Numerical and Experimental Research on the Laser-Water Jet Scribing of Silicon

Round 1

Reviewer 1 Report

This paper is a study of the Numerical and experimental researches research on the laser-water jet scribing of silicon. Please, modify the title!

The paper is well written, the English is good.

1. In the “Numerical simulation and experimental setup” part of the Theoretical background, please cite the first formula.
2. In the “Numerical simulation and experimental setup” part of the Theoretical background, the row 88 I cannot find the citation: „Error! Reference source not found.”
3. In the “Numerical simulation and experimental setup” part of the Theoretical background, the rows 92-93 I cannot find the citation: „Error! Reference source not found.”
4. In the “ Results and discussion” part of Figure 8, row 196, please use the scientific scale on Ox, and mark Time (ns), not Time/ns. On Oy scale, same think: Stress (MPa), not Stress/Mpa.

 

I recommend minor revision.

Author Response

Please see the attachment

Author Response File: Author Response.pdf

Reviewer 2 Report

This paper attempts to establish a theoretical model and experimental work on describing the interaction between silicon and LWJ. While this work has some potential, however, the paper needs improvement before it can be published in the journal.

Below points to consider for improvement:

• The introduction is too short to understand the background of the research.
• Again, the literature review is too short. It is not clear, what technique the authors used for their literature search and how. A systematic literature review (SLR) should be conducted.
• It seems an incremental work of author’s groups previous work.
• How Eq (1) was developed? No reference is given.
• Same as for Eq (2) and Eq (3).
• How Eq (5) was developed? No reference is given.
• How Eq (6) was developed? No reference is given.
• No source /referenced is given for Table 1 and Table 2.
• Detailed scientific analysis should be provided for the experimental results.
• No experimental image of workpiece provided in Sec 4.1 and 4.2.
• Some of the fonts on the images are not clearly readable.
• Conclusion should highlight the clear findings of the results probably with numerical values.
• Detail discussion should be provided as mentioned “the machining efficiency of LWJ is relatively low comparing with existing techniques”.
• What is the limitation of the current study? How it can be overcome?

Author Response

Please see the attachment

Author Response File: Author Response.pdf

Round 2

Reviewer 2 Report

The comments were addressed.