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Journal: Appl. Sci., 2018
Volume: 8
Number: 2424

Article: Four-Probe Bridges for In-Line Determination of Thickness and Sidewall Etch Angle of Surface Micromachined Thin Films
Authors: by Haiyun Liu, Zhen Zhang and Jiaqi Chen
Link: https://www.mdpi.com/2076-3417/8/12/2424

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