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Materials
Volume 18
Issue 1
10.3390/ma18010211
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Journal: Materials, 2025
Volume: 18
Number: 211

Article: Temperature Uniformity Control of 12-Inch Semiconductor Wafer Chuck Using Double-Wall TPMS in Additive Manufacturing
Authors: by Sohyun Park, Jaewook Lee, Seungyeop Lee, Jihyun Sung, Hyungug Jung, Ho Lee and Kunwoo Kim
Link: https://www.mdpi.com/1996-1944/18/1/211

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