Lee, J.-M.; Lee, J.-C.; Kim, S.-I.; Lee, S.-J.; Bae, J.-Y.; Park, J.-H.; Park, J.-G.
Surface Transformation of Spin-on-Carbon Film via Forming Carbon Iron Complex for Remarkably Enhanced Polishing Rate. Nanomaterials 2022, 12, 969.
https://doi.org/10.3390/nano12060969
AMA Style
Lee J-M, Lee J-C, Kim S-I, Lee S-J, Bae J-Y, Park J-H, Park J-G.
Surface Transformation of Spin-on-Carbon Film via Forming Carbon Iron Complex for Remarkably Enhanced Polishing Rate. Nanomaterials. 2022; 12(6):969.
https://doi.org/10.3390/nano12060969
Chicago/Turabian Style
Lee, Jun-Myeong, Jong-Chan Lee, Seong-In Kim, Seung-Jae Lee, Jae-Yung Bae, Jin-Hyung Park, and Jea-Gun Park.
2022. "Surface Transformation of Spin-on-Carbon Film via Forming Carbon Iron Complex for Remarkably Enhanced Polishing Rate" Nanomaterials 12, no. 6: 969.
https://doi.org/10.3390/nano12060969
APA Style
Lee, J.-M., Lee, J.-C., Kim, S.-I., Lee, S.-J., Bae, J.-Y., Park, J.-H., & Park, J.-G.
(2022). Surface Transformation of Spin-on-Carbon Film via Forming Carbon Iron Complex for Remarkably Enhanced Polishing Rate. Nanomaterials, 12(6), 969.
https://doi.org/10.3390/nano12060969