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Journal: Micromachines, 2022
Volume: 13
Number: 2250
Article:
An SOI-Structured Piezoresistive Differential Pressure Sensor with High Performance
Authors:
by
Zebin Xu, Jiahui Yan, Meilin Ji, Yongxin Zhou, Dandan Wang, Yuanzhi Wang, Zhihong Mai, Xuefeng Zhao, Tianxiang Nan, Guozhong Xing and Songsong Zhang
Link:
https://www.mdpi.com/2072-666X/13/12/2250
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