Search Results (913)

This study examines the bending of cross-ply laminated composite nanoplates coupled to a piezoelectric fiber-reinforced composite layer via the nonlocal strain gradient theory. The aim is to accurately capture size-dependent impacts and electromechanical interaction in nanoscale composite structures. The mechanical response is modeled utilizing a refined four-variable shear deformation theory, with the governing equilibrium equations developed using the virtual work assumption. The nanoplate is examined under simply supported boundary conditions exposed to both mechanical loading and applied electric voltage. A detailed parametric investigation is done to assess the contribution of non-local and strain gradient factors, imposed voltage, and geometric ratios on the bending behavior. The results show that the nonlocal parameter generates a softening result, increasing deflection, whereas the strain gradient parameter raises stiffness and minimizes deformation. Moreover, the applied voltage successfully controls the bending response by electromechanical actuation, underlining the potential of PFRC-integrated nanoplates in smart nanoscale systems. Full article

:Piezoelectric actuators are core components in precision motion control due to their unique electromechanical coupling properties. This paper establishes a dynamic model for a partially laminated piezoelectric–metal–piezoelectric beam actuator based on the Euler–Bernoulli beam theory. The model comprises symmetrically bonded piezoelectric layers on both sides of a central metal substrate, with the piezoelectric material partially distributed along the beam length. The structure is analyzed segment-wise along the beam’s longitudinal length direction. By applying continuity conditions at the interfaces of varying cross-sections and leveraging the structural symmetry, analytical solutions for both the natural frequency and output displacement are derived. The analytical predictions are validated against finite-element results, and experiments also verify the accuracy of the analytical solution of the analytical voltage–displacement response. In addition, the effects of key geometric parameters on the dynamic performance are systematically investigated. The proposed model provides theoretical guidance for tuning the resonance characteristics and drive displacement design of the PMP actuators. Full article

Piezoelectric thin films have been widely used in micro-electromechanical systems (MEMSs), such as sensors, actuators, and resonant devices. Electromechanically driven fractures can severely degrade device performance and reliability. In this work, a phase-field damage model is developed for MEMS piezoelectric thin films under coupled electromechanical loading, incorporating pre-existing defects via an equivalent local fracture toughness. Microcracks and micro-voids arising from manufacturing defects are integrated into the model through an effective local fracture toughness, enabling a unified description of their roles in crack initiation and propagation. The proposed model is implemented in ABAQUS by means of a user-defined element (UEL) subroutine and solved using a staggered scheme. Numerical results show that the level of pre-existing defects, the applied electric potential, and the polarization direction all exert significant effects on fracture behavior. As the defect parameter D_c increases from 0 to 0.10, the reaction force decreases from 87.8 N to 86.3 N, indicating reduced fracture resistance due to manufacturing-induced defects. In addition, the reaction force changes from 90.3 N at −500 V to 86.3 N at +500 V, while it decreases from 102.9 N to 87.1 N as the polarization angle β increases from 0° to 90°. These results demonstrate that pre-existing defects and electromechanical loading jointly govern crack evolution in MEMS piezoelectric thin films. The present study provides a useful numerical tool for fracture analysis, reliability assessment, and structural design of MEMS piezoelectric devices containing manufacturing defects. Full article

Surface Acoustic Wave (SAW) technology, long central to analog signal processing and RF filtering, is undergoing a major renewal. Driven by advances that decouple SAWs from traditional piezoelectric materials and fixed-function devices, the field is gaining unprecedented control over acoustic, optical, and electronic interactions at the micro and nanoscale. This review synthesizes these developments across four fronts: new physical mechanisms for SAW manipulation, emerging material platforms, ranging from thin films to 2D systems, along with reconfigurable device architectures and circuits, and the expanding landscape of applications they enable. Optical methods are reshaping how SAWs are generated and controlled, bypassing the limits of conventional electromechanical coupling. Coherent optical excitation of high-Q SAW cavities via Brillouin-like optomechanical interactions now grants access to modes in non-piezoelectric substrates such as diamond and silicon, while on-chip SAW excitation in photonic waveguides through backward stimulated Brillouin scattering opens new integrated sensing routes. In parallel, magneto-acoustic experiments have revealed nonreciprocal SAW diffraction from resonant scattering in magnetoelastic gratings. On the device side, ZnO thin-film transistors integrated on LiNbO₃ exploit acoustoelectric coupling to realize voltage-tunable phase shifters; UHF Z-shaped delay lines achieve high sensitivity in a compact footprint; and parametric synthesis of wideband, multi-stage lattice filters targets 5G-class performance. Atomistic simulations show that SAW propagation in 2D MXene films can be engineered via surface terminations, while aerosol jet printing and SAW-assisted particle patterning provide agile, cleanroom-light fabrication of microfluidic and magnetic components. These advances enable applications ranging from hybrid quantum systems and quantum links to lab-on-a-chip particle control, SBS-based and UHF sensing, reconfigurable RF front-ends, and soft robotic actuators based on patterned magnetic composites. At the same time, optical techniques offer non-contact probes of dissipation, and MXenes and other emerging materials open new regimes of acoustic control. Conclusively, they are transforming SAW technology into a versatile, programmable platform for mediating complex interactions in next-generation electronic, photonic, and quantum systems. Full article

The present study investigates the influence of geometric parameters on the vibro-acoustic performance of piezoelectric speakers, with the objective of establishing quantitative design guidelines for resonance tuning and sound pressure level (SPL) enhancement. Understanding the dimension-dependent behavior of such devices is essential for the development of compact and efficient acoustic transducers. To this end, a fully coupled electromechanical–acoustic finite element model is developed in the frequency domain, incorporating linear piezoelectric constitutive relations, structural dynamics, and an external acoustic air domain. The model systematically examines the effects of variations in piezoelectric disc thickness, brass diaphragm thickness, and diaphragm radius. The results demonstrate that increasing the piezoelectric disc thickness leads to a noticeable increase in resonance frequency and a measurable enhancement in SPL due to strengthened electromechanical coupling. In contrast, reducing the brass membrane thickness primarily shifts the resonance frequency to lower values, while producing negligible changes in SPL amplitude. Furthermore, enlarging the diaphragm radius significantly decreases the fundamental resonance frequency, confirming its dominant influence on stiffness-controlled vibration behavior. These findings quantitatively establish the relationship between geometric design parameters and acoustic response, providing a predictive framework for performance optimization. The proposed modeling approach offers an effective and reliable tool for the design and refinement of high-performance piezoelectric speaker systems. Full article

Multifrequency operation in micromachined ultrasonic transducers, enabled by targeted excitation of specific vibrational modes, has emerged as an attractive approach for achieving tunable performance and configurability, well-suited for advanced ultrasound imaging and therapeutic applications. This paper presents a dual-electrode rectangular piezoelectric micromachined ultrasonic transducer (PMUT) designed for efficient dual-frequency operation through mode-selective actuation. The proposed architecture employs segmented electrodes that are spatially aligned with the strain distributions of two distinct flexural modes, enabling selective excitation of Mode 1 (fundamental) and Mode 3 (higher order) through appropriate electrode actuation. Finite element simulations and impedance analysis were used to guide the electrode configuration and validate the mode-selective behavior. The dual-mode PMUT was fabricated alongside a conventional single-electrode PMUT using identical membrane dimensions and material stack for direct comparison. Comprehensive electrical and underwater acoustic characterization confirmed that the conventional PMUT is limited to single-frequency operation at the fundamental resonance. In contrast, the proposed design achieved a substantial improvement in higher-order performance, with a threefold increase in acoustic pressure at Mode 3 compared to the conventional device. These results demonstrate that mode-aligned electrode segmentation enables efficient dual-mode operation without added fabrication complexity, making the design highly suitable for multifrequency ultrasonic applications such as biomedical imaging and sensing. Full article

Microinjection is one of the most established and effective techniques for introducing foreign substances into cells. However, issues such as cumbersome procedures, low success rates, and poor repeatability in manual cell microinjection have seriously restricted its practical applications in biomedical research and engineering. Responding to such problems, this paper designs an automated microinjection system that combines deep learning visual positioning and adaptive neural network sliding-mode motion control. The machine vision solution based on the deep learning YOLOv8 target detection algorithm is utilized by the system to provide positional prerequisites for automated microinjection. Then, stable and fast puncture is completed by controlling the end effector (composed of a piezoelectric actuator and a displacement amplification mechanism). Since the piezoelectric actuator has strong nonlinearity, the motion control of the end effector adopts the control strategy combining sliding mode variable structure and adaptive neural networks to meet the requirements of precise displacement output of microinjection. At the same time, a host computer control system is developed to integrate hardware equipment, visual positioning algorithms and motion control algorithms to achieve corresponding automated microinjection tasks. Finally, the effectiveness of the designed automated microinjection system is successfully verified on zebrafish embryos. Full article

In this paper, a drive–vibration integrated piezoelectric actuator (DVIPA) is proposed for vibration-assisted implantation of flexible electrodes. Conventional implantation systems typically rely on separate actuation and vibration modules, which increase system complexity and limit integration. To address this limitation, the proposed DVIPA integrates driving and vibration functions within a single compact structure by employing two piezoelectric bimorphs for clamping and a piezoelectric stack for combined actuation. A composite excitation waveform, consisting of high-frequency sinusoidal signals superimposed on the rising stage of a low-frequency trapezoidal wave, is applied to simultaneously generate forward motion and vibration. This configuration enables a coupled motion mode that facilitates insertion while reducing the risk of buckling. A prototype of the DVIPA was developed and experimentally evaluated. The results show that vibration-assisted implantation can be achieved under various operating conditions, with independently adjustable driving and vibration parameters. A maximum speed of 328 μm/s is obtained, meeting the requirements for flexible electrode implantation. Agarose gel experiments further demonstrate that vibration frequencies above 40 Hz and voltages between 20 and 40 V can effectively assist implantation of polydimethylsiloxane (PDMS) without buckling failure. Overall, the proposed actuator provides a compact and integrated solution for vibration-assisted implantation, offering potential advantages in applications with limited space. Full article

Active rotors with trailing-edge flaps (TEFs) are a promising method applied to the main-rotor blades of the helicopter for vibration suppression. For active rotors, both the TEF actuator and the corresponding deflection control law determine their overall performance and effectiveness for vibration reduction. In this study, a double-acting piezoelectric actuator is designed to actuate the TEFs, where bidirectional push/pull output is achieved by two groups of piezoelectric stacks operating in opposite directions. Benchtop tests indicate that the TEF deflection angle of the active rotor equipped with this actuator can reach ±4.3°. Subsequently, based on the controlled autoregressive moving average (CARMA) model, an adaptive controller is developed to reduce vibrations in the active rotor by using a minimum variance direct self-tuning regulator (MVSTDR). Finally, an unmanned helicopter is retrofitted with the active rotor, and vibration control experiments are performed under tethered hover conditions with vertical cabin vibration as the control target. Experimental results demonstrate the effectiveness of the designed actuator and the MVSTDR for vibration reduction on the helicopter equipped with an active rotor, which also validates the feasibility of active rotors for practical engineering applications in helicopter vibration control. Full article

This study experimentally investigates a compact side-exhaust piezoelectric synthetic jet actuator equipped with outlet flaps and compares its performance with a flap-free baseline design. The flap concept is intended to mitigate hot-air recirculation during the suction phase and thereby improve near-field cooling in confined layouts. Experiments were conducted under a 350 Hz, 60 Vpp driving signal with an exit dimension of 20 mm × 1 mm. An initial screening campaign evaluated 24 flap configurations by varying flap length, thickness, and installation distance; the results showed that overly long flaps impose substantial blockage and momentum loss, and therefore the flow analysis was narrowed to a practical flap length of 29.5 mm. The final velocity characterization focuses on two representative flap thicknesses (0.1 mm and 0.5 mm) and three installation distances (5, 10, and 15 mm from the exit). For heat transfer evaluation, the nozzle-to-target spacing was varied from 5 to 50 mm in 5 mm increments. The modified actuator demonstrates improved near-field cooling performance, with the best case achieved using 0.1 mm flaps installed at 5 mm, yielding a maximum Nusselt number enhancement of 6.24% relative to the baseline at very small spacings. Furthermore, the thermal benefit becomes more pronounced at elevated heat source temperatures, with the strongest improvement observed around 60–80 °C (up to ~13% at 60 °C). These results provide practical design guidance for enhancing localized convective heat transfer in compact electronics cooling applications. Full article

Piezoelectric actuators are essential for sub-millimeter robots and reconfigurable microstructures owing to their advantages, including the ability to operate in air and high-speed response. However, the substantial performance degradation observed in piezoelectric actuators with sub-micrometer thickness poses a critical challenge for the design of low-voltage microactuators capable of achieving large bending curvature. Here we develop a coupled analytical–numerical framework for designing multilayer lead zirconate titanate (PZT) nanofilm microactuators under a low voltage constraint (≤5 V). An analytical multilayer beam model is extended to incorporate thickness-dependent material properties and an interfacial dead layer that reduces the effective electric field at small thicknesses. This enables rapid exploration of curvature and the neutral-axis position as functions of the thicknesses of PZT, electrodes, and the dielectric layer. Two- and three-dimensional finite-element simulations provide complementary predictions of neutral-axis location, voltage-dependent curvature response, and eigenmode shapes. The resulting design maps reveal a non-monotonic optimum for PZT thickness in the few-hundred-nanometer range to maximize the curvature change at low voltages and identify ultrathin top electrodes as a key design lever that enhances bending by reducing parasitic stiffness while shifting the neutral axis favorably. These findings offer quantitative guidelines for designing low-voltage, high-curvature piezoelectric microactuators for microrobotic systems. Full article

Ultrasonic motors have attracted considerable attention in precision actuation applications because of their advantages over conventional electromagnetic motors, such as compact structure, high positioning accuracy, immunity to electromagnetic interference, noise-free operation, and suitability for low-temperature environments. However, conventional traveling-wave linear ultrasonic motors usually rely on boundary constraints to establish stable traveling waves, which may limit their structural flexibility and self-propelled capability. To address this issue, this paper proposes a free-boundary traveling-wave linear ultrasonic motor capable of realizing self-propelled motion. The motor features a projection structure at each end of the stator. Two piezoelectric ceramics are placed at one end for excitation, while a damping material is arranged at the other end for energy absorption. This design enables the motor to generate traveling waves without requiring fixed boundary conditions. The motor operates in the B(3,1) out-of-plane vibration mode to enhance the energy absorption capacity of the non-excited end and reduce its standing wave ratio (SWR). A finite element model of the motor is established to investigate its vibration characteristics. In addition, a novel method for estimating the standing wave ratio is proposed by using piezoelectric ceramics attached to the motor surface, replacing the traditional calculation approach. A prototype is fabricated to verify the feasibility of the proposed design. Experimental results show that the prototype achieves a minimum SWR of 1.81, a no-load speed of 42.1 mm/s, and a maximum output force of 0.465 N. These results confirm the feasibility of the proposed scheme and provide a new approach for the design of free-boundary traveling-wave linear ultrasonic motors. Full article

The paper presents the results of numerical and experimental investigations of a novel low-profile piezoelectric inertial linear actuator designed for a high-payload application. The actuator structure is based on a rectangular piezoelectric bimorph plate with centrally located trapezoidal toothed rings. The actuator operates in the second longitudinal vibration mode of the plate, which is excited by a sawtooth electric signal. Trapezoidal teeth are used to transfer longitudinal vibrations of the plate to the slider and, this way, generate linear motion. The use of trapezoidal teeth reduces the stumbling effect at high preload forces and as a result increases the actuator’s ability to operate under high preload forces and drive higher payloads. Numerical simulations indicated that the actuator exhibits a resonance frequency of 68.49 kHz, with the trapezoidal tooth achieving a maximum displacement amplitude of 188.25 µm at a voltage of 200 V_p-p. Furthermore, numerical analysis revealed that the trapezoidal tooth deflection in the out-of-plane direction under an axial load of 25 N reached 2.07 nm/N, demonstrating structural stability under high preload conditions. The results of experimental investigations have shown that the actuator can provide up to 75.16 mm/s at a linear motion speed of 200 V_p-p and an output force of 18.88 N at the same excitation signal amplitude. In addition, the 15 N load actuator was indicated to achieve a linear motion accuracy of 11.5 µm per step. Full article

A piezoelectric actuator (PEA) is a fundamental part of a high-precision motion system, yet its performance is critically constrained by inherent nonlinearities such as the velocity dead zone and hysteresis. To overcome these limitations and the associated time-varying dynamics, this study introduces a novel control framework for a dual-mode standing wave PEA. The framework integrates a Global Linearized Sparse Prediction (GLSP) model with an Adaptive Kalman Observer-based Model Predictive Control (AKOBMPC) strategy, specifically designed for velocity dead-zone compensation. The GLSP model employs Koopman operator theory to lift the complex, nonlinear electromechanical and contact dynamics into a linear invariant subspace. Incorporated with a deep learning-based structured pruning mechanism, the model achieves an effective balance between prediction accuracy and computational efficiency, facilitating real-time implementation. Leveraging this high-fidelity model, the AKOBMPC algorithm is developed to estimate unmeasurable disturbances and optimize the control sequence for precise velocity tracking. Experimental results demonstrate the GLSP model’s accurate prediction of system behavior under varying loads and excitation frequencies. The proposed controller effectively suppresses the velocity dead zone, achieving tracking errors within ±0.35 mm/s for a 40.00 mm/s trapezoidal reference and within ±0.50 mm/s for sinusoidal tracking. These results confirm the superior performance of the AKOBMPC scheme over conventional methods, offering a robust solution for high-precision velocity regulation in PEA system and contributing to the advancement of next-generation precision actuator. Full article

High-performance piezoelectric micromachined ultrasonic transducers (PMUTs) are crucial for portable medical imaging and sensing. The efficiency of advanced PMUTs relies on high-quality piezoelectric thin films and optimized device designs. However, variability in common piezoelectric thin films like Sc_xAl_1−xN (ScAlN) and PbZr_1−xTi_xO₃ (PZT) often leads to inaccurate material parameters—especially those derived from thick ceramics. To enhance simulation accuracy in standard designs affected by these inconsistencies, this work introduces an optimization framework combining first-principles calculations with multiphysics simulations. First, the intrinsic properties of PZT and ScAlN are analyzed through atomistic calculations, confirming that PZT, with its higher electromechanical coupling coefficient, is better suited for actuation. The parameters obtained from these calculations calibrate the finite-element model, addressing issues of missing or inaccurate data in commercial software libraries. Next, an efficient analytical acoustic-field model is developed. Compared to full-wave simulations in COMSOL, this model significantly reduces computational cost while maintaining accuracy, allowing for quicker scanning and optimization of large-array topologies. Additionally, results demonstrate that each individual hexagonal PMUT element outperforms a comparable circular element, achieving a peak SPL of 90.4 dB at 4.9 MHz versus 89.7 dB at 2.8 MHz. This higher acoustic output and operating frequency enable improved spatial resolution and sensitivity. This modeling approach, based on intrinsic material properties, provides a solid theoretical foundation for designing high-precision, low-power ultrasonic devices. Full article