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Open AccessArticle
Research on Micro-/Nano-Positioning System Driven by a Stepper Motor
by
Minjie Liu
Minjie Liu 1,
Yangyang Yu
Yangyang Yu 1,*,
Liangyu Cui
Liangyu Cui 2,
Ning Ji
Ning Ji 1,3,* and
Xiaofan Deng
Xiaofan Deng 2
1
School of Mechanical Engineering, Tianjin Renai College, Tianjin 301636, China
2
School of Mechanical Engineering, Tianjin University of Technology and Education, Tianjin 300222, China
3
State Key Laboratory of Engine, Tianjin University, Tianjin 300072, China
*
Authors to whom correspondence should be addressed.
Actuators 2024, 13(7), 246; https://doi.org/10.3390/act13070246 (registering DOI)
Submission received: 15 May 2024
/
Revised: 14 June 2024
/
Accepted: 27 June 2024
/
Published: 28 June 2024
Abstract
To achieve cost-effective micro-/nano-displacement adjustment, this paper integrates the advantages of flexible hinge micro-/nano-displacement transmission. A linear stepper motor is utilized as the driving component to design and develop a high-precision, low-cost micro-/nano-positioning system. The structure, design, and working principles of the micro-/nano-positioning platform are introduced. The scaling factor model between micro-positioning platforms and nano-positioning platforms is analyzed. Static and dynamic models of flexible mechanisms have been established. The dimensions of the mechanical structure and the selection of motors are determined. The mechanical characteristics of the micro-/nano-positioning platform are validated through finite element analysis. To address the characteristic of increasing loads during the transmission process, an intelligent control system based on current feedback is designed and developed. The integration of drive and control provides a high level of system integration. Finally, experimental calibration was conducted to test the motion characteristics of the linear stepper motor-driven micro-/nano-positioning platform. It achieved a minimum displacement control resolution of 100 nm and demonstrated a certain level of stability.
Share and Cite
MDPI and ACS Style
Liu, M.; Yu, Y.; Cui, L.; Ji, N.; Deng, X.
Research on Micro-/Nano-Positioning System Driven by a Stepper Motor. Actuators 2024, 13, 246.
https://doi.org/10.3390/act13070246
AMA Style
Liu M, Yu Y, Cui L, Ji N, Deng X.
Research on Micro-/Nano-Positioning System Driven by a Stepper Motor. Actuators. 2024; 13(7):246.
https://doi.org/10.3390/act13070246
Chicago/Turabian Style
Liu, Minjie, Yangyang Yu, Liangyu Cui, Ning Ji, and Xiaofan Deng.
2024. "Research on Micro-/Nano-Positioning System Driven by a Stepper Motor" Actuators 13, no. 7: 246.
https://doi.org/10.3390/act13070246
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