Advanced Sensing Technology for Moving-Magnet Planar Motor
A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Physical Sensors".
Deadline for manuscript submissions: 30 June 2024 | Viewed by 2745
Special Issue Editors
Interests: magnetic levitation system; motor design and control; control theory; robotics; Internet of Things
Special Issue Information
Dear Colleagues,
Moving-magnet planar motors have features such as magnetic levitation, a direct-drive mechanism, a compact structure, a lightweight mover, a wireless mover, high reliability, high speed, and a high potential for ultra-precision motion. Therefore, this motor has gained increasing attention and has promising applications in precision and ultra-precision positioning systems as well as high-speed motion systems, especially those that pose extremely demanding environments, such as vacuum environments and cleanrooms. The typical applications of this motor are found in semiconductor lithography, transport systems, etc. The prerequisite for ultra-precise motion demands advanced sensing technology for obtaining submicron or even nanoscale position resolution under different travel ranges. However, achieving advanced sensing technology with a moving-magnet planar motor is a highly challenging task as conventional sensing technology is not appropriate for this emerging motor, which has a specifically structured wireless mover and 6-DOF motion, meaning six position signals need to be detected, and high position resolution demands need to be met for sensing. This Special Issue aims to address all types of methodologies, data processing, and testing techniques for advanced sensing technology for application in moving-magnet planar motors. Both original manuscripts and review manuscripts are welcome.
Topics of interest include, but are not limited to:
- Advanced sensing frameworks for moving-magnet planar motors;
- Advanced sensors for moving-magnet planar motors;
- Sensor error modeling and online calibration for moving-magnet planar motors;
- Sensing circuits or architectures for moving-magnet planar motors;
- Sensing signal processing for moving-magnet planar motors;
- Other emerging sensing applications for moving-magnet planar motors.
Prof. Dr. Guang-Zhong Cao
Dr. Su-Dan Huang
Guest Editors
Manuscript Submission Information
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