Micromachines, Volume 13, Issue 12

This paper presents a novel bimorph Piezoelectric Micromachined Ultrasonic Transducer (PMUT) fabricated with 8-inch standard CMOS-compatible processes. The bimorph structure consists of two layers of 20% scandium-doped aluminum nitride (Sc_0.2Al_0.8N)...

Thin-film transistors have been extensively developed due to their process merit: high compatibility with various substrates, large-area processes, and low-cost processes. Despite these advantages, most efforts for thin-film transistors still remain...

There is a growing technological interest in combining biological neuronal networks with electronic ones, specifically for biological computation, human–machine interfacing and robotic implants. A major challenge for the development of these technolo...

In this paper, we use terahertz combined with metamaterial technology as a powerful tool to identify analytes at different concentrations. Combined with the microfluidic chip, the experimental measurement can be performed with a small amount of analy...

Most organic solvents are colorless liquids, usually stored in sealed containers. In many cases, their identification depends on the appropriate description on the container to prevent mishandling or mixing with other materials. Although modern labor...

When combined with diverse sensors, soft robots significantly improve their functionalities and intelligence levels. However, most of the existing soft sensors require complex signal analysis devices or algorithms, which severely increase the complex...

In this paper, physicochemical properties of pure Y₂O₃ and samarium (Sm)-doped Y₂O₃ transparent ceramics obtained via arc plasma melting are presented. Yttria powder with a selected molar fraction of Sm was first synthesized by a solid-state reaction...

A method based on the photographic recording of the power distribution laterally diffused by cationic-network (CN) hydrogel waveguides is first checked against the well-established cut-back method and then used to determine the different contribution...

A MEMS thin-film getter–heater unit has been previously proposed for the vacuum packaging of a Micro-Electro-Mechanical System (MEMS) device, where the floating structure (FS) design is found to be obviously more power-efficient than the solid...

The research on wireless communication demands technology-based efficient radio frequency devices. A printed monopole dual-band antenna is designed and presented. The presented antenna exhibits a promising response with improved bandwidth and gain. T...

This paper presents a piezoresistive differential pressure sensor based on a silicon-on-insulator (SOI) structure for low pressure detection from 0 to 30 kPa. In the design phase, the stress distribution on the sensing membrane surface is simulated,...

An experiment using water-assisted millisecond laser trepanning on superalloy GH4220 was carried out, and the effects of pulse energy on the hole entrance morphology, diameter, roundness, cross-section morphology, taper angle, sidewall roughness, and...

Networks-on-Chip (NoCs) have become the de-facto on-chip interconnect for multi/manycore systems. A typical NoC router is made up of buffers used to store packets that are unable to advance to their desired destination. However, buffers consume signi...

Over the last several years, two-photon polymerization has been a popular fabrication approach for photonic crystals due to its high spatial resolution. One-dimensional photonic crystals with photonic bandgap reflectivities over 90% have been demonst...

The optimal groove design of a MEMS piezoresistive pressure sensor for ultra-low pressure measurement is proposed in this work. Two designs of the local groove and one design of the annular groove are investigated. The sensitivity and linearity of th...

The rapid electrokinetic patterning (REP) technique has been demonstrated to enable dynamic particle manipulation in biomedical applications. Previous studies on REP have generally considered particles with a size less than 5 μm. In this study, a...

Thanks to high-current densities and cutoff frequencies, short-channel length AlGaN/GaN HEMTs are a promising technology solution for implementing RF power amplifiers in 5G front-end modules. These devices, however, might suffer from current collapse...

In-process monitoring of weld penetration depth is possible with optical coherence tomography (OCT). The weld depth can be identified with OCT by statistical signal processing of the raw OCT signal and keyhole mapping. This approach is only applicabl...

One-dimensional nanobeam mass sensors offer an unprecedented ability to measure tiny masses or even the mass of individual molecules or atoms, enabling many interesting applications in the fields of mass spectrometry and atomic physics. However, curr...

The development of non-invasive optoelectronic technologies for human blood monitoring is one of the important research areas for medicine. A critical analysis of optoelectronic methods of blood research and the micromechanical systems based on them...

Population growth increases the challenge of meeting basic human needs, such as water, a limited resource. Consumption habits and water pollution have compromised natural resources to unsustainable levels. Sustainable effluent treatment practices, su...

In this article, a triple-band quad-element stacked multiple-input–multiple-output (MIMO) antenna is proposed for sensing applications. Each radiating element of the presented MIMO antenna consists of a diagonally truncated square patch, which...

Paper-based microfluidic systems have emerged as one of the most promising technologies for developing point-of-care diagnostic platforms (POCT) for detecting and monitoring various diseases. Saliva is a non-invasive biofluid easily collected, transp...

In recent years, many research achievements in the field of anodic aluminum oxide (AAO) membranes can be observed. Nevertheless, it is still an interesting research topic due to its high versatility and applications in various fields, such as templat...

Endovascular surgery is a high-risk operation with limited vision and intractable guidewires. At present, endovascular surgery robot (ESR) systems based on force feedback liberates surgeons’ operation skills, but it lacks the ability to combine...

Assessing cortisol levels in human bodies has become essential to diagnose heart failure (HF). In this work, we propose a salivary cortisol detection strategy as part of an easily integrable lab-on-a-chip for detection of HF biomarkers. Our developed...

Graphitic carbon nitride (G-C3N4) was synthesized through the direct combustion of urea in the air. The CoS-Co₂O₃/G-C3N4 composite was synthesized via the hydrothermal method of G-C3N4 using cobalt salts. The morphological and chemical structures wer...

This research presents the design of time-modulated antenna arrays with UWB performance. The antenna arrays consider a linear topology with eight UWB disk-notch patch antennas. The technological problem is to find out the optimum antenna positions an...

Low-cost diagnostic tools for point-of-care immunoassays, such as the paper-based enzyme-linked immunoassay (ELISA), have become increasingly important, especially so in the recent COVID-19 pandemic. ELISA is the gold-standard antibody/antigen sensin...

3D printing is a growing technology being incorporated into almost every industry. Although it has obvious advantages, such as precision and less fabrication time, it has many shortcomings. Although several attempts were made to monitor the errors, m...

Resonant Bessel-beam launchers are low-cost, planar, miniaturized devices capable of focusing electromagnetic radiation in a very efficient way in various frequency ranges, with recent increasing interest for microwave and millimeter-wave application...

In optical computing machines, data can be transmitted by optical vortices, and the information can be encoded by their topological charges. Thus, some optical mechanisms are needed for performing simple arithmetic operations with the topological cha...

Charged droplets driven by Coulomb force are an important part of a droplet-based micro reactor. In this study, we realized the rapid oscillatory motion of droplets both in oil and on superhydrophobic surface by injecting charges through corona disch...

To ensure the consistency of laser engraving depth in chemical milling, the precise control of 5-axis variable-angle laser engraving was the focus of research. Based on the energy conservation principle, the depth model of 5-axis variable-angle laser...

A design integrating multiple cladding mode strippers used in fiber laser architectures into a single device is proposed. This approach can increase the compactness of fiber lasers, thus contributing to industrial laser processing applications. By of...

At or above room temperature, metal electrodeposits often feature coarse grains, uneven microstructure and high roughness with abnormal bulges. In this study, copper electrodeposits with abnormal properties were prepared in a sulfate bath at a low te...

Spin-transfer torque magnetic random-access memory (STT-MRAM) has several desirable features, such as non-volatility, high integration density, and near-zero leakage power. However, it is challenging to adopt STT-MRAM in a wide range of memory applic...

The risk of fire in the chemical industry’s production process is fatal. Gel foam has been widely employed in petroleum storage tanks, oil pools, and other petrochemical equipment for fire extinguishing and thermal protection. Recently, nanopar...

The Internet of Things (IoT) has a great number of sensor nodes distributed in different environments, and the traditional approach uses batteries to power these nodes: however, the resultant huge cost of battery replacement means that the battery-po...

Bowel sounds contain some important human physiological parameters which can reflect information about intestinal function. In this work, in order to realize real-time monitoring of bowel sounds, a portable and wearable bowel sound electronic monitor...

Recently, there has been increasing attention toward inhaled nanoparticles (NPs) to develop inhalation therapies for diseases associated with the pulmonary system and investigate the toxic effects of hazardous environmental particles on human lung he...

Increasing numbers of antennas are being placed inside laptop screen bezels. Connections between antennas and laptop bases have become challenging owing to space limitations. Thus, this paper proposes a flexible low-loss thin flimsy stripline structu...

A novel hydrogen sensor based on a negative temperature coefficient (NTC) thermistor with Pt-loaded WO₃/SiO₂ coating is proposed and demonstrated experimentally. When the Pt-loaded WO₃/SiO₂ film is exposed to the mixture of air and H₂, the exothermic...

The targeted delivery of cancer immunotherapies has increased noticeably in recent years. Recent advancements in immunotherapy, particularly in blocking the immune checkpoints (ICs) axis, have shown favorable treatment outcomes for multiple types of...

In the placenta, substances such as nutrients, oxygen, and by-products are exchanged between the mother and the fetus, and the proper formation of the placenta determines the success of pregnancy, including the growth of the fetus. Preeclampsia is an...

A novel method for ultra-sensitive and ultra-fast temperature sensing has been successfully implemented by cascading Saganc rings to generate the Vernier effect and doing the same dispersive fibers to achieve the optical time-stretching effect. This...

Wearable devices are a new class of healthcare monitoring devices designed for use in close contact with the patient’s body. Such devices must be flexible to follow the contours of human anatomy. With numerous potential applications, a wide var...

Low aperture ratio is a problem in the conventional dual-view integral imaging (DVII) display using a point light source array. A high-aperture-ratio DVII display using a gradient width point light source array is reported in this work. The elemental...

The monitoring of head posture is crucial for interactive learning, in order to build feedback with learners’ attention, especially in the explosion of digital teaching that occurred during the current COVID-19 pandemic. However, conventional m...

This work investigates the impacts of structural parameters on the performances of p-GaN/AlGaN/GaN HEMT-based ultraviolet (UV) phototransistors (PTs) using Silvaco Atlas. The simulation results show that a larger Al content or greater thickness for t...