Next Article in Journal
Crystal Structures and Spectroscopic Characterization of Four Synthetic Cathinones: 1-(4-Chlorophenyl)-2-(Dimethylamino)Propan-1-One (N-Methyl-Clephedrone, 4-CDC), 1-(1,3-Benzodioxol-5-yl)-2-(Tert-Butylamino)Propan-1-One (tBuONE, Tertylone, MDPT), 1-(4-Fluorophenyl)-2-(Pyrrolidin-1-yl)Hexan-1-One (4F-PHP) and 2-(Ethylamino)-1-(3-Methylphenyl)Propan-1-One (3-Methyl-Ethylcathinone, 3-MEC)
Next Article in Special Issue
Highly Textured Seed Layers for the Growth of Vertically Oriented ZnO Nanorods
Previous Article in Journal
Crystal Structure of IlvC, a Ketol-Acid Reductoisomerase, from Streptococcus Pneumoniae
Previous Article in Special Issue
ZnO as a Functional Material, a Review
 
 
Search for Articles:
Title / Keyword
Author / Affiliation / Email
Journal
Article Type
 
 
Advanced Search
 
Section
Special Issue
Volume
Issue
Number
Page
 
Journals
Crystals
Volume 9
Issue 11
10.3390/cryst9110554
crystals-logo
Submit to this Journal Review for this Journal Propose a Special Issue
► Article Menu

Article Menu

share Share announcement Help format_quote Cite question_answer Discuss in SciProfiles
first_page
settings
Order Article Reprints
Font Type:
Arial Georgia Verdana
Font Size:
Aa Aa Aa
Line Spacing:
Column Width:
Background:
Article

Structural and Electrical Parameters of ZnO Thin Films Grown by ALD with either Water or Ozone as Oxygen Precursors

by
Aleksandra Seweryn
*,
Rafal Pietruszka
,
Bartlomiej S. Witkowski
,
Aleksandra Wierzbicka
,
Rafal Jakiela
,
Piotr Sybilski
and
Marek Godlewski
Institute of Physics, Polish Academy of Sciences, Aleja Lotnikow 32/46, PL-02668 Warsaw, Poland
*
Author to whom correspondence should be addressed.
Crystals 2019, 9(11), 554; https://doi.org/10.3390/cryst9110554
Submission received: 30 August 2019 / Revised: 18 October 2019 / Accepted: 22 October 2019 / Published: 24 October 2019
(This article belongs to the Special Issue Preparation, Characterization and Application of Zinc Oxide–Based Nanostructures)
Browse Figures
Versions Notes

Abstract

Low temperature (at 100 °C and below) growth of ZnO thin films by atomic layer deposition (ALD) is demonstrated. Properties of the layers grown with two different oxygen reagents: ozone and water are compared. Diethylzinc (DEZ) was used as metal precursor. Electrical and structural properties of films obtained at several different growth temperatures, ranging from 50 °C to 250 °C were analyzed. It turned out that the film grown in the water-based process at 250 °C and all films grown with ozone have more ordered crystallographic structure with the privileged growth direction (001) perpendicular to the substrate than water-based samples grown in temperatures 100–200 °C. Higher free electron concentration at room temperature was observed for ozone-based samples grown at 100 °C and 150 °C in comparison to water-based samples obtained at the same growth temperature. Low value of resistivity in case of ozone-based samples grown at 100 °C is a promising result, however lower electron mobility requires further optimization.
Keywords: zinc oxide; TCO films; thin layer zinc oxide; TCO films; thin layer
Graphical Abstract

Share and Cite

MDPI and ACS Style

Seweryn, A.; Pietruszka, R.; Witkowski, B.S.; Wierzbicka, A.; Jakiela, R.; Sybilski, P.; Godlewski, M. Structural and Electrical Parameters of ZnO Thin Films Grown by ALD with either Water or Ozone as Oxygen Precursors. Crystals 2019, 9, 554. https://doi.org/10.3390/cryst9110554

AMA Style

Seweryn A, Pietruszka R, Witkowski BS, Wierzbicka A, Jakiela R, Sybilski P, Godlewski M. Structural and Electrical Parameters of ZnO Thin Films Grown by ALD with either Water or Ozone as Oxygen Precursors. Crystals. 2019; 9(11):554. https://doi.org/10.3390/cryst9110554

Chicago/Turabian Style

Seweryn, Aleksandra, Rafal Pietruszka, Bartlomiej S. Witkowski, Aleksandra Wierzbicka, Rafal Jakiela, Piotr Sybilski, and Marek Godlewski. 2019. "Structural and Electrical Parameters of ZnO Thin Films Grown by ALD with either Water or Ozone as Oxygen Precursors" Crystals 9, no. 11: 554. https://doi.org/10.3390/cryst9110554

APA Style

Seweryn, A., Pietruszka, R., Witkowski, B. S., Wierzbicka, A., Jakiela, R., Sybilski, P., & Godlewski, M. (2019). Structural and Electrical Parameters of ZnO Thin Films Grown by ALD with either Water or Ozone as Oxygen Precursors. Crystals, 9(11), 554. https://doi.org/10.3390/cryst9110554

Note that from the first issue of 2016, this journal uses article numbers instead of page numbers. See further details here.

Article Metrics

Back to TopTop