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Precision Machining and Micro-/Nano Manufacturing
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Precision Machining and Micro-/Nano Manufacturing

A special issue of Materials (ISSN 1996-1944). This special issue belongs to the section "Manufacturing Processes and Systems".

Deadline for manuscript submissions: closed (20 April 2024) | Viewed by 4782

Special Issue Editors

Prof. Dr. Mingjun Chen

E-Mail Website
Guest Editor
1. State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin 150001, China
2. School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, China
Interests: ultra-precision machining technology and process equipment; micro/nano manufacturing technology and application; optical-component surface defect detection and control/repair technology
Special Issues, Collections and Topics in MDPI journals
Prof. Dr. Jian Cheng

E-Mail Website
Guest Editor
1. State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin 150001, China
2. School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, China
Interests: precision/ultra-precision processing technology; optical (sub)surface defect detection and integrity evaluation; laser-induced damage mechanism and precision mitigation
Special Issues, Collections and Topics in MDPI journals
Dr. Qi Liu

E-Mail Website
Guest Editor
Centre for Precision Manufacturing, Department of Design, Manufacturing and Engineering Management, University of Strathclyde, Glasgow G1 1XQ, UK
Interests: ultra-precision machining; micro/nano fabrication; advanced manufacturing technology and equipment; surface integrity evaluation; digital twin
Special Issues, Collections and Topics in MDPI journals
Prof. Dr. Xichun Luo

E-Mail Website
Guest Editor
Centre for Precision Manufacturing, Department of Design, Manufacturing and Engineering Management, University of Strathclyde, Glasgow G1 1XJ, UK
Interests: ultra-precision machining; hybrid micromachining; nanofabrication; digital manufacturing
Special Issues, Collections and Topics in MDPI journals
Dr. Ping Zhou

E-Mail Website
Guest Editor
State Key Laboratory of High-Performance Precision Manufacturing, School of Mechanical Engineering, Dalian University of Technology, Dalian 116024, China
Interests: manufacturing process modeling and simulation; ultra-precision machining technology; stress-free polishing methods; performance-orinted manufacturing
Dr. Shengfei Wang

E-Mail Website
Guest Editor
Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China
Interests: ultra-precision manufacturing technology; Process simulation

Special Issue Information

Dear Colleagues,

Precision machining and micro-/nano manufacturing are advanced manufacturing techniques that are used to produce complex and high-precision parts and components with very high tolerances. They play a significant role in various industries, including aerospace, automotive, biomedical, and optics industries, where the high performance and reliability of components are crucial. To keep pace with the rapid development of science and technology and meet the growing demand for high-precision components, it is essential to, on the one hand, develop more specific and dedicated precision and micro-/nano manufacturing platforms and technologies; and, on the other hand, gain more insight into the underlying relationship between the manufacturing processes and material deformation sciences, as well as the application performances. This Special Issue is dedicated to recent advances in research and development within the field of precision machining and micro-/ nano manufacturing. Papers that focus on, but are not limited to, the following topics are welcome:

  • Design of ultra-precision/precision machine tools and micro-nano manufacture platforms;
  • Ultra-precision manufacturing technologies, including cutting/milling/grinding/polishing;
  • Micro-/nano manufacturing technologies (i.e., lasers, FIB, EDM and AFM);
  • Additive manufacturing technologies;
  • Hybrid machining technologies, such as ultrasonic-assisted machining (UAM), vibration-assisted machining (VAM), laser-assisted machining (LAM), etc.;
  • Processing and characterisation of smart materials, multifunctional materials, nanomaterials and material-related issues on a micro-/nano scale;
  • Process modelling, simulation, and online monitoring;
  • Applications and performance evaluation of precision machined and micro-/nano manufactured components.

Prof. Dr. Mingjun Chen
Prof. Dr. Jian Cheng
Dr. Qi Liu
Prof. Dr. Xichun Luo
Dr. Ping Zhou
Dr. Shengfei Wang
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Materials is an international peer-reviewed open access semimonthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • ultra-precision/precision machining technologies: cutting/milling/grinding/polishing
  • ultra-precision/precision machine equipment design and assembly
  • ultra-precision/precision measurement
  • micro-nano machining
  • laser machining
  • electrical discharge machining
  • ultrasonic assisted machining
  • abrasive jet machining
  • surface generation mechanism
  • surface integrity evaluation
  • functional surface performance evaluation

Published Papers (6 papers)

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Research

16 pages, 6049 KiB  
Article
Enhancing the Machining Performance of Nomex Honeycomb Composites Using Rotary Ultrasonic Machining: A Finite Element Analysis Approach
by Tarik Zarrouk, Jamal-Eddine Salhi, Mohammed Nouari and Abdelilah Bouali
Materials 2024, 17(9), 2044; https://doi.org/10.3390/ma17092044 - 26 Apr 2024
Viewed by 312
Abstract
Nomex honeycomb composites (NHCs) are commonly used in various industrial sectors such as aerospace and automotive sectors due to their excellent material properties. However, when machining this type of structure, problems can arise due to significant cutting forces and unwanted cell vibrations. In [...] Read more.
Nomex honeycomb composites (NHCs) are commonly used in various industrial sectors such as aerospace and automotive sectors due to their excellent material properties. However, when machining this type of structure, problems can arise due to significant cutting forces and unwanted cell vibrations. In order to remedy these shortcomings, this study proposes to integrate RUM (rotary ultrasonic machining) technology, which consists of applying ultrasonic vibrations along the axis of rotation of the cutter. To fully understand the milling process by ultrasonic vibrations of the NHC structure, a 3D numerical finite element model is developed using Abaqus/Explicit software. The results of the comparative analysis between the components of the simulated cutting forces and those from the experiment indicate a close agreement between the developed model and the experimental results. Based on the developed numerical model, this study comprehensively analyzes the influence of the ultrasonic vibration amplitude on various aspects, such as stress distribution in the cutting zone, chip size, the quality of the machined surface and the components of the cutting force. Ultimately, the results demonstrate that the application of ultrasonic vibrations leads to a reduction of up to 50% in the components of the cutting force, as well as an improvement in the quality of the machined surface and a reduction in the size of chips. Full article
(This article belongs to the Special Issue Precision Machining and Micro-/Nano Manufacturing)
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14 pages, 2240 KiB  
Article
Novel Probability Density Function of Pad Asperity by Wear Effect over Time in Chemical Mechanical Planarization
by Seonho Jeong, Yeongil Shin, Jongmin Jeong, Seunghun Jeong and Haedo Jeong
Materials 2024, 17(8), 1817; https://doi.org/10.3390/ma17081817 - 15 Apr 2024
Viewed by 422
Abstract
Chemical mechanical planarization (CMP) reduces film thickness, eliminates step height, and achieves high levels of planarity in semiconductor manufacturing. However, research into its mechanisms is still in progress, and there are many issues to be resolved. To solve problems in CMP, it is [...] Read more.
Chemical mechanical planarization (CMP) reduces film thickness, eliminates step height, and achieves high levels of planarity in semiconductor manufacturing. However, research into its mechanisms is still in progress, and there are many issues to be resolved. To solve problems in CMP, it is necessary to understand the contact phenomenon that occurs at the pad–wafer interface, especially pad asperity. Moreover, understanding the non-uniform distribution of pad asperity, such as height and radius, is essential for predicting the material removal rate (MRR). In this study, based on the existing Greenwood–Williamson (GW) theory and probability density function (PDF), a modified mathematical model that includes changes in asperity distribution was developed and validated experimentally. The contact model proposed in this study included functions that calculated the time-dependent height and radius wear of the pad asperities. Specifically, the experimentally obtained values were compared with the values obtained by the model, and the comparison results were analyzed. Thereby, it was found that the contact model and MRR model considering the change in asperity wear and distribution due to CMP proposed in this study are in better agreement with the experimental results than the existing model, which shows that the MRR can be predicted by a mathematical model using the change in asperity distribution. Full article
(This article belongs to the Special Issue Precision Machining and Micro-/Nano Manufacturing)
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15 pages, 28948 KiB  
Article
Ultrafast Process Characterization of Laser-Induced Damage in Fused Silica Using Pump-Probe Shadow Imaging Techniques
by Zhichao Liu, Jian Zhang, Shengfei Wang, Feng Geng, Qinghua Zhang, Jian Cheng, Mingjun Chen and Qiao Xu
Materials 2024, 17(4), 837; https://doi.org/10.3390/ma17040837 - 09 Feb 2024
Viewed by 618
Abstract
This study delves into the intricate dynamics of laser-induced damage in fused silica using a time-resolved pump-probe (TRPP) shadowgraph. Three typical ultra-fast processes, laser-induced plasma evolution, shockwave propagation and material fracture splashing, were quantitatively investigated. The results indicate that the diameter of plasma [...] Read more.
This study delves into the intricate dynamics of laser-induced damage in fused silica using a time-resolved pump-probe (TRPP) shadowgraph. Three typical ultra-fast processes, laser-induced plasma evolution, shockwave propagation and material fracture splashing, were quantitatively investigated. The results indicate that the diameter of plasma is proportional to the pulse laser energy and increases linearly during the pulse laser duration with an expansion rate of approximately 6 km/s. The maximum shockwave velocity on the air side is 9 km/s, occurring at the end of the pulse duration, and then rapidly decreases due to air resistance, reaching approximately 1 km/s around a 300 ns delay. After hundreds of nanoseconds, there is a distinct particle splashing phenomenon, with the splashing particle speed distribution ranging from 0.15 km/s to 2.0 km/s. The particle sizes of the splashing particles range from 4 μm to 15 μm. Additionally, the smaller the delay, the faster the speed of the splashing particles. Overall, TRPP technology provides crucial insights into the temporal evolution of laser-induced damage in fused silica, contributing to a comprehensive understanding essential for optimizing the performance and safety of laser systems. Full article
(This article belongs to the Special Issue Precision Machining and Micro-/Nano Manufacturing)
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13 pages, 7796 KiB  
Article
The Characterization of Laser-Induced Particles Generated from Aluminum Alloy in High Power Laser Facility
by Xinxiang Miao, Guorui Zhou, Qihua Zhu, Xiaodong Jiang, Yong Jiang, Caizhen Yao, Yilan Jiang, Longfei Niu, Siheng Xiang and Jiaxuan Chen
Materials 2023, 16(23), 7415; https://doi.org/10.3390/ma16237415 - 29 Nov 2023
Viewed by 558
Abstract
Aerosol particle contamination in high-power laser facilities has become a major cause of internal optical component damage resistance and service life reduction. In general, contaminating particles primarily originate from stray light; therefore, it is crucial to investigate the mechanism and dynamics of the [...] Read more.
Aerosol particle contamination in high-power laser facilities has become a major cause of internal optical component damage resistance and service life reduction. In general, contaminating particles primarily originate from stray light; therefore, it is crucial to investigate the mechanism and dynamics of the dynamic contaminating particle generation to control the cleanliness level. In this study, corresponding research was conducted on experiments and theory. We investigated the particle generation and surface composition modification under the action of a laser. We employed various surface analytical methods to identify the possible variations in the aluminum alloy surface during laser irradiations. A theoretical model for particle ejection from aluminum alloy surfaces was established by taking the adhesion force and laser cleaning force (due to thermal expansion) into account. The results show that the threshold energies for contamination particle generation and damage are around 0.1 and 0.2 J/cm2, respectively. Subsurface impurities are the primary source of particles, and particle adhesion density is related to surface roughness. Pollution particle generation and splashing processes include temperature increases, phase changes, impact diffusion, and adhesion. The results provide a reference for the normal operation of high-energy laser systems. The results also suggest that the laser irradiation pretreatment of aluminum alloy surfaces is essential to improve the cleanliness level. Full article
(This article belongs to the Special Issue Precision Machining and Micro-/Nano Manufacturing)
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17 pages, 6664 KiB  
Article
Experimental Investigation of Tool Wear and Machining Quality of BTA Deep-Hole Drilling in Low-Carbon Alloy Steel SA-5083
by Xubo Li, Chuanmiao Zhai, Wenqi He, Ye Lu and Bodong Zhang
Materials 2023, 16(20), 6686; https://doi.org/10.3390/ma16206686 - 14 Oct 2023
Viewed by 890
Abstract
Nuclear power tube plates are made from the high-strength, low-carbon alloy steel SA-5083, which has high values of toughness and plasticity, though it is forged with poor consistency and entails serious work hardening. It requires a large number of deep holes with a [...] Read more.
Nuclear power tube plates are made from the high-strength, low-carbon alloy steel SA-5083, which has high values of toughness and plasticity, though it is forged with poor consistency and entails serious work hardening. It requires a large number of deep holes with a high machining accuracy and high surface quality to be processed. However, the quality of the processed holes is often not up to the standard of the Boring and Trepanning Association (BTA) for the deep-hole drilling of tube plates; this has led to deep-hole processing becoming a bottleneck in the manufacture of steam generators for the main equipment of nuclear power islands. The variation laws of the diameter, roundness, perpendicularity, roughness, microhardness, and residual stress in relation to the feed, speed, and drilling depth are explored in the macro- and micro-dimensions; also explored is the wear morphology of BTA drills. The internal influence mechanisms between them are revealed in order to provide a scientific basis for the control of surface quality and machining accuracy as well as the optimization of process parameters. Our research results indicate that the guide block wear is mainly concentrated at the top 1–2 mm and that the drilling depth and feed have a great influence on the machining diameter. The hole wall roughness is between 0.3 and 0.6 μm, the maximum microhardness is about 2.15 times the hardness of the matrix material, and the residual stress is compressive stress. With increases in the feed and drilling depth, the hole diameter and the roughness increase. With an increase in the speed, the roughness decreases and the compressive stress of the BTA deep-hole drilling wall increases. Full article
(This article belongs to the Special Issue Precision Machining and Micro-/Nano Manufacturing)
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17 pages, 25683 KiB  
Article
A Comprehensive Understanding of Knife Cutting: Effects of Hardness, Blade Angle and the Micro-Geometry of Blade Edge on the Cutting Performance
by Qinyi Zhang, Feng Liu, Dong Wu, Shikang Qu, Wei Liu and Zhangxiao Chen
Materials 2023, 16(15), 5375; https://doi.org/10.3390/ma16155375 - 31 Jul 2023
Viewed by 1243
Abstract
The cutting performance of steel blades is an eternal, attractive topic in the knife industry. It is a complicated process to cut up materials because it usually involves the contact mechanics of the material been cut, the geometry and roughness of the blade [...] Read more.
The cutting performance of steel blades is an eternal, attractive topic in the knife industry. It is a complicated process to cut up materials because it usually involves the contact mechanics of the material been cut, the geometry and roughness of the blade edge and the hardness and wear resistance of the blade steel. Therefore, a comprehensive analysis is required to evaluate the cutting performance of knife blades. In this study, such an analysis was conducted based on a quantitative model to describe the cutting depth of paper cards containing SiO2 particles by steel blades, and major contributing factors were summarized. The effect of the micro-geometries of blade edges was thoroughly discussed, and a geometry factor ξ for the micro-geometry of a blade edge was introduced into the model. The experimental results indicated that mechanical processing could produce a rough blade edge and a higher ξ value, accordingly. A similar effect was caused by the carbides in the martensitic steels for blades, and the ξ value was found to increase linearly with the volumetric fraction of the carbides. The extraordinary cutting behavior of the 3V blade implied that fine coherent carbides may result in an efficient improvement (40–50%) in the total cutting depth. Full article
(This article belongs to the Special Issue Precision Machining and Micro-/Nano Manufacturing)
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