Micro/Nanostructures in Sensors and Actuators, 2nd Edition

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".

Deadline for manuscript submissions: 31 March 2025 | Viewed by 1504

Special Issue Editors


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Guest Editor
School of Mechanical Engineering and Electronic Information, China University of Geosciences, Wuhan 430074, China
Interests: micro/nano fabrication; micro/nanofluidics; electrokinetics; BioMEMS; biosensor
Special Issues, Collections and Topics in MDPI journals

E-Mail Website
Guest Editor
School of Mechanical Engineering and Electronic Information, China University of Geosciences, Wuhan 430074, China
Interests: micro/nano fabrication; BioMEMS; micro/nanosensors
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

With the rapid development of micro- and nano-scale manufacturing technology and material science, sensors and actuators have been miniaturized and integrated into microsystems, especially for wearable or implantable devices. Micro/nanostructures in sensors and actuators leverage unique micro- and nano-scale phenomena that are significantly different from those in the macro-scale world. These micro/nanostructures have several merits that enable rapid, accurate, and robust analysis and control. Accordingly, this Special Issue seeks to showcase research papers and review articles that focus on (1) novel methodological developments in micro/nano structures used for sensors and actuators; (2) novel designs, fabrication, and applications of sensors and actuators (e.g., micro/nanofluidic sensors, wearable or implantable sensors and actuators, etc.).

We look forward to receiving your submissions!

Prof. Dr. Cong Wang
Prof. Dr. Shulan Jiang
Guest Editors

Manuscript Submission Information

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Keywords

  • micro/nano fabrication
  • micro/nano structure
  • sensors and actuators
  • MEMS
  • BioMEMS

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Published Papers (1 paper)

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Research

14 pages, 2526 KiB  
Article
A Novel Nano-Spherical Tip for Improving Precision in Elastic Modulus Measurements of Polymer Materials via Atomic Force Microscopy
by Tianyu Fu, Paul C. Uzoma, Xiaolei Ding, Pengyuan Wu, Oleksiy Penkov and Huan Hu
Micromachines 2024, 15(9), 1175; https://doi.org/10.3390/mi15091175 - 22 Sep 2024
Viewed by 1340
Abstract
Micro-nano-scale mechanical properties are vital for engineering and biological materials. The elastic modulus is generally measured by processing the force–indentation curves obtained by atomic force microscopy (AFM). However, the measurement precision is largely affected by tip shape, tip wear, sample morphology, and the [...] Read more.
Micro-nano-scale mechanical properties are vital for engineering and biological materials. The elastic modulus is generally measured by processing the force–indentation curves obtained by atomic force microscopy (AFM). However, the measurement precision is largely affected by tip shape, tip wear, sample morphology, and the contact model. In such research, it has been found that the radius of the sharp tip increases due to wear during contact scanning, affecting elastic modulus calculations. For flat-ended tips, it is difficult to identify the contact condition, leading to inaccurate results. Our research team has invented a nano-spherical tip, obtained by implanting focused helium ions into a silicon microcantilever, causing it to expand into a silicon nanosphere. This nano-spherical tip has the advantages of sub-micro size and a smooth spherical surface. Comparative tests of the elastic modulus measurement were conducted on polytetrafluoroethylene (PTFE) and polypropylene (PP) using these three tips. Overall, the experimental results show that our nano-spherical tip with a consistent tip radius, symmetrical geometric shape, and resistance to wear and contamination can improve precision in elastic modulus measurements of polymer materials. Full article
(This article belongs to the Special Issue Micro/Nanostructures in Sensors and Actuators, 2nd Edition)
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