Properties of SiCN Films Relevant to Dental Implant Applications
Abstract
:1. Introduction
2. Materials and Methods
2.1. Sample Preparation
2.2. SiCN Coating
2.3. Characterization Techniques
2.3.1. X-ray Photoelectron Spectroscopy (XPS) Surface Composition Analysis
2.3.2. Deposition Rate Determination
2.3.3. Refractive Index Measurement
2.3.4. Contact Angles Measurement
2.3.5. Corrosion Rate Determination
3. Results and Discussion
4. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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SiH4 (sccm) | NH3 (sccm) | CH4 (sccm) | Si: (%) | N: (%) | C: (%) | O: (%) | Deposition Rate (nm/min) | Contact Angle (°) | Corrosion Rate (ang/hour) | Refractive Index (n) | ||
---|---|---|---|---|---|---|---|---|---|---|---|---|
pH 2 | pH 7 | pH 10 | ||||||||||
300 | 2 | 100 | 60.09 | 7.37 | 28.54 | 4 | 5.7 | 63.7 | 0.12 | 0.01 | 0.14 | 2.5 |
300 | 4 | 100 | 58.73 | 10.41 | 28.85 | 2.01 | 6 | 65.4 | 0.73 | 0.02 | 0.63 | 2.44 |
300 | 6 | 100 | 57.1 | 12.04 | 26.16 | 4.7 | 6.1 | 68.7 | 1.71 | 0.95 | 1.32 | 2.34 |
300 | 8 | 100 | 52.43 | 17.50 | 25.26 | 4.8 | 7 | 71 | 1.71 | 1.42 | 1.45 | 2.3 |
250 | 8 | 100 | 51.73 | 17.90 | 26.17 | 4.2 | - | - | - | - | - | - |
250 | 8 | 150 | 46.55 | 17.52 | 31.63 | 4.3 | - | - | - | - | - | - |
250 | 8 | 200 | 48.96 | 13.91 | 32.53 | 4.6 | - | - | - | - | - | - |
300 | 8 | 100 | 52.43 | 17.50 | 25.26 | 4.8 | - | - | - | - | - | - |
250 | 8 | 100 | 51.73 | 17.90 | 26.17 | 4.2 | - | - | - | - | - | - |
200 | 8 | 100 | 49.71 | 19.53 | 27.58 | 3.18 | - | - | - | - | - | - |
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Xia, X.; Chiang, C.-C.; Gopalakrishnan, S.K.; Kulkarni, A.V.; Ren, F.; Ziegler, K.J.; Esquivel-Upshaw, J.F. Properties of SiCN Films Relevant to Dental Implant Applications. Materials 2023, 16, 5318. https://doi.org/10.3390/ma16155318
Xia X, Chiang C-C, Gopalakrishnan SK, Kulkarni AV, Ren F, Ziegler KJ, Esquivel-Upshaw JF. Properties of SiCN Films Relevant to Dental Implant Applications. Materials. 2023; 16(15):5318. https://doi.org/10.3390/ma16155318
Chicago/Turabian StyleXia, Xinyi, Chao-Ching Chiang, Sarathy K. Gopalakrishnan, Aniruddha V. Kulkarni, Fan Ren, Kirk J. Ziegler, and Josephine F. Esquivel-Upshaw. 2023. "Properties of SiCN Films Relevant to Dental Implant Applications" Materials 16, no. 15: 5318. https://doi.org/10.3390/ma16155318