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Volume 10
Issue 22
10.3390/app10228065
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Article

Study on the Influence of Sapphire Crystal Orientation on Its Chemical Mechanical Polishing

by
Linlin Cao
1,
Xiang Zhang
1,
Julong Yuan
1,*,
Luguang Guo
1,
Teng Hong
1,
Wei Hang
1 and
Yi Ma
2,*
1
Ultra-Precision Machining Centre, Zhejiang University of Technology, Hangzhou 310014, China
2
College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou 310014, China
*
Authors to whom correspondence should be addressed.
Appl. Sci. 2020, 10(22), 8065; https://doi.org/10.3390/app10228065
Submission received: 5 October 2020 / Revised: 21 October 2020 / Accepted: 11 November 2020 / Published: 13 November 2020
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Abstract

Sapphire has been the most widely used substrate material in LEDs, and the demand for non-C-planes crystal is increasing. In this paper, four crystal planes of the A-, C-, M- and R-plane were selected as the research objects. Nanoindentation technology and chemical mechanical polishing technology were used to study the effect of anisotropy on material properties and processing results. The consequence showed that the C-plane was the easiest crystal plane to process with the material removal rate of 5.93 nm/min, while the R-plane was the most difficult with the material removal rate of 2.47 nm/min. Moreover, the research results have great guiding significance for the processing of sapphire with different crystal orientations.
Keywords: sapphire; crystal orientation; anisotropy; polishing sapphire; crystal orientation; anisotropy; polishing

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MDPI and ACS Style

Cao, L.; Zhang, X.; Yuan, J.; Guo, L.; Hong, T.; Hang, W.; Ma, Y. Study on the Influence of Sapphire Crystal Orientation on Its Chemical Mechanical Polishing. Appl. Sci. 2020, 10, 8065. https://doi.org/10.3390/app10228065

AMA Style

Cao L, Zhang X, Yuan J, Guo L, Hong T, Hang W, Ma Y. Study on the Influence of Sapphire Crystal Orientation on Its Chemical Mechanical Polishing. Applied Sciences. 2020; 10(22):8065. https://doi.org/10.3390/app10228065

Chicago/Turabian Style

Cao, Linlin, Xiang Zhang, Julong Yuan, Luguang Guo, Teng Hong, Wei Hang, and Yi Ma. 2020. "Study on the Influence of Sapphire Crystal Orientation on Its Chemical Mechanical Polishing" Applied Sciences 10, no. 22: 8065. https://doi.org/10.3390/app10228065

APA Style

Cao, L., Zhang, X., Yuan, J., Guo, L., Hong, T., Hang, W., & Ma, Y. (2020). Study on the Influence of Sapphire Crystal Orientation on Its Chemical Mechanical Polishing. Applied Sciences, 10(22), 8065. https://doi.org/10.3390/app10228065

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