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Journal: Appl. Sci., 2019
Volume: 9
Number: 2151

Article: Multi-Objective Defocus Robust Source and Mask Optimization Using Sensitive Penalty
Authors: by Pengzhi Wei, Yanqiu Li, Tie Li, Naiyuan Sheng, Enze Li and Yiyu Sun
Link: https://www.mdpi.com/2076-3417/9/10/2151

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