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Micromachines, Volume 14, Issue 3

2023 March - 212 articles

Cover Story: Core–shell particles are micro- or nanoparticles with solid, liquid, or gas cores encapsulated by protective solid shells. The unique composition of core and shell materials imparts smart properties on the particles. Core–shell particles are gaining increasing attention as tuneable and versatile carriers for pharmaceutical and biomedical applications including targeted drug delivery, controlled drug release, and biosensing. View this paper
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Articles (212)

  • Article
  • Open Access
6 Citations
4,652 Views
10 Pages

Dielectrophoresis-Based Selective Droplet Extraction Microfluidic Device for Single-Cell Analysis

  • Seito Shijo,
  • Daiki Tanaka,
  • Tetsushi Sekiguchi,
  • Jun-ichi Ishihara,
  • Hiroki Takahashi,
  • Masashi Kobayashi and
  • Shuichi Shoji

22 March 2023

We developed a microfluidic device that enables selective droplet extraction from multiple droplet-trapping pockets based on dielectrophoresis. The device consists of a main microchannel, five droplet-trapping pockets with side channels, and drive el...

  • Article
  • Open Access
9 Citations
3,975 Views
12 Pages

22 March 2023

At present, multi-disease fundus image classification tasks still have the problems of small data volumes, uneven distributions, and low classification accuracy. In order to solve the problem of large data demand of deep learning models, a multi-dise...

  • Article
  • Open Access
18 Citations
2,525 Views
15 Pages

Robust, Superhydrophobic Aluminum Fins with Excellent Mechanical Durability and Self-Cleaning Ability

  • Wenbo Su,
  • Xiangyou Lu,
  • Yunxiang Shu,
  • Xianshuang Liu,
  • Wen Gao,
  • Jianjie Yao,
  • Zhuang Niu and
  • Yuanlai Xie

22 March 2023

The self-cleaning ability of superhydrophobic metal surfaces has attracted extensive attention. The preparation of superhydrophobic material using the coating method is a common processing method. In this experiment, aluminum fins were processed by l...

  • Article
  • Open Access
4 Citations
2,592 Views
20 Pages

Molecular Dynamics Simulation Study on the Influence of the Abrasive Flow Process on the Cutting of Iron-Carbon Alloys (α-Fe)

  • Junye Li,
  • Zhenguo Zhao,
  • Junwei Li,
  • Fujun Xiao,
  • Rongxian Qiu,
  • Hongcai Xie and
  • Wenqing Meng

22 March 2023

The plastic deformation behavior and microstructural changes in workpieces during ultra-precision machining have piqued the interest of many researchers. In this study, a molecular dynamics simulation of nano-cutting iron-carbon alloy (α-Fe) is...

  • Article
  • Open Access
10 Citations
4,516 Views
11 Pages

A Piezoelectric MEMS Speaker with a Combined Function of a Silent Alarm

  • Qi Wang,
  • Tao Ruan,
  • Qingda Xu,
  • Zhiyong Hu,
  • Bin Yang,
  • Minmin You,
  • Zude Lin and
  • Jingquan Liu

22 March 2023

To explore the versatility of speakers, a piezoelectric micro-electro-mechanical system (MEMS) speaker combining the function of a silent alarm is proposed, which mainly comprises a lead zirconate titanate (PZT) actuation layer and a rigid–flex...

  • Article
  • Open Access
17 Citations
2,518 Views
12 Pages

22 March 2023

Ta2O5 coatings were created using micro-arc discharges (MDs) during anodization on a tantalum substrate in a sodium phosphate electrolyte (10 g/L Na3PO4·10H2O). During the process, the size of MDs increases while the number of MDs decreases. T...

  • Article
  • Open Access
1 Citations
2,888 Views
17 Pages

Fabrication of Chemofluidic Integrated Circuits by Multi-Material Printing

  • Alexander Kutscher,
  • Paula Kalenczuk,
  • Mohammed Shahadha,
  • Stefan Grünzner,
  • Franziska Obst,
  • Denise Gruner,
  • Georgi Paschew,
  • Anthony Beck,
  • Steffen Howitz and
  • Andreas Richter

22 March 2023

Photolithographic patterning of components and integrated circuits based on active polymers for microfluidics is challenging and not always efficient on a laboratory scale using the traditional mask-based fabrication procedures. Here, we present an a...

  • Article
  • Open Access
7 Citations
4,462 Views
19 Pages

Aluminum Nitride Out-of-Plane Piezoelectric MEMS Actuators

  • Almur A. S. Rabih,
  • Mohammad Kazemi,
  • Michaël Ménard and
  • Frederic Nabki

22 March 2023

Integrating microelectromechanical systems (MEMS) actuators with low-loss suspended silicon nitride waveguides enables the precise alignment of these waveguides to other photonic integrated circuits (PICs). This requires both in-plane and out-of-plan...

  • Article
  • Open Access
3 Citations
2,709 Views
11 Pages

22 March 2023

The measurement of in-plane motion in microelectromechanical systems (MEMS) is a challenge for existing measurement techniques due to the small size of the moving devices and the low amplitude of motion. This paper studied the possibility of using im...

  • Article
  • Open Access
8 Citations
3,644 Views
15 Pages

Research on IMU Calibration Model Based on Polar Decomposition

  • Guiling Zhao,
  • Maolin Tan,
  • Xu Wang,
  • Weidong Liang,
  • Shuai Gao and
  • Zhijian Chen

21 March 2023

As an important deterministic error of the inertial measurement unit (IMU), the installation error has a serious impact on the navigation accuracy of the strapdown inertial navigation system (SINS). The impact becomes more severe in a highly dynamic...

  • Article
  • Open Access
4 Citations
2,658 Views
13 Pages

A Novel Analog Interpolation Method for Heterodyne Laser Interferometer

  • Chung-Ping Chang,
  • Syuan-Cheng Chang,
  • Yung-Cheng Wang and
  • Pin-Yi He

21 March 2023

Laser interferometer technology is used in the precision positioning stage as an encoder. For better resolution, laser interferometers usually work with interpolation devices. According to the interpolation factor, these devices can convert an orthog...

  • Article
  • Open Access
1 Citations
2,555 Views
14 Pages

Research on MEMS Solid-State Fuse Logic Control Chip Based on Electrical Explosion Effect

  • Wenting Su,
  • Wenzhong Lou,
  • Hengzhen Feng,
  • Yuecen Zhao,
  • Sining Lv,
  • Wenxing Kan and
  • Bo He

21 March 2023

A microelectromechanical systems (MEMS) solid-state logic control chip with three layers—diversion layer, control layer, and substrate layer—is designed to satisfy fuse miniaturization and integration requirements. A mathematical model is...

  • Article
  • Open Access
8 Citations
2,717 Views
12 Pages

Acid-Base and Photocatalytic Properties of the CeO2-Ag Nanocomposites

  • Alexander A. Kravtsov,
  • Andrey V. Blinov,
  • Andrey A. Nagdalian,
  • Alexey A. Gvozdenko,
  • Alexey B. Golik,
  • Maxim A. Pirogov,
  • Maxim A. Kolodkin,
  • Naiyf S. Alharbi,
  • Shine Kadaikunnan and
  • Mohammad Ali Shariati
  • + 1 author

21 March 2023

In this work, CeO2 nanoparticles, as well as CeO2 nanocomposites with plasmonic silver nanoparticles, were synthesized using a simple sol-gel process. The concentration of silver in the composites varied from 0.031–0.25 wt%. Cerium hydroxide dr...

  • Article
  • Open Access
8 Citations
3,940 Views
12 Pages

Multilayer Smart Holographic Label with Integrated RFID for Product Security and Monitoring

  • Cătălin Pârvulescu,
  • Veronica Anăstăsoaie,
  • Roxana Tomescu,
  • Martino Aldrigo and
  • Dana Cristea

21 March 2023

Counterfeiting presents a major economic problem and an important risk for the public health and safety of individuals and countries. To make the counterfeiting process more difficult, and to ensure efficient authentication, a solution would be to at...

  • Article
  • Open Access
9 Citations
2,873 Views
12 Pages

A Pressure and Temperature Dual-Parameter Sensor Based on a Composite Material for Electronic Wearable Devices

  • Zhidong Zhang,
  • Huinan Zhang,
  • Qingchao Zhang,
  • Xiaolong Zhao,
  • Bo Li,
  • Junbin Zang,
  • Xuefeng Zhao and
  • Tiansheng Zhang

21 March 2023

Wearable sensors integrating multiple functionalities are highly desirable in artificial wearable devices, which are of great significance in the field of biomedical research and for human–computer interactions. However, it is still a great cha...

  • Review
  • Open Access
49 Citations
6,414 Views
21 Pages

Transition-Metal Dichalcogenides in Electrochemical Batteries and Solar Cells

  • Mohammad Bagher Askari,
  • Parisa Salarizadeh,
  • Payam Veisi,
  • Elham Samiei,
  • Homa Saeidfirozeh,
  • Mohammad Taghi Tourchi Moghadam and
  • Antonio Di Bartolomeo

21 March 2023

The advent of new nanomaterials has resulted in dramatic developments in the field of energy production and storage. Due to their unique structure and properties, transition metal dichalcogenides (TMDs) are the most promising from the list of materia...

  • Article
  • Open Access
3 Citations
2,488 Views
12 Pages

20 March 2023

A 10 kV distribution network is a crucial piece of infrastructure to guarantee enterprises’ and households’ access to electricity. Stripping cables is one of many power grid maintenance procedures that are now quickly expanding. However,...

  • Article
  • Open Access
6 Citations
2,754 Views
14 Pages

Fabrication of a Disposable Amperometric Sensor for the Determination of Nitrite in Food

  • Chao Liu,
  • Daoming Chen,
  • Chunnan Zhu,
  • Xiaojun Liu,
  • Yu Wang,
  • Yuepeng Lu,
  • Dongyun Zheng and
  • Baorong Fu

20 March 2023

Silver nanoparticles (AgNPs) were synthesized through an environmentally friendly method with tea extract as a reduction agent. By immobilizing them on the surface of a low-cost pencil graphite electrode (PGE) with the aid of a simple and well-contro...

  • Article
  • Open Access
5 Citations
2,793 Views
10 Pages

Analysis and Hardening of SEGR in Trench VDMOS with Termination Structure

  • Yuan Wang,
  • Tao Liu,
  • Lingli Qian,
  • Hao Wu,
  • Yiren Yu,
  • Jingyu Tao,
  • Zijun Cheng and
  • Shengdong Hu

20 March 2023

Single-event gate-rupture (SEGR) in the trench vertical double-diffused power MOSFET (VDMOS) occurs at a critical bias voltage during heavy-ion experiments. Fault analysis demonstrates that the hot spot is located at the termination of the VDMOS, and...

  • Article
  • Open Access
4 Citations
4,667 Views
8 Pages

Self-Adaption of the GIDL Erase Promotes Stacking More Layers in 3D NAND Flash

  • Tao Yang,
  • Bao Zhang,
  • Qi Wang,
  • Lei Jin and
  • Zhiliang Xia

20 March 2023

The bit density is generally increased by stacking more layers in 3D NAND Flash. Gate-induced drain leakage (GIDL) erase is a critical enabler in the future development of 3D NAND Flash. The relationship between the drain-to-body potential (Vdb) of G...

  • Article
  • Open Access
1 Citations
2,543 Views
15 Pages

Improved Dielectrically Modulated Quad Gate Schottky Barrier MOSFET Biosensor

  • Papanasam Esakki,
  • Prashanth Kumar,
  • Manikandan Esakki and
  • Adithya Venkatesh

20 March 2023

A novel Schottky barrier MOSFET with quad gate and with source engineering has been proposed in this work. A high-κ dielectric is used at the source side of the channel, while SiO2 is used at the drain side of the channel. To improve the carrie...

  • Article
  • Open Access
7 Citations
2,676 Views
17 Pages

Design of Multi-DC Overdriving Waveform of Electrowetting Displays for Gray Scale Consistency

  • Yijian Xu,
  • Shixiao Li,
  • Ziyang Wang,
  • Heng Zhang,
  • Zikai Li,
  • Bo Xiao,
  • Wei Guo,
  • Linwei Liu and
  • Pengfei Bai

19 March 2023

Gray scale consistency in pixels was extremely important for electrowetting displays (EWDs). However, traditional electrowetting display driving waveforms could not obtain a pixel aperture ratio consistency, which led to the occurrence of gray incons...

  • Article
  • Open Access
2 Citations
3,855 Views
15 Pages

19 March 2023

In this paper, an ultrasonic target detection system based on Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) is proposed, which consists of the PMUTs based ultrasonic sensor and the sensor system. Two pieces of 3 × 3 PMUTs arrays wi...

  • Article
  • Open Access
6 Citations
2,646 Views
19 Pages

Impact Analysis of Worn Surface Morphology on Adaptive Friction Characteristics of the Slipper Pair in Hydraulic Pump

  • Siyuan Liu,
  • Chunsong Yu,
  • Chao Ai,
  • Weizhe Zhang,
  • Ziang Li,
  • Yongqiang Zhang and
  • Wanlu Jiang

19 March 2023

The hydrostatic bearing slipper pair of the hydraulic pump has a unique adaptive friction characteristic, which has a better friction reduction and anti-wear ability than the general sliding friction pair, and also has a certain recovery effect on th...

  • Article
  • Open Access
12 Citations
4,267 Views
13 Pages

Chronic Stability of Local Field Potentials Using Amorphous Silicon Carbide Microelectrode Arrays Implanted in the Rat Motor Cortex

  • Eleanor N. Jeakle,
  • Justin R. Abbott,
  • Joshua O. Usoro,
  • Yupeng Wu,
  • Pegah Haghighi,
  • Rahul Radhakrishna,
  • Brandon S. Sturgill,
  • Shido Nakajima,
  • Teresa T. D. Thai and
  • Ana G. Hernandez-Reynoso
  • + 2 authors

19 March 2023

Implantable microelectrode arrays (MEAs) enable the recording of electrical activity of cortical neurons, allowing the development of brain-machine interfaces. However, MEAs show reduced recording capabilities under chronic conditions, prompting the...

  • Article
  • Open Access
2,750 Views
16 Pages

Flow Cytometry with Anti-Diffraction Light Sheet (ADLS) by Spatial Light Modulation

  • Yanyan Gong,
  • Ming Zeng,
  • Yueqiang Zhu,
  • Shangyu Li,
  • Wei Zhao,
  • Ce Zhang,
  • Tianyun Zhao,
  • Kaige Wang,
  • Jiangcun Yang and
  • Jintao Bai

19 March 2023

Flow cytometry is a widespread and powerful technique whose resolution is determined by its capacity to accurately distinguish fluorescently positive populations from negative ones. However, most informative results are discarded while performing the...

  • Article
  • Open Access
3 Citations
2,523 Views
13 Pages

19 March 2023

Solvent flows in the fL/s range across the total surface of a casein microparticle cause its expansion and shrinkage. Microparticles prepared from the milk protein casein have a porous and flexible inner structure with water-filled channels and cavit...

  • Article
  • Open Access
8 Citations
4,058 Views
17 Pages

Green Synthesis of NiO Nanoflakes Using Bitter Gourd Peel, and Their Electrochemical Urea Sensing Application

  • Irum Naz,
  • Aneela Tahira,
  • Aqeel Ahmed Shah,
  • Muhammad Ali Bhatti,
  • Ihsan Ali Mahar,
  • Mehnaz Parveen Markhand,
  • Ghulam Murtaza Mastoi,
  • Ayman Nafady,
  • Shymaa S. Medany and
  • Zafar Hussain Ibupoto
  • + 3 authors

19 March 2023

To determine urea accurately in clinical samples, food samples, dairy products, and agricultural samples, a new analytical method is required, and non-enzymatic methods are preferred due to their low cost and ease of use. In this study, bitter gourd...

  • Article
  • Open Access
2,298 Views
14 Pages

19 March 2023

In laser etching of ITO glass, the warpage due to workpiece positioning causes breakpoint or deformation of micron-scale etching circuits. Based on traditional laser etching, a micro-airflow array pressurization is proposed by using a micro-flow air...

  • Article
  • Open Access
3 Citations
2,406 Views
21 Pages

19 March 2023

Passive valves that deliver a constant flow rate regardless of inlet pressure changes have numerous applications in research, industry, and medical fields. The present article describes a passive spring valve that can be adjusted manually to deliver...

  • Article
  • Open Access
6 Citations
3,734 Views
19 Pages

18 March 2023

This paper originally presents a photovoltaic (PV) evaluation and fault detection (PVEFD) system for PV applications based on the Internet of Things (IoT) technology. The PVEFD system consists of an STM32F103C8T6 chip with a 32-bit Arm Cortex-M3 redu...

  • Article
  • Open Access
7 Citations
3,693 Views
13 Pages

PDMS Micropatterns Coated with PDA and RGD Induce a Regulatory Macrophage-like Phenotype

  • Hoang Lan Pham,
  • Da Hyun Yang,
  • Woo Ri Chae,
  • Jong Hyeok Jung,
  • Thi Xoan Hoang,
  • Nae Yoon Lee and
  • Jae Young Kim

17 March 2023

Regulatory macrophages (Mreg) are a special cell type that present a potential therapeutic strategy for various inflammatory diseases. In vitro, Mreg generation mainly takes 7–10 days of treatment with chemicals, including cytokines. In the pre...

  • Article
  • Open Access
5 Citations
3,034 Views
9 Pages

17 March 2023

In this paper, a novel ferroelectric-based electrostatic doping (Fe-ED) nanosheet tunneling field-effect transistor (TFET) is proposed and analyzed using technology computer-aided design (TCAD) Sentaurus simulation software. By inserting a ferroelect...

  • Article
  • Open Access
5 Citations
2,479 Views
16 Pages

17 March 2023

Using the self-consistent charge density functional tight-binding (SCC-DFTB) method, we study the behavior of graphene-carbon nanotube hybrid films with island topology under axial deformation. Hybrid films are formed by AB-stacked bilayer graphene a...

  • Article
  • Open Access
3 Citations
1,740 Views
25 Pages

17 March 2023

The DEP force is usually calculated from the object’s point of view using the interaction of the object’s induced dipole moment with the inducing field. Recently, we described the DEP behavior of high- and low-conductive 200-µm 2D s...

  • Article
  • Open Access
9 Citations
2,153 Views
13 Pages

On the Investigation of Frequency Characteristics of a Novel Inductive Debris Sensor

  • Xianwei Wu,
  • Hairui Liu,
  • Zhi Qian,
  • Zhenghua Qian,
  • Dianzi Liu,
  • Kun Li and
  • Guoshuai Wang

17 March 2023

Lubricants have the ability to reduce frictions, prevent wear, convey metal debris particles and increase the efficiency of heat transfer; therefore, they have been widely used in mechanical systems. To assess the safety and reliability of the machin...

  • Feature Paper
  • Review
  • Open Access
84 Citations
14,386 Views
36 Pages

Photonic Crystal Enhanced Fluorescence: A Review on Design Strategies and Applications

  • Yanyu Xiong,
  • Skye Shepherd,
  • Joseph Tibbs,
  • Amanda Bacon,
  • Weinan Liu,
  • Lucas D. Akin,
  • Takhmina Ayupova,
  • Seemesh Bhaskar and
  • Brian T. Cunningham

17 March 2023

Nanoscale fluorescence emitters are efficient for measuring biomolecular interactions, but their utility for applications requiring single-unit observations is constrained by the need for large numerical aperture objectives, fluorescence intermittenc...

  • Feature Paper
  • Review
  • Open Access
2 Citations
4,329 Views
29 Pages

Recent State and Challenges in Spectroelectrochemistry with Its Applications in Microfluidics

  • Zhenglong Li,
  • Charmi Chande,
  • Yu-Hsuan Cheng and
  • Sagnik Basuray

17 March 2023

This review paper presents the recent developments in spectroelectrochemical (SEC) technologies. The coupling of spectroscopy and electrochemistry enables SEC to do a detailed and comprehensive study of the electron transfer kinetics and vibrational...

  • Article
  • Open Access
23 Citations
4,162 Views
14 Pages

16 March 2023

The surface/subsurface damage of engineering ceramics after machining has a great influence on the service performance of parts. In order to obtain a high grinding surface quality of engineering ceramics, and take silicon nitride ceramic as a researc...

  • Article
  • Open Access
22 Citations
7,021 Views
16 Pages

Effect of Mask Geometry Variation on Plasma Etching Profiles

  • Josip Bobinac,
  • Tobias Reiter,
  • Julius Piso,
  • Xaver Klemenschits,
  • Oskar Baumgartner,
  • Zlatan Stanojevic,
  • Georg Strof,
  • Markus Karner and
  • Lado Filipovic

16 March 2023

It is becoming quite evident that, when it comes to the further scaling of advanced node transistors, increasing the flash memory storage capacity, and enabling the on-chip integration of multiple functionalities, “there’s plenty of room...

  • Article
  • Open Access
4 Citations
2,334 Views
19 Pages

Effect of Coating Thickness on Abrasion and Cutting Performance of NCD-Coated Ball Endmills on Graphite Machining

  • Hyeonhwa Lee,
  • Jinsoo Kim,
  • Sungcheul Lee,
  • Jongeun Park,
  • Jeongyeon Park and
  • Jongsu Kim

16 March 2023

Nano-crystalline diamond (NCD) coating to improve the performance of cutting tools, as the coating thickness varies, the cutting performance and lifespan of the tool varies because the radius of its cutting edge and coating surface roughness are alte...

  • Article
  • Open Access
5 Citations
1,747 Views
15 Pages

16 March 2023

This work presents a comprehensive model for nanobeams, incorporating beam curvature and surface energy. Gurtin–Murdoch surface stress theory is used, in conjunction with Euler–Bernoulli beam theory, to model the beams and take surface en...

  • Article
  • Open Access
19 Citations
4,250 Views
12 Pages

A Sensitive and Flexible Capacitive Pressure Sensor Based on a Porous Hollow Hemisphere Dielectric Layer

  • Haoao Cui,
  • Yijian Liu,
  • Ruili Tang,
  • Jie Ren,
  • Liang Yao,
  • Yuhao Cai and
  • Da Chen

16 March 2023

Capacitive pressure sensors based on porous structures have been widely researched and applied to a variety of practical applications. To date, it remains a big challenge to develop a capacitive pressure sensor with a high sensitivity and good linear...

  • Feature Paper
  • Review
  • Open Access
16 Citations
4,875 Views
17 Pages

16 March 2023

The field of soft matter is rapidly growing and pushing the limits of conventional materials science and engineering. Soft matter refers to materials that are easily deformed by thermal fluctuations and external forces, allowing for better adaptation...

  • Article
  • Open Access
7 Citations
2,965 Views
13 Pages

15 March 2023

As a major public health issue, early cancer detection is of great significance. A field-effect transistor (FET) based on an MoS2/C60 composite nanolayer as the channel material enhances device performance by adding a light source, allowing the ultra...

  • Feature Paper
  • Article
  • Open Access
7 Citations
3,501 Views
15 Pages

15 March 2023

Terahertz metamaterials are some of the core components of the new generation of high-frequency optoelectronic devices, which have excellent properties that natural materials do not have. The unit structures are generally much smaller than the wavele...

  • Article
  • Open Access
21 Citations
6,387 Views
19 Pages

Ultrafast Microfluidic PCR Thermocycler for Nucleic Acid Amplification

  • Yi-Quan An,
  • Shao-Lei Huang,
  • Bang-Chao Xi,
  • Xiang-Lian Gong,
  • Jun-Hao Ji,
  • You Hu,
  • Yi-Jie Ding,
  • Dong-Xu Zhang,
  • Sheng-Xiang Ge and
  • Ning-Shao Xia
  • + 1 author

15 March 2023

The polymerase chain reaction (PCR) is essential in nucleic acid amplification tests and is widely used in many applications such as infectious disease detection, tumor screening, and food safety testing; however, most PCR devices have inefficient he...

  • Article
  • Open Access
1 Citations
2,268 Views
14 Pages

Design, Fabrication and Analysis of a Hybrid-Order Monolithic Imaging Diffractive Lens on a Germanium Substrate

  • Yidi Zheng,
  • Boping Lei,
  • Bin Fan,
  • Junfeng Du,
  • Jiang Bian,
  • Lihua Wang,
  • Yuchen Liu,
  • Shanghong Guan,
  • Dun Liu and
  • Chao Hu
  • + 3 authors

15 March 2023

Diffractive optical elements are gradually replacing some conventional optical elements and becoming a key component of optical systems due to their unique phase modulation function. However, the imaging performance will be reduced due to the fact th...

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Micromachines - ISSN 2072-666X