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Journal: Materials, 2016
Volume: 9
Number: 1007

Article: Atomic Layer Deposition of Silicon Nitride Thin Films: A Review of Recent Progress, Challenges, and Outlooks
Authors: by Xin Meng, Young-Chul Byun, Harrison S. Kim, Joy S. Lee, Antonio T. Lucero, Lanxia Cheng and Jiyoung Kim
Link: https://www.mdpi.com/1996-1944/9/12/1007

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