The Sliding-Aperture Transform and Its Applicability to Deep-Level Transient Spectroscopy
Round 1
Reviewer 1 Report
2022.4.6
Comments from Reviewer: applsci-1668779
- Original Submission
- Recommendation
- Comments to Editor:
Title: The sliding aperture transform and its applicability to deep-2 level transient spectroscopy
Authors:
Walter R. Buchwald, Robert E. Peale, Perry C. Grant, Julie V. Logan, Preston T. Webster and Christian P. Morath
General comments:
[Summary of this manuscript]
Deep level transient spectroscopy (DLTS) analysis technique (DLTS signal analysis technique is using Sliding Aperture Fourier Transform: SAFT) is an extremely important for semiconductor device physics such as CMOS device process induced defect. This manuscript presents a study about the DLTS signal analysis technique is using computer calculation. Thus, it is very important to deep understanding of DLTS signal analysis method for semiconductor physics and CMOS device fabrication engineering point of view.
[Evaluation of this manuscript]
This manuscript reported that deep level transient spectroscopy (DLTS) analysis technique using computer calculation. This study is informative fundamental DLTS signal analysis technique for semiconductor device physics. However, this manuscript has some problems about explanation of calculation method. Therefore, the reviewer strongly recommends the authors to reconsider the above problem. If the authors can clearly answer the specific comments, the reviewer will reconsider this manuscript.
Specific comments:
- What is the scientific findings of this manuscript?
It is very difficult for reviewer to understand this manuscript of scientific findings for DLTS signal analysis authors method.
Reviewer strongly recommends improvement of introduction section and additional information.
- What is the different of Deep Level Transient Fourier Spectroscopy of this manuscript?
It is very difficult for reviewer to understand this manuscript of scientific findings for DLTS signal analysis authors method.
What is author’s study originality and findings using Sliding Aperture Fourier Transform (SAFT)?
Reviewer strongly recommends improvement of introduction section and additional information.
Reference: Japanese. Journal of Applied Physics. 21, 462-466, March 1982.
- Reviewer strongly recommends that the more detail and clear explanation of the SLAP authors analysis method(Line:105).
Author Response
Please see attachment
Author Response File: 
Author Response.pdf
Reviewer 2 Report
There is no doubt that the knowledge on the defect states origin and their electronic properties is of high importance for further material improvements. This is especially important for wide bandgap materials such as SiC, GaN or Ga2O3. SLAP method presented in the paper seems to be very efficient for a case of closely spaced electronic levels. The authors show that SLAP method can seperate two levels differing by factor of 1.5 in terms of emission rates or time constants. This is similar or even better than offered by Laplace DLTS method where the limit is around 2.
In general, the paper is very interesting, well-written and could be published as it is. However, claimed technique is very similar to Laplace DLTS method and I feel that the paper could be much more helpful when SLAP is compared somehow to Laplace method. Could authors add some short paragraph/comparison about the main differences between SLAP and Laplace DLTS technique? What are the weakness and strengths of a new method? This information should be crucial and beneficial for those readers who work with DLTS or similar techniques.
Author Response
please see the attachment
Author Response File: Author Response.pdf
Reviewer 3 Report
Within the paper The sliding aperture transform and its applicability to deep-level transient spectroscopy authors proposed and implemented a new approach for DLTS measurements analysis. In my opinion the paper is interesting for optoelectronic device community and it is worth to be published. However its current version have to be revised before the final publication. Bellow I listed my comments:
- please improve the quality of Figures depicted in the paper
- In Materials and methods section (lines 75-88) authors refer to one Laplace DLTS which is some kind of extension of Lang's DLTS. What about another variation of DLTS where Fourier transform is calculated?
- Authors within this paper presented partial results obtained when SLAP transform is applied. For me there is a lack of real measurement data of the same semiconductor component where classical DLTS is compared with SLAP approach. Authors should prove the utility of proposed method and compare some properties of detected traps (activation energy, capture cross section, trap concentration ...) using standard DLTS and newly described modification
- What about time needed for data analysis where standard DLTS and SLAP approach are employed?
Author Response
Please see attachement
Author Response File: Author Response.pdf
Round 2
Reviewer 1 Report
2022.5.6
Comments from Reviewer: applsci-1668779
- Original Submission
1.1 Recommendation
- Comments to Editor:
Title: The sliding aperture transform and its applicability to deep level transient spectroscopy
Authors:
Walter R. Buchwald, Robert E. Peale, Perry C. Grant, Julie V. Logan, Preston T. Webster and Christian P. Morath
General comments:
[Summary of this manuscript]
I read above the revised manuscript from authors carefully.
I understand that the authors can clearly answer the specific comments from reviewer.
Therefore, my opinion is accepted this revised manuscript by Appliedscience from MDPI.
Reviewer 3 Report
I appreciate authors comments.
