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Journal: Coatings, 2021
Volume: 11
Number: 599
Article:
Controlling Film Thickness Distribution by Magnetron Sputtering with Rotation and Revolution
Authors:
by
Handan Huang, Li Jiang, Yiyun Yao, Zhong Zhang, Zhanshan Wang and Runze Qi
Link:
https://www.mdpi.com/2079-6412/11/5/599
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