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Journal: Coatings, 2021
Volume: 11
Number: 599

Article: Controlling Film Thickness Distribution by Magnetron Sputtering with Rotation and Revolution
Authors: by Handan Huang, Li Jiang, Yiyun Yao, Zhong Zhang, Zhanshan Wang and Runze Qi
Link: https://www.mdpi.com/2079-6412/11/5/599

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