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Journal: Appl. Sci., 2018
Volume: 8
Number: 1720
Article:
Sub-Wavelength Scale Si Inverted Pyramid Fabrication with Enhanced Size Control by Using Silica Sphere Lithography Technique
Authors:
by
Jea-Young Choi and Christiana B. Honsberg
Link:
https://www.mdpi.com/2076-3417/8/10/1720
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