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Journal: Coatings, 2022
Volume: 12
Number: 1411
Article:
Low-Temperature Deposition of High-Quality SiO2 Films with a Sloped Sidewall Profile for Vertical Step Coverage
Authors:
by
Congcong Liang, Yuan Zhong, Qing Zhong, Jinjin Li, Wenhui Cao, Xueshen Wang, Shijian Wang, Xiaolong Xu, Jian Wang and Yue Cao
Link:
https://www.mdpi.com/2079-6412/12/10/1411
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