Effect of Water Vapor and Surface Morphology on the Low Temperature Response of Metal Oxide Semiconductor Gas Sensors
Abstract
:1. Introduction
2. Results and Discussion
2.1. Sensing Layers and Surface Morphology
2.2. Gas Sensing Properties
2.2.1. Humidity Response
2.2.2. Response to Acid- and Base-Forming Gases
2.2.3. Response to Non-Acid and Non-Base Forming Gases
2.3. Formation of BET Adsorbates
2.4. Adsorption and Desorption Kinetics
Process | Kinetic Parameter | Flat Surface | Nano-Granular |
---|---|---|---|
Langmuir adsorption | kads | 1 × 10−4 | 1 × 10−4 |
Langmuir desorption | kdes | 0.2 kads | 0.2 kads |
BET adsorption on substrate | α | 1 × 10−4 | 1 × 10−4 |
BET desorption from substrate | 0.2 α | 0.35 α | |
BET adsorption onto pre-adsorbed H2O | γ | 0.35 α | 0.5 α |
BET desorption from pre-adsorbed H2O | δ | 8.75 α | 15 α |
3. Experimental Section
4. Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
Appendix: Kinetics of BET Multi-Layer Adsorption
A.1. Langmuir Kinetics
A.2. BET Kinetics
References
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Maier, K.; Helwig, A.; Müller, G.; Hille, P.; Eickhoff, M. Effect of Water Vapor and Surface Morphology on the Low Temperature Response of Metal Oxide Semiconductor Gas Sensors. Materials 2015, 8, 6570-6588. https://doi.org/10.3390/ma8095323
Maier K, Helwig A, Müller G, Hille P, Eickhoff M. Effect of Water Vapor and Surface Morphology on the Low Temperature Response of Metal Oxide Semiconductor Gas Sensors. Materials. 2015; 8(9):6570-6588. https://doi.org/10.3390/ma8095323
Chicago/Turabian StyleMaier, Konrad, Andreas Helwig, Gerhard Müller, Pascal Hille, and Martin Eickhoff. 2015. "Effect of Water Vapor and Surface Morphology on the Low Temperature Response of Metal Oxide Semiconductor Gas Sensors" Materials 8, no. 9: 6570-6588. https://doi.org/10.3390/ma8095323