- Article
Optimization of Nano-Process Deposition Parameters Based on Gravitational Search Algorithm
- Norlina Mohd Sabri,
- Nor Diyana Md Sin,
- Mazidah Puteh and
- Mohamad Rusop Mahmood
This research is focusing on the radio frequency (RF) magnetron sputtering process, a physical vapor deposition technique which is widely used in thin film production. This process requires the optimized combination of deposition parameters in order...

