excitation in the dot, plus additional bulk excitons diffusing from the barrier layers into the dot. The thermally driven bulk-exciton diffusion from the barriers causes the temperature enhancement of the exciton emission. Above Tx,max, the intensity decreases due to exciton annihilation processes. In comparison to the exciton, the biexciton intensity shows only very weak enhancement, which is attributed to more efficient annihilation processes. Full article
(This article belongs to the Special Issue Molecular Beam Epitaxy Growth of Quantum Wires and Quantum Dots)
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12 pages, 1903 KB  
Communication
Onset of Quantum-Confined Stark Effects in Multijunction Photovoltaic Laser Power Converters Designed with Thin Subcells
by Simon Fafard and Denis Masson
Photonics 2023, 10(11), 1243; https://doi.org/10.3390/photonics10111243 - 8 Nov 2023
Cited by 6 | Viewed by 2566
Abstract
Photovoltaic multijunction power-converting III–V semiconductor devices generate electrical power from the optical energy of laser beams. They exhibit conversion efficiencies reaching values greater than 60% and 50% for the GaAs and the InP material systems, respectively. The applications of optical wireless power transmission [...] Read more.
Photovoltaic multijunction power-converting III–V semiconductor devices generate electrical power from the optical energy of laser beams. They exhibit conversion efficiencies reaching values greater than 60% and 50% for the GaAs and the InP material systems, respectively. The applications of optical wireless power transmission and power-over-fiber greatly benefit from employing such laser power converters constructed with multiple subcells; each is designed with either thin GaAs or InGaAs absorber regions. This study elucidates how the application of electric fields on thin heterostructures can create specific current–voltage characteristics due to modifications of the absorption characteristics from Franz–Keldysh perturbations and the onset of quantum-confined Stark effects. Negative differential photocurrent behavior can be observed as the reverse bias voltage is increased, until the corresponding current-clamping subcell reaches its reverse breakdown condition. The reverse voltage breakdown characteristics of the subcells were also measured to depend on the thickness of the subcell and on the optical intensity. The onset of the reverse breakdown was found to be at ~2.0–2.5 V under illumination and the thinner subcells exhibited higher levels of reverse bias currents. These effects can produce distinctive current–voltage behavior under spectrally detuned operations affecting the thinner subcells’ biases, but have no significant impact on the performance and maximum power point of multijunction power converters. Full article
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11 pages, 2121 KB  
Article
Features of Metalorganic Chemical Vapor Deposition Selective Area Epitaxy of AlzGa1−zAs (0 ≤ z ≤ 0.3) Layers in Arrays of Ultrawide Windows
by Viktor Shamakhov, Sergey Slipchenko, Dmitriy Nikolaev, Ilya Soshnikov, Alexander Smirnov, Ilya Eliseyev, Artyom Grishin, Matvei Kondratov, Artem Rizaev, Nikita Pikhtin and Peter Kop’ev
Technologies 2023, 11(4), 89; https://doi.org/10.3390/technologies11040089 - 7 Jul 2023
Cited by 2 | Viewed by 1856
Abstract
AlzGa1−zAs layers of various compositions were grown using metalorganic chemical vapor deposition on a GaAs substrate with a pattern of alternating SiO2 mask/window stripes, each 100 µm wide. Microphotoluminescence maps and thickness profiles of AlzGa1−z [...] Read more.
AlzGa1−zAs layers of various compositions were grown using metalorganic chemical vapor deposition on a GaAs substrate with a pattern of alternating SiO2 mask/window stripes, each 100 µm wide. Microphotoluminescence maps and thickness profiles of AlzGa1−zAs layers that demonstrated the distribution of the growth rate and z in the window were experimentally studied. It was shown that the layer growth rate and the AlAs mole fraction increased continuously from the center to the edge of the window. It was experimentally shown that for a fixed growth time of 10 min, as z increased from 0 to 0.3, the layer thickness difference between the center of the window and the edge increased from 700 Å to 1100 Å, and the maximum change in z between the center of the window and the edge reached Δz 0.016, respectively. Within the framework of the vapor -phase diffusion model, simulations of the spatial distribution of the layer thickness and z across the window were carried out. It was shown that the simulation results were in good agreement with the experimental results for the effective diffusion length D/k: Ga—85 µm, Al—50 µm. Full article
(This article belongs to the Special Issue Advanced Processing Technologies of Innovative Materials)
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13 pages, 2137 KB  
Article
Model of a GaAs Quantum Dot in a Direct Band Gap AlGaAs Wurtzite Nanowire
by Daniele Barettin, Igor V. Shtrom, Rodion R. Reznik and George E. Cirlin
Nanomaterials 2023, 13(11), 1737; https://doi.org/10.3390/nano13111737 - 25 May 2023
Cited by 3 | Viewed by 2816
Abstract
We present a study with a numerical model based on k·p, including electromechanical fields, to evaluate the electromechanical and optoelectronic properties of single GaAs quantum dots embedded in direct band gap AlGaAs nanowires. The geometry and the dimensions [...] Read more.
We present a study with a numerical model based on k·p, including electromechanical fields, to evaluate the electromechanical and optoelectronic properties of single GaAs quantum dots embedded in direct band gap AlGaAs nanowires. The geometry and the dimensions of the quantum dots, in particular the thickness, are obtained from experimental data measured by our group. We also present a comparison between the experimental and numerically calculated spectra to support the validity of our model. Full article
(This article belongs to the Special Issue Study on Quantum Dot and Quantum Dot-Based Device)
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10 pages, 12358 KB  
Article
Application of TiO2/Ag/TiO2 as an Ohmic Contact to an AlGaAs Layer in a GaAs Solar Cell
by Petko Vitanov, Malina Milanova, Hristosko Dikov and Nikolay Petkov
Energies 2023, 16(10), 4050; https://doi.org/10.3390/en16104050 - 12 May 2023
Cited by 3 | Viewed by 2095
Abstract
This paper investigates the possibility of using a nanolaminate TiO2/Ag/TiO2 structure as a transparent conductive coating on GaAs solar cells. A novel result is that this structure forms an Ohmic contact to Al-rich AlGaAs, which is used as a “window” [...] Read more.
This paper investigates the possibility of using a nanolaminate TiO2/Ag/TiO2 structure as a transparent conductive coating on GaAs solar cells. A novel result is that this structure forms an Ohmic contact to Al-rich AlGaAs, which is used as a “window” layer in GaAs-based solar cells. The TiO2/Ag/TiO2 structure is deposited by RF magnetron sputtering at room temperature. This nanolaminate coating has good optical and electrical properties: a high transmittance of 94% at 550 nm, a sheet resistance of 7 Ω/sq, and a figure of merit (FOM) of 105 × 10−3 Ω−1. These properties are the result of the presence of a discontinuous layer of Ag between two thin layers of TiO2. The morphology of a discontinuous layer of Ag nanogranules is confirmed by the observation of a cross-section of a sample with high-resolution transmission electron microscopy (HRTEM) and EDX analyses. Current–voltage diode characteristics of GaAs solar cells measured under standard test illumination at 1000 W/m2 are analyzed. The formation of an Ohmic contact is explained by the Fermi-level pinning effect caused by nanosized Ag particles in the nanolaminate TiO2/Ag/TiO2 structure. The obtained results demonstrate a new application of oxide−metal−oxide (OMO) coatings as Ohmic contacts to III-V compound semiconductors. Full article
(This article belongs to the Special Issue Advanced Materials and Structures for Photovoltaic Applications)
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13 pages, 3258 KB  
Article
An Optical Technique to Produce Embedded Quantum Structures in Semiconductors
by Cyril Hnatovsky, Stephen Mihailov, Michael Hilke, Loren Pfeiffer, Ken West and Sergei Studenikin
Nanomaterials 2023, 13(10), 1622; https://doi.org/10.3390/nano13101622 - 12 May 2023
Cited by 1 | Viewed by 2139
Abstract
The performance of a semiconductor quantum-electronic device ultimately depends on the quality of the semiconductor materials it is made of and on how well the device is isolated from electrostatic fluctuations caused by unavoidable surface charges and other sources of electric noise. Current [...] Read more.
The performance of a semiconductor quantum-electronic device ultimately depends on the quality of the semiconductor materials it is made of and on how well the device is isolated from electrostatic fluctuations caused by unavoidable surface charges and other sources of electric noise. Current technology to fabricate quantum semiconductor devices relies on surface gates which impose strong limitations on the maximum distance from the surface where the confining electrostatic potentials can be engineered. Surface gates also introduce strain fields which cause imperfections in the semiconductor crystal structure. Another way to create confining electrostatic potentials inside semiconductors is by means of light and photosensitive dopants. Light can be structured in the form of perfectly parallel sheets of high and low intensity which can penetrate deep into a semiconductor and, importantly, light does not deteriorate the quality of the semiconductor crystal. In this work, we employ these important properties of structured light to form metastable states of photo-sensitive impurities inside a GaAs/AlGaAs quantum well structure in order to create persistent periodic electrostatic potentials at large predetermined distances from the sample surface. The amplitude of the light-induced potential is controlled by gradually increasing the light fluence at the sample surface and simultaneously measuring the amplitude of Weiss commensurability oscillations in the magnetoresistivity. Full article
(This article belongs to the Special Issue Semiconductor Quantum Wells and Nanostructures)
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22 pages, 2096 KB  
Article
Self-Consistent Study of GaAs/AlGaAs Quantum Wells with Modulated Doping
by John A. Gil-Corrales, Alvaro L. Morales and Carlos A. Duque
Nanomaterials 2023, 13(5), 913; https://doi.org/10.3390/nano13050913 - 1 Mar 2023
Cited by 17 | Viewed by 4291
Abstract
In this work, the characterization and analysis of the physics of a GaAs quantum well with AlGaAs barriers were carried out, according to an interior doped layer. An analysis of the probability density, the energy spectrum, and the electronic density was performed using [...] Read more.
In this work, the characterization and analysis of the physics of a GaAs quantum well with AlGaAs barriers were carried out, according to an interior doped layer. An analysis of the probability density, the energy spectrum, and the electronic density was performed using the self-consistent method to solve the Schrödinger, Poisson, and charge-neutrality equations. Based on the characterizations, the system response to geometric changes in the well width and to non-geometric changes, such as the position and with of the doped layer as well as the donor density, were reviewed. All second-order differential equations were solved using the finite difference method. Finally, with the obtained wave functions and energies, the optical absorption coefficient and the electromagnetically induced transparency between the first three confined states were calculated. The results showed the possibility of tuning the optical absorption coefficient and the electromagnetically induced transparency via changes to the system geometry and the doped-layer characteristics. Full article
(This article belongs to the Special Issue Semiconductor Quantum Wells and Nanostructures)
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11 pages, 612 KB  
Article
Strong Electric Polarizability of Cone–Shell Quantum Structures for a Large Stark Shift, Tunable Long Exciton Lifetimes, and a Dot-to-Ring Transformation
by Christian Heyn, Leonardo Ranasinghe, Kristian Deneke, Ahmed Alshaikh, Carlos A. Duque and Wolfgang Hansen
Nanomaterials 2023, 13(5), 857; https://doi.org/10.3390/nano13050857 - 25 Feb 2023
Cited by 9 | Viewed by 1622
Abstract
Strain-free GaAs cone–shell quantum structures (CSQS) with widely tunable wave functions (WF) are fabricated using local droplet etching (LDE) during molecular beam epitaxy (MBE). During MBE, Al droplets are deposited on an AlGaAs surface, which then drill low-density (about 1 × 107 [...] Read more.
Strain-free GaAs cone–shell quantum structures (CSQS) with widely tunable wave functions (WF) are fabricated using local droplet etching (LDE) during molecular beam epitaxy (MBE). During MBE, Al droplets are deposited on an AlGaAs surface, which then drill low-density (about 1 × 107 cm−2) nanoholes with adjustable shape and size. Subsequently, the holes are filled with GaAs to form CSQS, where the size can be adjusted by the amount of GaAs deposited for hole filling. An electric field is applied in growth direction to tune the WF in a CSQS. The resulting highly asymmetric exciton Stark shift is measured using micro-photoluminescence. Here, the unique shape of the CSQS allows a large charge–carrier separation and, thus, a strong Stark shift of up to more than 16 meV at a moderate field of 65 kV/cm. This corresponds to a very large polarizability of 8.6 × 106 eVkV 2 cm2. In combination with simulations of the exciton energy, the Stark shift data allow the determination of the CSQS size and shape. Simulations of the exciton–recombination lifetime predict an elongation up to factor of 69 for the present CSQSs, tunable by the electric field. In addition, the simulations indicate the field-induced transformation of the hole WF from a disk into a quantum ring with a tunable radius from about 10 nm up to 22.5 nm. Full article
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11 pages, 478 KB  
Article
Modeling of Masked Droplet Deposition for Site-Controlled Ga Droplets
by Stefan Feddersen, Viktoryia Zolatanosha, Ahmed Alshaikh, Dirk Reuter and Christian Heyn
Nanomaterials 2023, 13(3), 466; https://doi.org/10.3390/nano13030466 - 23 Jan 2023
Cited by 1 | Viewed by 2153
Abstract
Site-controlled Ga droplets on AlGaAs substrates are fabricated using area-selective deposition of Ga through apertures in a mask during molecular beam epitaxy (MBE). The Ga droplets can be crystallized into GaAs quantum dots using a crystallization step under As flux. In order to [...] Read more.
Site-controlled Ga droplets on AlGaAs substrates are fabricated using area-selective deposition of Ga through apertures in a mask during molecular beam epitaxy (MBE). The Ga droplets can be crystallized into GaAs quantum dots using a crystallization step under As flux. In order to model the complex process, including the masked deposition of the droplets and a reduction of their number during a thermal annealing step, a multiscale kinetic Monte Carlo (mkMC) simulation of self-assembled Ga droplet formation on AlGaAs is expanded for area-selective deposition. The simulation has only two free model parameters: the activation energy for surface diffusion and the activation energy for thermal escape of adatoms from a droplet. Simulated droplet numbers within the opening of the aperture agree quantitatively with the experimental results down to the perfect site-control, with one droplet per aperture. However, the model parameters are different compared to those of the self-assembled droplet growth. We attribute this to the presence of the mask in close proximity to the surface, which modifies the local process temperature and the As background. This approach also explains the dependence of the model parameters on the size of the aperture. Full article
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