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Journal: Coatings, 2018
Volume: 8
Number: 263

Article: Mechanical Properties of Zr–Si–N Films Fabricated through HiPIMS/RFMS Co-Sputtering
Authors: by Li-Chun Chang, Yu-Zhe Zheng and Yung-I Chen
Link: https://www.mdpi.com/2079-6412/8/8/263

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