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Journal: Micromachines, 2022
Volume: 13
Number: 758
Article:
Polyimide-Based High-Performance Film Bulk Acoustic Resonator Humidity Sensor and Its Application in Real-Time Human Respiration Monitoring
Authors:
by
Yusi Zhu, Pan Xia, Jihang Liu, Zhen Fang, Lidong Du and Zhan Zhao
Link:
https://www.mdpi.com/2072-666X/13/5/758
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