1. Introduction
It is commonly accepted that due to significant electron–phonon interactions in nitrides, the photoionization processes of deep trap levels in GaN (Eg = 3.4 eV) and Al
xGa
1-xN alloys should be strongly coupled to the lattice [
1,
2,
3,
4]. Experimentally, the electron-phonon coupling phenomenon is manifested i.e. through a much higher optical ionization energy threshold (E
0) required to promote electrons captured on a trap level to the conduction band (C
B) observed in absorption measurements such as SSPC (Steady-State-Photo-Capacitance) [
5] and DLOS [
6,
7] than it would solely result from the position of a trap level in the bandgap. Therefore, the photoionization energies measured in GaN are typically shifted to higher energies by a Franck–Condon factor (d
FC), which is related to lattice deformation around a defect that changes its charge state after the photoionization process [
8,
9].
As previously proposed in numerous papers [
8,
10], the electron–phonon interaction can be conveniently described in terms of a configuration coordinate diagram (CC) shown schematically in
Figure 1. In general, the CC diagram represents the total potential energy of the electronic and lattice vibration subsystems, which are represented by parabolas and horizontal lines within the parabolas, respectively. In this simple model, a defect can be described by a generalized coordinate Q that is proportional to the bond length around the impurity. Thus, the energy of the system can be expressed by a simple relation where energy is approximately proportional to Q squared (E~Q
2) as the bonds behave like a harmonically vibrating spring.
Furthermore, the CC model assumes that the electron–lattice coupling is a linear function of Q. Therefore, the minima of both parabolas shown in
Figure 1 are horizontally displaced and correspond to the generalized coordinates Q
1 and Q
2 in two different defect charge states, respectively.
It is also important to note that in the CC model, optical transitions occur instantly and vertically, whereas thermal transitions are much slower processes that occur laterally through phonon emission or absorption. This depends on the difference between the initial and the final phonon states, represented as horizontal lines in
Figure 1. If phonon states are equally distributed in both charge states, the parabolas’ minima are vertically shifted by a factor E
therm, which is the thermal activation energy commonly measured with a deep-level transient spectroscopy technique (DLTS) [
11].
It can be shown that in thermodynamic equilibrium, the total energy of the system with the electron occupying the trap level is minimized for a given Q
1 value (left parabola in
Figure 1). However, this situation is remarkably different when a photon is absorbed (E
abs) and the electron is promoted to the conduction band. This process is depicted as an optical transition (blue vertical arrow) in
Figure 1. In the case of an acceptor trap level (as discussed in this example), this transition results in a change in the charge state from negative to neutral. Since the defect has changed its charge state, the bond lengths are slightly different than in the initial Q
1 state, and the excess energy in the form of phonons (d
FCe) is transferred to the lattice, which results in plastic deformation around the impurity and a new equilibrium state, denoted now as Q
2 (minimum of the right parabola in
Figure 1), is obtained.
Similarly, if the electron is recaptured into the trap level, the process is reversed, and the system recovers to its initial Q1 state through the emission of photons with a characteristic energy (Eem), which can be measured by the photoluminescence technique (PL). Again, this process is followed by the reconfiguration of atoms close to the defect and the transfer of energy in the form of phonons (dFCg) released into the lattice until an equilibrium state is achieved.
If a large number of phonons participate in the photoionization process, the optical capture cross-section of electrons can be approximated by the Huang–Rhys approach [
12]. This approach separates both the electron and phonon terms of the optical capture cross-section, and
can be calculated as the product of the electronic part and a Gaussian function representing the phonon term, which takes into account the broadening effects related to lattice vibrations [
13]. This approach has been successfully implemented in the Chantre–Bois [
6] and Pässler [
7] models, commonly used for modeling the optical capture cross-section in nitrides and other materials. Meanwhile, if the electron–phonon coupling is negligible (d
FC → 0), the optical capture cross-section has a purely electronic character and can be approximated with the Lucovsky model [
14].
In general, the processes of photoionization of deep trap levels can be described by the spectral dependence of the optical capture cross-section, where the photoionization energy is usually determined by fitting a theoretical model describing the photoionization process to the experimental data. In this procedure, E
0 and d
FC are used as fitting parameters. It is evident that E
0, d
FCe, and E
T = E
therm are characteristic and unique parameters that explicitly define any defect level within the bandgap. If these parameters are precisely identified, they can facilitate the accurate and unambiguous recognition of defects. As illustrated in
Figure 1, all of the aforementioned parameters are self-dependent and can be expressed by the relation E
abs = E
0 = d
FCe + E
T.
In this study, the optical capture cross-section was determined from the analysis of the photo-capacitance transients, as reported in our recent paper [
15]. Accordingly, the Lucovsky [
14], Chantre–Bois [
6], and Pässler [
7] models were fitted to the spectral shape of the optical capture cross-section that was experimentally determined using the formula:
where C is the initial diode capacitance, N
D is the net donor concentration, N
T is the trap level concentration, and C(t) is the photo-capacitance transient, respectively.
Below, we present the results of fitting the theoretical models to our experimental data, followed by a brief discussion of the defect parameters determined from the fitting procedure. Moreover, some variations in ET and dFC obtained from the Chantre–Bois and the Pässler models are discussed, and a couple of possible reasons for these discrepancies between both models are given.
We would like to emphasize that due to the lack of native GaN substrates essential for obtaining high-quality GaN films, numerous GaN and Al
xGa
1-xN layers studied with SSPC and DLOS techniques have commonly been grown on foreign, lattice-mismatched sapphire templates [
2,
3,
4]. This practice may result in the formation of strained films and high dislocation densities in the overgrown layers, which significantly affect the experimental data and complicate the interpretation of results. In contrast, Ammono-GaN, a native GaN substrate used in this study for an epitaxially deposited n-GaN film, exhibits exceptional structural quality, as validated in various reports [
16,
17]. More importantly, it has a threading dislocation density (TDD) of approximately 4 × 10
4 cm
−2, which is at least two orders of magnitude lower than that of other native GaN substrates and four orders lower than in GaN films grown on sapphire [
18,
19]. These superior properties are transferred to overgrown GaN films, which are strain-free when grown on Ammono-GaN. Consequently, this allows for the reliable and unambiguous analysis of experimental results obtained from such samples.
To the best of our knowledge, there have been no studies investigating deep traps using the DLOS technique in terms of electron–lattice coupling effects in n-GaN films grown by MOVPE on Ammono-GaN. This paper aims to fill that gap in the literature. Our approach allows for the precise identification of signatures corresponding to individual trap states, as demonstrated in the following. This study is original and represents a significant advancement in the field.
3. Results and Discussion
In
Figure 2, we present the AFM (atomic force microscope) topography scan of the n-GaN film deposited on the Ammono-GaN substrate. The GaN surface was atomically flat, characterized by straight atomic steps, with a root-mean-square (RMS) roughness measured for a 3 × 3 μm
2 square below 0.14 nm. This was significantly lower than the RMS roughness of over 0.4 nm typically reported for GaN films grown by MOVPE on Al
2O
3 substrates [
22]. These results clearly demonstrate the superior surface morphology of the GaN layers studied in this paper.
Additionally, the high structural quality of GaN and the Al
xGa
1𢀒xN films and crystals grown on Ammono-GaN was previously validated by XRD (X-ray diffraction) measurements as well. These results can be found in our other papers referenced in refs. [
23,
24].
The n-GaN film investigated in this study was grown on a highly conductive substrate. Therefore, neither the electron concentration nor mobility could be determined through standard Hall effect measurements typically used for evaluating the electrical transport parameters of semiconducting materials. To address this issue, we employed capacitance–voltage (C-V) measurements at 300 K on processed Ni SBDs to assess the electrical characteristics of the n-GaN film. Our analysis revealed a net donor concentration, N
D–N
A, of approximately 2 × 10
16 cm
−3. A comprehensive examination of the electrical properties of the semitransparent Ni SBDs, using both the C-V and current–voltage (I-V) measurements, has been discussed in detail in our recent publication [
15] and, therefore, is not repeated here.
Before characterizing the deep traps using SSPC and DLOS measurements, the Ni/GaN SBDs were investigated with the DLTS technique to identify relatively shallow trap levels. The corresponding DLTS spectrum for the Ni SBDs, recorded at a rate window of 20 s⁻¹ with a filling time (t
P) of 1 ms, is shown in
Figure 3. Two trap levels were identified at energies of Ec–0.25 eV and Ec–0.59 eV, with concentrations of 2 × 10¹
2 cm⁻³ and 6.7 × 10¹³ cm⁻³, respectively. These trap levels are frequently reported in n-GaN films grown by MOVPE [
20,
25]. Notably, the origin of the deeper trap state at Ec–0.59 eV has been previously identified as being associated with Fe
Ga (0/−) [
25], which is an acceptor. In contrast, the potential source of the trap level at Ec–0.25 eV has been discussed in detail in reference [
20], but its origin remains unknown.
A typical SSPC spectrum for Ni/GaN SBDs measured at T = 293 K is shown in
Figure 4, where the Y-axis was recalculated to represent the trap concentration (N
T) using the formula:
where N
D is the net donor concentration, ΔC
ss is the change in the steady-state photo-capacitance transient, and C is the capacitance measured with the bias applied to the sample, here, U
R = −0.5 V. The capture cross-section data obtained from the DLOS measurements calculated from (1) and plotted as empty squares are presented in the inset of
Figure 4. The red solid lines in the inset illustrate the Lucovsky model (d
FC = 0) fitted to the experimental data points according to the theoretical model given by
where E
T represents the trap level position in the bandgap with respect to the conduction band edge, and hν is the photon energy. Accordingly, the E
T values modeled with the Lucovsky approach were found to be E
C–2.05 eV, E
C–2.75 eV, and E
C–3.33 eV, respectively.
For n-type materials, the positive onsets in the SSPC spectra, as shown in
Figure 4, correspond to the trap level positions relative to E
C [
5]. However, due to phonon–lattice coupling effects in GaN that are visible as broad steps (or plateaus) in the SSPC spectra, it is difficult to estimate the exact trap level position solely from them. Moreover, since no information about coupling can be deduced from this approach, trap levels’ positions derived in this manner can be considered only as vague approximations. Therefore, theoretical models describing photoionization processes have to be used for the accurate determination of deep-level parameters, such as E
T and d
FC.
In
Figure 5a, the spectral dependencies of the electron photoionization cross-section for three trap levels detected in the Ni/GaN SBDs are shown.
Figure 5b–d present the same spectral dependencies as shown in
Figure 5a but focus on the individual trap levels only and are displayed over a limited energy range for clarity and visualization purposes. Moreover, the levels positions shown in
Figure 5a–d highlighted in the red color correspond to the E
T derived from the Lucovsky model fitting (d
FC = 0).
It is clear from
Figure 5a–d that the experimental data of the capture cross-section for traps with Ec–2.75 eV and Ec–2.05 eV correspond to a significantly broader range than suggested by a purely electronic excitation model. The unusually large extension of the low-energy tail observed for these traps indicate a strong electron–lattice coupling. Therefore, the lines in
Figure 5a–d were fitted to the experimentally determined optical capture cross-sections based on the models proposed by Lucovsky (red), Chantre–Bois (blue), and Pässler (green). The Lucovsky fit in
Figure 5a–d was obtained using (3), while the Pässler and Chantre–Bois fits were modeled using the following formulas:
For the Chantre–Bois model,
where
,
, and
, where m
* is the electron effective mass of 0.22 m
0, E
0 is the optical ionization energy, and d
FC is the Franck–Condon energy shift, and E
0 = d
FC + E
T. The nonnegative parameter
corresponds to photon–phonon interactions, which are assumed to be proportional to a normal distribution, with a variance of
. If
is low, either due to a low temperature or a small Franck–Condon shift, then the phonon contribution is limited, and the distribution is focused on the incident photon energy. Conversely, if
is large, which implicates both a high temperature and Franck–Condon shift, then the distribution is broad, and the impact of the interaction with phonons becomes significant. Parameter
in the Chantre–Bois model plays a similar role to the parameter
in the Pässler model. However, these models are not equivalent, especially for a small Franck–Condon shift, as the Pässler model is similar to the Lucovsky model, while the Chantre–Bois model is not (due to the 1/2 power in the numerator of the first term under the integral instead of 3/2). The E
k parameter used in the Pässler model corresponds to the kinetic energy of the excited electron [
7]. The α parameter used in the Chantre–Bois model is a fitting parameter that effectively adjusts the mass of the trapped electron, providing a means to fine-tune the model’s accuracy.
In
Table 1, the parameters of the trap levels extracted from the DLOS data fitted with the three models are summarized. These include the optical ionization energy (E
0), the trap level position (E
T), and the d
FC values for all identified trap states. In turn, the individual trap concentrations given in
Table 1 were derived from the SSPC data shown in
Figure 4.
One can notice that the results of the
data fitted with the theoretical models, illustrated in
Figure 5a–d, may lead to a few general remarks: (1) the Lucovsky model fits the experimental data quite well; however, the trap level positions (E
T) determined from this approach appear to be consistently underestimated in comparison with the Chantre–Bois or Pässler models for trap levels that are strongly coupled to the lattice, i.e., where d
FC = 0.15–0.4 and 0.3–0.65 for the Ec–2.05 eV or Ec–2.75 eV trap levels, respectively; (2) in turn, the Lucovsky model applied to the trap level located relatively close to the valence band edge (Ec–3.33 eV) gives almost the same E
T values as the two other models; and (3) significant discrepancies in the defect parameters determined from the Chantre–Bois and Pässler models are observed for states with Ec–2.05 eV and Ec–2.75 eV. The latter occurs despite the fact that both approaches have been developed for modeling trap levels that are strongly coupled with the lattice and, in principle, should give consistent results. Some possible explanations for this discrepancy are proposed below.
In general, our observations on the data fitted with the Lucovsky model align with the model basis, where the potential of a deep trap center is of the ion core type or can be approximated as a delta function, neglecting any long-range Coulomb effects. This model is particularly relevant for hydrogenic-type defect levels, which are generally shallow and located near band edges. When a defect’s wavefunction is delocalized, the electron density at the defect remains low, resulting in minimal influence on the local rearrangements of surrounding atoms, as observed for a trap with Ec–3.33 eV that is located just 70 meV above the valence band edge (VB). Therefore, it is entirely reasonable to classify this trap level as shallow. Consequently, the wavefunctions of midgap states are strongly localized, and the Lucovsky model is not applicable in this case. However, the ET determined from this model can still be used as a rough approximation. Furthermore, since the Lucovsky model assumes a purely electronic character for the ionization process, the dependence of the spectrum on temperature should remain unaffected. This is a distinctive feature of the Lucovsky model and can be easily verified to provide unambiguous proof of whether the trap level can be described with this model or not. Unfortunately, we could only carry out DLOS measurements at 293 K.
In order to explain the discrepancies in the deep trap parameters obtained from the Chantre–Bois and Pässler models, one should reconsider how electron–phonon coupling effects are implemented in both models. In the Pässler model, to quantify the lattice–phonon interaction, the concept of an effective phonon energy,
, was proposed [
7]. Therefore, a magnitude of
should be precisely determined and then used in the data fitting. In GaN, the phonon energy spectrum is generally known; however, it is rather broad and consists of low- and high-energy components, from 0 to 90 meV, as previously reported [
26,
27]. If we assume that both components contribute equally, a good approximation could be
~ 45–50 meV, as used by Pässler in his original work [
7]. However, it is highly recommended to check the calculations with other ε-values to ensure that this parameter has been correctly chosen. In our calculations, the Pässler model with
= 70 meV provided the best agreement between the theory and the data and, thus, was used in the data fitting presented in
Figure 5a–d.
In turn, the Chantre–Bois model applied here for comparison employs a different approach, where the local effective mass of the electron trapped at the defect level is an adjustable parameter denoted as α
−1. This parameter describes the localization of the electron wavefunction at the trap level and, therefore, its interaction with the lattice as well. In this study, α
−1 was individually determined for each trap state and estimated to be 1.67 × 10
−3 Å, 5.65 × 10
−3 Å, and 1.5 Å for traps with Ec–2.05 eV, Ec–2.75 eV, and Ec–3.33 eV, respectively. Since
, smaller values correspond to a higher effective electron mass and, thus, enhanced localization of the trapped electron wavefunction, as expected for deep trap states [
6]. The only α
−1 value reported so far in the literature is for the E2 trap in n-GaN (Ec–0.56 eV), which is relatively shallow in comparison with midgap states, and was estimated to be 3.3 Å [
21]. This result is comparable to α
−1 = 1.5 Å for a trap with Ec–3.33 eV found in this study. In contrast, the midgap states exhibited significantly lower values of α
−1, suggesting a strong coupling to the lattice, as previously reported in other experiments [
1,
2,
3,
4].
Furthermore, an important distinction between the models is their applicability to the data measured at different temperatures. As indicated in Equation (5), the exponential component of the Chantre–Bois model approaches zero at low temperatures, resulting in σ = 0. Consequently, this model should be applied to the experimental data carried out at high temperatures. However, as was suggested by Pässler [
28], due to a relatively high effective phonon energy,
~ 80 meV, the Chantre–Bois model in SiC could be efficient at temperatures above 1000 K, which is beyond the practical temperature range in most experiments. Since the effective phonon energy in GaN is comparable to SiC (
GaN~ 50–60 meV), it is expected that similar restrictions regarding the temperature limit of the model application should be considered for GaN as well.
In turn, the Pässler model, presented in a more generalized form, as given in (4), has no limitations in terms of temperature and can be effectively applied across low- and high-temperature ranges. Consequently, the experimental data fitting with the Pässler model is expected to provide more precise trap parameters than that determined from the Chantre–Bois model.
Finally, the d
FC and E
T obtained in this study from the Pässler model for a trap with Ec–2.75 eV (E
T = 2.61 eV and d
FC = 0.3 eV, given in
Table 1) are consistent with previously published reports where trap levels of E
T = 2.6 eV and d
FC = 0.4 eV were found using the Pässler model [
28,
29], and this trap level was assigned to carbon-related (C
i or C
N) defects [
29]. Since both E
T and d
FC reported in refs. [
29,
30] are in good agreement with the results found in this study, we suggest that both trap states have the same origin.
Unfortunately, the trap level with Ec–2.05 eV has never been reported before so a detailed analysis of this trap level could not be carried out. Therefore, the origin of this particular trap state level is still unknown.