Processing math: 100%
 
 
Sign in to use this feature.

Years

Between: -

Subjects

remove_circle_outline
remove_circle_outline
remove_circle_outline
remove_circle_outline
remove_circle_outline

Journals

Article Types

Countries / Regions

Search Results (15)

Search Parameters:
Keywords = X-ray grating interferometry

Order results
Result details
Results per page
Select all
Export citation of selected articles as:
15 pages, 13117 KiB  
Article
Determination of Angle of Refraction in X-Ray Phase-Contrast Imaging Using Geometric Optics Method
by Jun Yang, Fangke Zong, Haoqi Tang, Yang Du and Rongchang Chen
Photonics 2025, 12(5), 442; https://doi.org/10.3390/photonics12050442 - 2 May 2025
Viewed by 277
Abstract
The accurate calculation of the angle of refraction of X-rays passing through an object is essential in X-ray phase-contrast imaging. While the wave optics-based method is commonly employed to calculate the angle of refraction, it presents several limitations. First, in cases where the [...] Read more.
The accurate calculation of the angle of refraction of X-rays passing through an object is essential in X-ray phase-contrast imaging. While the wave optics-based method is commonly employed to calculate the angle of refraction, it presents several limitations. First, in cases where the object induces significant phase variations, the angle of refraction becomes divergent. Second, the method fails to adequately account for point-source illumination conditions, particularly the influence of the finite X-ray source size on the angle of refraction. In this study, we demonstrate that a geometric optics-based method can effectively simulate propagation-based X-ray phase-contrast imaging with a low-brilliance X-ray source and compute the angle of refraction more accurately than the wave optics-based method. Our studies reveal that the geometric optics-based method can robustly determine the angle of refraction, even under conditions of substantial phase variations within the object. Furthermore, we show that reducing both the X-ray source size and the detector pixel size increases the angle of refraction in both simulations and experiments. Additionally, our results highlight that the angle of refraction is not invariant. Instead, it increases with the system’s total length and as the object moves closer to the light source. For systems with a Fresnel number of N ≥ 1, our method exhibits full compatibility with wave optics methods and can be extended to grating-based X-ray interferometry. The approach offers a robust alternative for calculating the angle of refraction under diverse imaging conditions. Full article
Show Figures

Figure 1

18 pages, 2939 KiB  
Article
Feature-Level Image Fusion Scheme for X-Ray Multi-Contrast Imaging
by Zhuo Zuo, Jinglei Luo, Haoran Liu, Xiang Zheng and Guibin Zan
Electronics 2025, 14(1), 210; https://doi.org/10.3390/electronics14010210 - 6 Jan 2025
Cited by 1 | Viewed by 877
Abstract
Since the mid-1990s, X-ray phase contrast imaging (XPCI) has attracted increasing interest in the industrial and bioimaging fields due to its high sensitivity to weakly absorbing materials and has gained widespread acceptance. XPCI can simultaneously provide three imaging modalities with complementary information, offering [...] Read more.
Since the mid-1990s, X-ray phase contrast imaging (XPCI) has attracted increasing interest in the industrial and bioimaging fields due to its high sensitivity to weakly absorbing materials and has gained widespread acceptance. XPCI can simultaneously provide three imaging modalities with complementary information, offering enriched details and data. This study proposes an image fusion method that simultaneously retrieves the three complementary channels of XPCI. It integrates block features, non-subsampled contourlet transform (NSCT), and a spiking cortical model (SCM), comprising three steps: (I) Image denoising, (II) Block-based feature-level NSCT-SCM fusion, and (III) Image quality enhancement. Compared with other methods in the XPCI image fusion field, the fusion results of the proposed algorithm demonstrated significant advantages, particularly with an impressive increase in the standard deviation by over 50% compared to traditional NSCT-SCM. The results revealed that the proposed algorithm exhibits high contrast, clear contours, and a short operation time. Experimental outcomes also demonstrated that the block-based feature extraction procedure performs better in retaining edge strength and texture information, with released computational resource consumption, thus, offering new possibilities for the industrial application of XPCI technology. Full article
Show Figures

Figure 1

14 pages, 3184 KiB  
Article
Fiber Orientation Estimation from X-ray Dark Field Images of Fiber Reinforced Polymers Using Constrained Spherical Deconvolution
by Ben Huyge, Jonathan Sanctorum, Ben Jeurissen, Jan De Beenhouwer and Jan Sijbers
Polymers 2023, 15(13), 2887; https://doi.org/10.3390/polym15132887 - 29 Jun 2023
Cited by 1 | Viewed by 1731
Abstract
The properties of fiber reinforced polymers are strongly related to the length and orientation of the fibers within the polymer matrix, the latter of which can be studied using X-ray computed tomography (XCT). Unfortunately, resolving individual fibers is challenging because they are small [...] Read more.
The properties of fiber reinforced polymers are strongly related to the length and orientation of the fibers within the polymer matrix, the latter of which can be studied using X-ray computed tomography (XCT). Unfortunately, resolving individual fibers is challenging because they are small compared to the XCT voxel resolution and because of the low attenuation contrast between the fibers and the surrounding resin. To alleviate both problems, anisotropic dark field tomography via grating based interferometry (GBI) has been proposed. Here, the fiber orientations are extracted by applying a Funk-Radon transform (FRT) to the local scatter function. However, the FRT suffers from a low angular resolution, which complicates estimating fiber orientations for small fiber crossing angles. We propose constrained spherical deconvolution (CSD) as an alternative to the FRT to resolve fiber orientations. Instead of GBI, edge illumination phase contrast imaging is used because estimating fiber orientations with this technique has not yet been explored. Dark field images are generated by a Monte Carlo simulation framework. It is shown that the FRT cannot estimate the fiber orientation accurately for crossing angles smaller than 70, while CSD performs well down to a crossing angle of 50. In general, CSD outperforms the FRT in estimating fiber orientations. Full article
Show Figures

Graphical abstract

15 pages, 2447 KiB  
Article
Multimodal Image Fusion for X-ray Grating Interferometry
by Haoran Liu, Mingzhe Liu, Xin Jiang, Jinglei Luo, Yuming Song, Xingyue Chu and Guibin Zan
Sensors 2023, 23(6), 3115; https://doi.org/10.3390/s23063115 - 14 Mar 2023
Cited by 7 | Viewed by 2419
Abstract
X-ray grating interferometry (XGI) can provide multiple image modalities. It does so by utilizing three different contrast mechanisms—attenuation, refraction (differential phase-shift), and scattering (dark-field)—in a single dataset. Combining all three imaging modalities could create new opportunities for the characterization of material structure features [...] Read more.
X-ray grating interferometry (XGI) can provide multiple image modalities. It does so by utilizing three different contrast mechanisms—attenuation, refraction (differential phase-shift), and scattering (dark-field)—in a single dataset. Combining all three imaging modalities could create new opportunities for the characterization of material structure features that conventional attenuation-based methods are unable probe. In this study, we proposed an image fusion scheme based on the non-subsampled contourlet transform and spiking cortical model (NSCT-SCM) to combine the tri-contrast images retrieved from XGI. It incorporated three main steps: (i) image denoising based on Wiener filtering, (ii) the NSCT-SCM tri-contrast fusion algorithm, and (iii) image enhancement using contrast-limited adaptive histogram equalization, adaptive sharpening, and gamma correction. The tri-contrast images of the frog toes were used to validate the proposed approach. Moreover, the proposed method was compared with three other image fusion methods by several figures of merit. The experimental evaluation results highlighted the efficiency and robustness of the proposed scheme, with less noise, higher contrast, more information, and better details. Full article
Show Figures

Figure 1

17 pages, 2786 KiB  
Review
X-ray Phase Contrast Imaging from Synchrotron to Conventional Sources: A Review of the Existing Techniques for Biological Applications
by Laurene Quenot, Sylvain Bohic and Emmanuel Brun
Appl. Sci. 2022, 12(19), 9539; https://doi.org/10.3390/app12199539 - 23 Sep 2022
Cited by 36 | Viewed by 5111
Abstract
Since the seminal work of Roentgen, X-ray imaging mainly uses the same physical phenomenon: the absorption of light by matter. Thanks to third-generation synchrotrons that provide a high flux of quasi-coherent X-rays, we have seen in recent years new imaging concepts such as [...] Read more.
Since the seminal work of Roentgen, X-ray imaging mainly uses the same physical phenomenon: the absorption of light by matter. Thanks to third-generation synchrotrons that provide a high flux of quasi-coherent X-rays, we have seen in recent years new imaging concepts such as phase contrast or dark-field imaging that were later adapted to conventional X-ray sources. These innovative imaging techniques are particularly suitable for visualizing soft matter, such as biological tissues. After a brief introduction to the physical foundations of these two techniques, we present the different experimental set-ups that are now available to produce such contrasts: propagation, analyzer-based, grating interferometry and non-interferometric methods, such as coded aperture and modulation techniques. We present a comprehensive review of their principles; associated data processing; and finally, their requirements for their transfer outside of synchrotrons. In conclusion, gratings interferometry, coded aperture and modulation techniques seem to be the best candidates for the widespread use of phase contrast and dark-field imaging on low-cost X-ray sources. Full article
(This article belongs to the Special Issue Application of X-ray Computed Tomography)
Show Figures

Figure 1

13 pages, 1424 KiB  
Article
Multi-Modal X-ray Imaging and Analysis for Characterization of Urinary Stones
by Somayeh Saghamanesh, Henning Richter, Antonia Neels and Robert Zboray
Appl. Sci. 2022, 12(8), 3798; https://doi.org/10.3390/app12083798 - 9 Apr 2022
Cited by 2 | Viewed by 3067
Abstract
Backgound: The composition of stones formed in the urinary tract plays an important role in their management over time. The most common imaging method for the non-invasive evaluation of urinary stones is radiography and computed tomography (CT). However, CT is not very sensitive, [...] Read more.
Backgound: The composition of stones formed in the urinary tract plays an important role in their management over time. The most common imaging method for the non-invasive evaluation of urinary stones is radiography and computed tomography (CT). However, CT is not very sensitive, and cannot differentiate between all critical stone types. In this study, we propose the application, and evaluate the potential, of a multi-modal (or multi-contrast) X-ray imaging technique called speckle-based imaging (SBI) to differentiate between various types of urinary stones. Methods: Three different stone samples were extracted from animal and human urinary tracts and examined in a laboratory-based speckle tracking setup. The results were discussed based on an X-ray diffraction analysis and a comparison with X-ray microtomography and grating-based interferometry. Results: The stones were classified through compositional analysis by X-ray diffraction. The multi-contrast images obtained using the SBI method provided detailed information about the composition of various urinary stone types, and could differentiate between them. X-ray SBI could provide highly sensitive and high-resolution characterizations of different urinary stones in the radiography mode, comparable to those by grating interferometry. Conclusions: This investigation demonstrated the capability of the SBI technique for the non-invasive classification of urinary stones through radiography in a simple and cost-effective laboratory setting. This opens the possibility for further studies concerning full-field in vivo SBI for the clinical imaging of urinary stones. Full article
(This article belongs to the Special Issue X-ray Medical and Biological Imaging)
Show Figures

Figure 1

10 pages, 3315 KiB  
Article
Fabrication of X-ray Gratings for Interferometric Imaging by Conformal Seedless Gold Electroplating
by Konstantins Jefimovs, Joan Vila-Comamala, Carolina Arboleda, Zhentian Wang, Lucia Romano, Zhitian Shi, Matias Kagias and Marco Stampanoni
Micromachines 2021, 12(5), 517; https://doi.org/10.3390/mi12050517 - 7 May 2021
Cited by 15 | Viewed by 3850
Abstract
We present a method to produce small pitch gratings for X-ray interferometric imaging applications, allowing the phase sensitivity to be increased and/or the length of the laboratory setup to be minimized. The method is based on fabrication of high aspect ratio silicon microstructures [...] Read more.
We present a method to produce small pitch gratings for X-ray interferometric imaging applications, allowing the phase sensitivity to be increased and/or the length of the laboratory setup to be minimized. The method is based on fabrication of high aspect ratio silicon microstructures using deep reactive ion etching (Bosch technique) of dense grating arrays and followed by conformal electroplating of Au. We demonstrated that low resistivity Si substrates (<0.01 Ohm·cm) enable the metal seeding layer deposition step to be avoided, which is normally required to initiate the electroplating process. Etching conditions were optimized to realize Si recess structures with a slight bottom tapering, which ensured the void-free Au filling of the trenches. Vapor HF was used to remove the native oxide layer from the Si grating surface prior to electroplating in the cyanide-based Au electrolyte. Fabrication of Au gratings with pitch in the range 1.2–3.0 µm was successfully realized. A substantial improved aspect ratio of 45:1 for a pitch size of 1.2 µm was achieved with respect to the prior art on 4-inch wafer-based technology. The fabricated Au gratings were tested with X-ray interferometers in Talbot–Laue configuration with measured visibility of 13% at an X-ray design energy of 26 keV. Full article
Show Figures

Figure 1

15 pages, 3015 KiB  
Article
Binary Amplitude Reflection Gratings for X-ray Shearing and Hartmann Wavefront Sensors
by Kenneth A. Goldberg, Antoine Wojdyla and Diane Bryant
Sensors 2021, 21(2), 536; https://doi.org/10.3390/s21020536 - 13 Jan 2021
Cited by 7 | Viewed by 3041
Abstract
New, high-coherent-flux X-ray beamlines at synchrotron and free-electron laser light sources rely on wavefront sensors to achieve and maintain optimal alignment under dynamic operating conditions. This includes feedback to adaptive X-ray optics. We describe the design and modeling of a new class of [...] Read more.
New, high-coherent-flux X-ray beamlines at synchrotron and free-electron laser light sources rely on wavefront sensors to achieve and maintain optimal alignment under dynamic operating conditions. This includes feedback to adaptive X-ray optics. We describe the design and modeling of a new class of binary-amplitude reflective gratings for shearing interferometry and Hartmann wavefront sensing. Compact arrays of deeply etched gratings illuminated at glancing incidence can withstand higher power densities than transmission membranes and can be designed to operate across a broad range of photon energies with a fixed grating-to-detector distance. Coherent wave-propagation is used to study the energy bandwidth of individual elements in an array and to set the design parameters. We observe that shearing operates well over a ±10% bandwidth, while Hartmann can be extended to ±30% or more, in our configuration. We apply this methodology to the design of a wavefront sensor for a soft X-ray beamline operating from 230 eV to 1400 eV and model shearing and Hartmann tests in the presence of varying wavefront aberration types and magnitudes. Full article
(This article belongs to the Special Issue EUV and X-ray Wavefront Sensing)
Show Figures

Figure 1

12 pages, 7119 KiB  
Article
Comparison of Thermal Neutron and Hard X-ray Dark-Field Tomography
by Alex Gustschin, Tobias Neuwirth, Alexander Backs, Manuel Viermetz, Nikolai Gustschin, Michael Schulz and Franz Pfeiffer
J. Imaging 2021, 7(1), 1; https://doi.org/10.3390/jimaging7010001 - 23 Dec 2020
Cited by 1 | Viewed by 3211
Abstract
High visibility (0.56) neutron-based multi-modal imaging with a Talbot–Lau interferometer at a wavelength of 1.6 Å is reported. A tomography scan of a strongly absorbing quartz geode sample was performed with both the neutron and an X-ray grating interferometer (70 kVp) for a [...] Read more.
High visibility (0.56) neutron-based multi-modal imaging with a Talbot–Lau interferometer at a wavelength of 1.6 Å is reported. A tomography scan of a strongly absorbing quartz geode sample was performed with both the neutron and an X-ray grating interferometer (70 kVp) for a quantitative comparison. Small scattering structures embedded in the absorbing silica matrix were well resolved in neutron dark-field CT slices with a spatial resolution of about 300 μm. Beneficial effects, such as monochromaticity and stronger penetration power of the used neutron radiation, helped to avoid the beam hardening-related artificial dark-field signal which was present in the X-ray data. Both dark-field modalities show mostly the same structures; however, some scattering features appear only in the neutron domain. Potential applications of combined X-ray and neutron multi-modal CT enabling one to probe both the nuclear and the electron density-related structural properties are discussed. strongly absorbing samples are now accessible for the dark-field modality by the use of thermal neutrons. Full article
(This article belongs to the Special Issue Neutron Imaging)
Show Figures

Figure 1

11 pages, 3193 KiB  
Letter
X-Ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-Ray Nanofocusing Mirrors
by Jumpei Yamada, Takato Inoue, Nami Nakamura, Takashi Kameshima, Kazuto Yamauchi, Satoshi Matsuyama and Makina Yabashi
Sensors 2020, 20(24), 7356; https://doi.org/10.3390/s20247356 - 21 Dec 2020
Cited by 11 | Viewed by 4741
Abstract
X-ray single-grating interferometry was applied to conduct accurate wavefront corrections for hard X-ray nanofocusing mirrors. Systematic errors in the interferometer, originating from a grating, a detector, and alignment errors of the components, were carefully examined. Based on the measured wavefront errors, the mirror [...] Read more.
X-ray single-grating interferometry was applied to conduct accurate wavefront corrections for hard X-ray nanofocusing mirrors. Systematic errors in the interferometer, originating from a grating, a detector, and alignment errors of the components, were carefully examined. Based on the measured wavefront errors, the mirror shapes were directly corrected using a differential deposition technique. The corrected X-ray focusing mirrors with a numerical aperture of 0.01 attained two-dimensionally diffraction-limited performance. The results of the correction indicate that the uncertainty of the wavefront measurement was less than λ/72 in root-mean-square value. Full article
(This article belongs to the Special Issue EUV and X-ray Wavefront Sensing)
Show Figures

Graphical abstract

13 pages, 3666 KiB  
Article
Towards the Fabrication of High-Aspect-Ratio Silicon Gratings by Deep Reactive Ion Etching
by Zhitian Shi, Konstantins Jefimovs, Lucia Romano and Marco Stampanoni
Micromachines 2020, 11(9), 864; https://doi.org/10.3390/mi11090864 - 18 Sep 2020
Cited by 49 | Viewed by 9435
Abstract
The key optical components of X-ray grating interferometry are gratings, whose profile requirements play the most critical role in acquiring high quality images. The difficulty of etching grating lines with high aspect ratios when the pitch is in the range of a few [...] Read more.
The key optical components of X-ray grating interferometry are gratings, whose profile requirements play the most critical role in acquiring high quality images. The difficulty of etching grating lines with high aspect ratios when the pitch is in the range of a few micrometers has greatly limited imaging applications based on X-ray grating interferometry. A high etching rate with low aspect ratio dependence is crucial for higher X-ray energy applications and good profile control by deep reactive ion etching of grating patterns. To achieve this goal, a modified Coburn–Winters model was applied in order to study the influence of key etching parameters, such as chamber pressure and etching power. The recipe for deep reactive ion etching was carefully fine-tuned based on the experimental results. Silicon gratings with an area of 70 × 70 mm2, pitch size of 1.2 and 2 μm were fabricated using the optimized process with aspect ratio α of ~67 and 77, respectively. Full article
Show Figures

Figure 1

23 pages, 7556 KiB  
Review
Microfabrication of X-ray Optics by Metal Assisted Chemical Etching: A Review
by Lucia Romano and Marco Stampanoni
Micromachines 2020, 11(6), 589; https://doi.org/10.3390/mi11060589 - 12 Jun 2020
Cited by 44 | Viewed by 6755
Abstract
High-aspect-ratio silicon micro- and nanostructures are technologically relevant in several applications, such as microelectronics, microelectromechanical systems, sensors, thermoelectric materials, battery anodes, solar cells, photonic devices, and X-ray optics. Microfabrication is usually achieved by dry-etch with reactive ions and KOH based wet-etch, metal assisted [...] Read more.
High-aspect-ratio silicon micro- and nanostructures are technologically relevant in several applications, such as microelectronics, microelectromechanical systems, sensors, thermoelectric materials, battery anodes, solar cells, photonic devices, and X-ray optics. Microfabrication is usually achieved by dry-etch with reactive ions and KOH based wet-etch, metal assisted chemical etching (MacEtch) is emerging as a new etching technique that allows huge aspect ratio for feature size in the nanoscale. To date, a specialized review of MacEtch that considers both the fundamentals and X-ray optics applications is missing in the literature. This review aims to provide a comprehensive summary including: (i) fundamental mechanism; (ii) basics and roles to perform uniform etching in direction perpendicular to the <100> Si substrate; (iii) several examples of X-ray optics fabricated by MacEtch such as line gratings, circular gratings array, Fresnel zone plates, and other X-ray lenses; (iv) materials and methods for a full fabrication of absorbing gratings and the application in X-ray grating based interferometry; and (v) future perspectives of X-ray optics fabrication. The review provides researchers and engineers with an extensive and updated understanding of the principles and applications of MacEtch as a new technology for X-ray optics fabrication. Full article
(This article belongs to the Special Issue Micro- and Nano-Fabrication by Metal Assisted Chemical Etching)
Show Figures

Graphical abstract

21 pages, 9630 KiB  
Review
Recent Progress in X-ray and Neutron Phase Imaging with Gratings
by Atsushi Momose, Hidekazu Takano, Yanlin Wu, Koh Hashimoto, Tetsuo Samoto, Masato Hoshino, Yoshichika Seki and Takenao Shinohara
Quantum Beam Sci. 2020, 4(1), 9; https://doi.org/10.3390/qubs4010009 - 10 Feb 2020
Cited by 20 | Viewed by 5936
Abstract
Under the JST-ERATO project in progress to develop X-ray and neutron phase-imaging methods together, recent achievements have been selected and reviewed after describing the merit and the principle of the phase imaging method. For X-ray phase imaging, recent developments of four-dimensional phase tomography [...] Read more.
Under the JST-ERATO project in progress to develop X-ray and neutron phase-imaging methods together, recent achievements have been selected and reviewed after describing the merit and the principle of the phase imaging method. For X-ray phase imaging, recent developments of four-dimensional phase tomography and phase microscopy at SPring-8, Japan are mainly presented. For neutron phase imaging, an approach in combination with the time-of-flight method developed at J-PARC, Japan is described with the description of new Gd grating fabrication. Full article
(This article belongs to the Special Issue Quantum Beams Applying to Innovative Industrial Materials)
Show Figures

Figure 1

15 pages, 6003 KiB  
Article
Non-Destructive Testing of Archaeological Findings by Grating-Based X-Ray Phase-Contrast and Dark-Field Imaging
by Veronika Ludwig, Maria Seifert, Tracy Niepold, Georg Pelzer, Jens Rieger, Julia Ziegler, Thilo Michel and Gisela Anton
J. Imaging 2018, 4(4), 58; https://doi.org/10.3390/jimaging4040058 - 14 Apr 2018
Cited by 24 | Viewed by 8175
Abstract
The analysis of archaeological findings reveals the remaining secrets of human history. However, it is a challenging task to investigate and simultaneously preserve the unique remains. Available non-destructive examination methods are limited and often insufficient. Thus, we considered X-ray grating interferometry as a [...] Read more.
The analysis of archaeological findings reveals the remaining secrets of human history. However, it is a challenging task to investigate and simultaneously preserve the unique remains. Available non-destructive examination methods are limited and often insufficient. Thus, we considered X-ray grating interferometry as a non-destructive and advanced X-ray imaging method to retrieve more information about archaeological findings. In addition to the conventional attenuation image, the differential phase and the dark-field image are obtained. We studied the potential of the scattering-sensitive dark-field and the phase-shift sensitive differential phase image to analyse archaeological findings. Hereby, the focus lies on organic remnants. Usually, the organic materials have vanished due to decomposition processes, but the structures are often preserved by mineralisation and penetration of corrosion products. We proved that the combination of the attenuation and the dark-field image in particular, enables a separation of structural properties for fabric remnants. Furthermore, we achieved promising results for the reconstruction of sub-pixel sized fibre orientations of woven fabric remnants by employing the directional dark-field imaging method. We conclude from our results that a further application of X-ray dark-field imaging on wet organic findings and on the distinction of different types of organic remnants at archaeological findings is promising. Full article
(This article belongs to the Special Issue Phase-Contrast and Dark-Field Imaging)
Show Figures

Figure 1

16 pages, 18219 KiB  
Article
Chemical and Molecular Variations in Commercial Epoxide Photoresists for X-ray Lithography
by Vitor Vlnieska, Margarita Zakharova, Martin Börner, Klaus Bade, Jürgen Mohr and Danays Kunka
Appl. Sci. 2018, 8(4), 528; https://doi.org/10.3390/app8040528 - 30 Mar 2018
Cited by 6 | Viewed by 4453
Abstract
The quality of high aspect ratio microstructures fabricated by deep X-ray lithography is highly dependent on the photoresist material used and the process parameters applied. Even with photoresists more suitable to this process, it is common to face defects in the final optical [...] Read more.
The quality of high aspect ratio microstructures fabricated by deep X-ray lithography is highly dependent on the photoresist material used and the process parameters applied. Even with photoresists more suitable to this process, it is common to face defects in the final optical components, such as in case of X-ray gratings. The gratings need to be fabricated with critical dimensions on a sub-micrometer and micrometer scale, with periods of few micrometers and heights of hundreds of micrometers to be used in X-ray imaging techniques such as Talbot–Lau Interferometry. During the fabrication process, these features lead to challenges such as mechanical stability, homogeneity, and defect-free grating patterns. Usually, an epoxy-based negative photoresist is used in X-ray lithography, which needs to account for the shrinkage that takes place during polymer crosslinking in order to avoid defects in the final pattern. Nowadays, photoresist material still lacks certain suitable properties (chemical and mechanical) to fabricate gratings of high quality and with acceptable reproducibility. This work presents the results of TGA, FTIR, and MALDI-TOF analysis made on photoresists commercially available and suitable for X-ray lithography. The photoresists presented different profiles regarding the solvent content and oligomers composition, and in the case of some samples, there were high amounts of non-epoxidized oligomers. Full article
(This article belongs to the Section Chemical and Molecular Sciences)
Show Figures

Graphical abstract

Back to TopTop