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Journal: Applied SciencesVolume: 11Number: 189
Article: Influence of the Secondary Ion Beam Source on the Laser Damage Mechanism and Stress Evolution of IBS Hafnia Layers
  • Authors:
  • Igor Stevanovic1,
  • Zoltán Balogh-Michels1,* and
  • Andreas Bächli1
  • et al.
Link: https://www.mdpi.com/2076-3417/11/1/189

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