MEMS Devices for More Compact and Low Cost Sensing Applications
A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Physical Sensors".
Deadline for manuscript submissions: closed (31 October 2023) | Viewed by 2171
Special Issue Editors
Interests: analog and mixed-signal integrated circuits; integrated sensors; integration of MEMS with electronics; MEMS sensors and actuators; microelectromechanical systems (MEMS); micro-fabrication; radiofrequency integrated circuits (RFICs); resonant MEMS; sensor interface circuits; ultra-wideband impulse radio (IR-UWB)
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Special Issue Information
Dear Colleagues,
The democratization of MEMS devices due to the reduction of development and fabrication cosst and compact implementations has led to the development of new applications for MEMS devices.
MEMS devices are very versatile and allow the detection of a multitude of phenomena in various domains such as gas sensing (pressure, presence of gas), liquid sensing (pressure, velocity, leaks, presence of chemicals), wave sensing (microphones, ultrasound monitoring, gravimetry, manipulation of THz waves), displacement (accelerometers, gyroscopes), and electrical signals (power, amplitude, phase).
Thus, this Special Issue is addressed to all types of MEMS devices that are proposed for conventional and new sensing applications.
Prof. Dr. Frederic Nabki
Dr. Mathieu Gratuze
Guest Editors
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Keywords
- MEMS
- sensors
- transducers
- micro-fabrication
- piezoelectricity
- capacitive sensing
- resistive sensing
- thermal sensing
- chemical sensing
- ultrasound
- microphones
