A Novel MEMS Capacitor with a Side Wall for High Tuning Ranges

Round 1

Reviewer 1 Report

In this manuscript, the authors present a MEMS capacitor with side wall. Theoretical analysis and FEM simulations were carried out. It was demonstrated that large tuning range can be achieved. The method is interesting. 

Comments:

1. Only FEM simulations were presented using ANSYS. It is suggested to verify the method experimentally.

2. The process of optimization should be presented. 

3. From the title, it seems that the manuscript focused on large range tuning of capacitor. However, little result can be found. 

4. It is questionable if the structure can be fabricated using MEMS processing method. 

Author Response

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Author Response File: Author Response.docx

Reviewer 2 Report

The manuscript reported a MEMS capacitor design with optimized tuning range.

1.      It seems that there is a grammatical error in the Abstract, line 11: “is became”.

2.      Please check the single/plural forms in the manuscript.

3.      Line 53: It would be better to have a brief introduction to each of the related works [4, 5, 6, 7, 8].

4.      Figure 4 could be removed.

5.      Section 4.3: The approximation in the model is not quite clear enough. The authors are suggested to add more details.

6.      The current work lacks of experiments. It seems that the manuscript only has simulation-based results. It would be better to add some experimental verifications based on real devices.

Author Response

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Author Response File: Author Response.docx

Round 2

Reviewer 2 Report

The quality of this manuscript is significantly improved.