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Journal: Applied SciencesVolume: 10Number: 7895
Article: A New Split Gate Resurf Stepped Oxide UMOSFET Structure with High Doped Epitaxial Layer for Improving Figure of Merit (FOM)
- Authors:
- Runze Chen1,2,
- Lixin Wang1,2,* and
- Min Guo1,3
- et al.
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