Roll-to-Roll SiOx Synthesis on Polyethylene Terephthalate Film by Atmospheric-Pressure Plasma-Assisted Chemical Vapor Deposition

Kusano, Yukihiro; Bredgaard, Kim; Pan, Huifang; Bardenstein, Alexander Leo

doi:10.3390/ma17194694

Open AccessArticle

Roll-to-Roll SiOx Synthesis on Polyethylene Terephthalate Film by Atmospheric-Pressure Plasma-Assisted Chemical Vapor Deposition

by

Yukihiro Kusano

^1,2,*

,

Kim Bredgaard

³,

Huifang Pan

³ and

Alexander Leo Bardenstein

¹

Danish Technological Institute, 2630 Taastrup, Denmark

²

Department of Marine Resources and Energy, Tokyo University of Marine Science and Technology, Shinagawa, Tokyo 108-8477, Japan

³

Vetaphone ApS, 6000 Kolding, Denmark

^*

Author to whom correspondence should be addressed.

Materials 2024, 17(19), 4694; https://doi.org/10.3390/ma17194694

Submission received: 21 August 2024 / Revised: 16 September 2024 / Accepted: 18 September 2024 / Published: 24 September 2024

(This article belongs to the Special Issue Advances in Plasma and Laser Engineering (Second Edition))

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Abstract

Silicon oxide (SiOx) coatings are attracting significant attention and are widely used in industrial applications. They can be prepared by plasma-assisted chemical vapor deposition (PACVD). PACVD at atmospheric pressure (AP-PACVD) is often employed to synthesize SiOx coatings, but it has generally not been scaled up to an industrially viable level. In the present work, a SiOx coating was continuously deposited onto a polyethylene terephthalate film using industrial-scale roll-to-roll type AP-PACVD. 1,1,3,3-Tetramethyldisiloxane (TMDSO) and tetraethoxysilane (TEOS) were selected as precursors. The elemental compositions and chemical structures of the SiOx coatings were characterized, and oxygen and water-vapor transmission rates were measured. The SiOx coating using TEOS exhibited better barrier properties than that using TMDSO, corresponding to the high oxygen content, high SiO₂ content, and high siloxane network content in the SiOx coating.

Keywords: silicon oxide; atmospheric-pressure plasma-assisted chemical vapor deposition; roll-to-roll; polyethylene terephthalate; X-ray photoelectron spectroscopy; Fourier transform infrared spectroscopy

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MDPI and ACS Style

Kusano, Y.; Bredgaard, K.; Pan, H.; Bardenstein, A.L. Roll-to-Roll SiOx Synthesis on Polyethylene Terephthalate Film by Atmospheric-Pressure Plasma-Assisted Chemical Vapor Deposition. Materials 2024, 17, 4694. https://doi.org/10.3390/ma17194694

AMA Style

Kusano Y, Bredgaard K, Pan H, Bardenstein AL. Roll-to-Roll SiOx Synthesis on Polyethylene Terephthalate Film by Atmospheric-Pressure Plasma-Assisted Chemical Vapor Deposition. Materials. 2024; 17(19):4694. https://doi.org/10.3390/ma17194694

Chicago/Turabian Style

Kusano, Yukihiro, Kim Bredgaard, Huifang Pan, and Alexander Leo Bardenstein. 2024. "Roll-to-Roll SiOx Synthesis on Polyethylene Terephthalate Film by Atmospheric-Pressure Plasma-Assisted Chemical Vapor Deposition" Materials 17, no. 19: 4694. https://doi.org/10.3390/ma17194694

APA Style

Kusano, Y., Bredgaard, K., Pan, H., & Bardenstein, A. L. (2024). Roll-to-Roll SiOx Synthesis on Polyethylene Terephthalate Film by Atmospheric-Pressure Plasma-Assisted Chemical Vapor Deposition. Materials, 17(19), 4694. https://doi.org/10.3390/ma17194694

Note that from the first issue of 2016, this journal uses article numbers instead of page numbers. See further details here.

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Roll-to-Roll SiOx Synthesis on Polyethylene Terephthalate Film by Atmospheric-Pressure Plasma-Assisted Chemical Vapor Deposition

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